{"id":32771,"date":"2019-03-09T17:58:56","date_gmt":"2019-03-09T09:58:56","guid":{"rendered":"https:\/\/honwaygroup.com\/?p=32771"},"modified":"2025-02-12T11:31:32","modified_gmt":"2025-02-12T03:31:32","slug":"%e6%b0%94%e7%9b%b8%e5%90%88%e6%88%90%e7%9a%84%e9%87%91%e5%88%9a%e7%9f%b3%e5%8d%95%e6%99%b6","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/zh-hans\/%e6%b0%94%e7%9b%b8%e5%90%88%e6%88%90%e7%9a%84%e9%87%91%e5%88%9a%e7%9f%b3%e5%8d%95%e6%99%b6\/","title":{"rendered":"\u6c14\u76f8\u5408\u6210\u7684\u91d1\u521a\u77f3\u5355\u6676"},"content":{"rendered":"<p>1994 \u5e74<a href=\"https:\/\/www.ge.com\/\" rel=\"nofollow noopener\" target=\"_blank\">GE<\/a> \u7684Thomas R. Anthony \u7b49\u4eba\u7533\u8bf7\u5230\u7f8e\u56fd\u4e13\u5229 5,437,891(1995 \u5e74\u9881\u53d1) \u6307\u51fa\u4ee5\u6c14\u76f8\u6c89\u79ef (CVD) \u6cd5\u751f\u957f\u591a\u6676\u91d1\u521a\u77f3\u7684\u7acb\u65b9\u9762 (100) \u53ef\u63d0\u9ad8\u751f\u957f\u901f\u5ea6\u3002 \u5c24\u6709\u8fdb\u8005\uff0c \u82e5\u5728\u53cd\u5e94\u7684\u6c14\u6d41 (\u5982 98%\u6c22 + 1%\u7532\u70f7) \u5185\u52a0\u5165\u5c11\u91cf (\u5982 1%) \u7684\u7a7a\u6c14 (78%\u6c2e\u300121%\u6c27\u30011%\u6c29) \u5219\u751f\u957f\u901f\u5ea6\u4f1a\u66f4\u4e3a\u63d0\u9ad8\u3002<\/p>\n<p>1996 \u5e74 Anthony \u7b49\u53c8\u53d1\u660e\u5728\u9ad8\u538b (\uff1e 3 Kb) \u4ee5\u9ad8\u6e29 (\u5982 1300\u2103) \u5904\u7406 CVD \u751f\u957f\u7684\u591a\u6676\u91d1\u521a\u77f3\u819c\u4f7f\u5176\u7f3a\u9677\u964d\u4f4e\u7684\u65b9\u6cd5 (\u7f8e\u56fd\u4e13\u5229 5,672,395\uff0c1997 \u5e74\u9881\u53d1)\u3002 2004 \u5e74 Robert H. Frushour \u7533\u8bf7\u5230\u76f8\u4f3c\u7684\u7f8e\u56fd\u4e13\u5229 6,811,610\uff0c \u4f46\u5176\u70ed\u5904\u7406\u7684\u91d1\u521a\u77f3\u4e3a\u5355\u6676\u91d1\u521a\u77f3\u819c\u3002 2004 \u5e74 Suresh S. Vagarali \u7b49\u4eba\u83b7\u5f97\u7f8e\u56fd\u4e13\u5229 6,692,714\uff0c \u5176\u5185\u5bb9\u4e3a\u4ee5\u9ad8\u538b\u53ca\u9ad8\u6e29\u7684\u65b9\u6cd5\u628a\u6709\u989c\u8272\u7684\u91d1\u521a\u77f3\u5355\u6676\u6539\u53d8\u6210\u6d45\u8272\u6216\u65e0\u8272\u3002<\/p>\n<p>\u53f0\u6e7e\u4e2d\u592e\u7814\u7a76\u9662\u9662\u58eb (\u4ea6\u4e3a\u7f8e\u56fd\u53ca\u4e2d\u56fd\u7684\u79d1\u5b66\u9662\u9662\u58eb) <a href=\"https:\/\/zh.m.wikipedia.org\/zh-tw\/%E6%AF%9B%E6%B2%B3%E5%85%89\" rel=\"nofollow noopener\" target=\"_blank\">\u6bdb\u6cb3\u5149<\/a>\u53ca Russell Hemley \u4e3a\u7f8e\u56fd Carnegie Institute of Washington (CIW) \u4e0b\u5c5e\u5730\u7403\u7269\u7406\u7814\u7a76\u6240 (Geophysical Lab) \u7684\u79d1\u5b66\u5bb6\uff0c 1998 \u5e74\u53f0\u6e7e\u7684<a href=\"http:\/\/www.alishandiamond.com\/zh\/about-alishandiamond\/who-we-are.html\" rel=\"nofollow noopener\" target=\"_blank\">\u989c\u5fd7\u5b66<\/a>\u4ee5\u4ed6\u4eec\u8d44\u52a9\u7684\u8ba1\u5212\u7814\u7a76\u751f\u957f CVD \u7684\u91d1\u521a\u77f3\u5355\u6676\u3002 \u6c14\u76f8\u6c89\u79ef\u65f6\u4e43\u4ee5\u5929\u7136\u6216\u4eba\u9020\u91d1\u521a\u77f3\u5355\u6676\u4e3a\u6676\u79cd\uff0c \u518d\u5728\u5176\u4e0a\u81ea\u4f53\u5ef6\u4f38 (Homo-epitaxial) \u751f\u957f\u78ca\u6676\u3002 \u6676\u79cd\u5e38\u4ee5\u7acb\u65b9\u9762 (100) \u4e3a\u6c89\u79ef\u9762\uff0c \u4e3a\u4e86\u52a0\u5feb\u751f\u957f\u901f\u7387\uff0c \u4e0d\u4ec5\u6676\u79cd\u7684\u6e29\u5ea6\u5927\u4e3a\u63d0\u9ad8\uff0c \u800c\u4e14\u7532\u70f7\u7684\u542b\u91cf\u4e5f\u9002\u5ea6\u589e\u52a0\uff0c \u6c14\u4f53\u4e2d\u66f4\u52a0\u5165\u6c2e\u53ca\u6c27\uff0c \u8fd9\u6837\u6bcf\u5c0f\u65f6\u53ef\u4ee5 15 \u5fae\u7c73 (\u00b5m) \u4ee5\u4e0a\u7684\u901f\u5ea6\u957f\u51fa\u542b\u6c2e\u7684\u9ec4\u8272\u91d1\u521a\u77f3\u3002 \u6839\u636e Hemley \u7b49\u4eba\u5728 2002 \u5e74\u7533\u8bf7\u83b7\u5f97\u7684\u7f8e\u56fd\u4e13\u5229 6,858,078 \u5185\u4f8b\u4e00\u7684\u63cf\u8ff0\uff0c CVD \u4ee5\u5fae\u6ce2\u7535\u6d46\u4e3a\u70ed\u6e90\u538b\u529b\u4e3a 160 torr\uff0c \u6c14\u4f53\u6210\u4efd\u4e3a 3% N2\uff1a97% CH4 \uff1a12% CH4\uff1a88%H2\u3002 \u6c14\u6d41\u91cf\u4e3a 1.8 sccm N2\u300160 sccm CH4 \u53ca 500 sccm H2\u3002 \u751f\u957f\u7684\u91d1\u521a\u77f3\u6676\u79cd\u5927\u5c0f\u4e3a 3.5 \u00d7 3.5 \u00d7 1.6 mm3\uff0c \u800c\u5176\u6b63\u9762\u4e3a (100)\u3002 \u91d1\u521a\u77f3\u751f\u957f\u7684\u6e29\u5ea6\u4e3a 1220\u2103 \u00b1 10\u2103\u3002 \u751f\u957f 12 \u5c0f\u65f6\u540e\u7684\u5c3a\u5bf8\u4e3a 4.2 \u00d7 4.2\u00d7 2.3 mm3\uff0c \u8ba1\u7b97\u7684\u751f\u957f\u901f\u7387\u4e3a\u6bcf\u5c0f\u65f6 58 \u00b5m\u3002<\/p>\n<p>\u989c\u5fd7\u5b66\u5728 2005 \u5e74\u957f\u51fa 10 \u514b\u62c9\u91d1\u521a\u77f3\uff0c \u8fd9\u662f CVD \u5408\u6210\u91d1\u521a\u77f3\u7684\u91cc\u7a0b\u7891\u3002 \u636e\u4e91\u8fd9\u9897\u91d1\u521a\u77f3\u751f\u957f\u7684\u6210\u672c\u53ea\u6709 5000 \u7f8e\u5143\uff0c \u53ea\u76f8\u5f53\u4e8e\u540c\u91cd\u5929\u7136\u91d1\u521a\u77f3\u5b9d\u77f3\u4ef7\u503c\u7684 5%\u3002 CVD \u751f\u957f\u7684\u91d1\u521a\u77f3\u819c\u91cc\u9762\u5e76\u4e0d\u81f4\u5bc6\uff0c CIW \u4ee5 CVD \u6cd5\u751f\u957f\u7684\u91d1\u521a\u77f3\u7ecf\u9ad8\u538b (6 GPa) \u53ca\u9ad8\u6e29 (\u8fd1 2000\u2103) \u5904\u7406 10 \u5206\u949f\u540e\u786c\u5ea6\u53ef\u663e\u8457\u63d0\u9ad8\uff0c \u52a0\u5de5\u786c\u5316\u540e\u7684\u91d1\u521a\u77f3\u5176\u786c\u5ea6\u751a\u81f3\u53ef\u80fd\u8d85\u8d8a\u5929\u7136\u91d1\u521a\u77f3\u3002 \u7136\u800c\u4ee5\u9ad8\u538b\u70ed\u5904\u7406\u6539\u5584 CVD \u91d1\u521a\u77f3\u819c\u6027\u8d28 (\u5982\u900f\u660e\u5ea6) \u7684\u7f8e\u56fd\u4e13\u5229 (U.S. Patent 6,811,610, filed 2002, issued 2004) \u4eba\u4e3a Robert H. Frushour\u3002 Frushour \u5728 1970 \u5e74\u4ee3\u66fe\u4e3a GE Specialty Materials Department (GE Superabrasives \u7684\u524d\u8eab) \u7684\u7ecf\u7406\u3002 \u5176\u540e\u4ed6\u5728 GTE \u7684 Valenite \u521b\u7acb Valdiamant \u548c GE \u62a2 PCD \u7684\u5ba2\u6237\uff0c \u540e\u6765 GE \u5c06\u4e4b\u5e76\u8d2d\u62c6\u8d70\u4e86\u538b\u673a\uff0c Frushour \u4e43\u53e6\u521b Phoenix Crystal \u51fa\u552e\u9ad8\u538b\u6280\u672f\u3002 GE Superabrasives \u4e8e 2003 \u5e74\u5356\u7ed9\u4e86 Littlejohn\u3002 \u90a3\u65f6 GE \u7684 \u300c\u8001\u81e3\u300d \u90fd\u5df2\u6563\u53bb\uff0c \u4e3a\u4e86\u907f\u514d\u6280\u672f\u7684\u79fb\u8f6c\u53d1\u751f\u65ad\u5c42\uff0c Diamond Innovations \u4e43\u8058\u96c7 Frushour \u8fd9\u540d\u524d \u300c\u53db\u5c06\u300d \u4e3a\u987e\u95ee\u3002 \u4e0d\u4ec5\u5982\u6b64\uff0c GE Superabrasives \u4e5f\u66fe\u56e0\u5b8b\u5065\u6c11\u6280\u672f\u652f\u63f4\u97e9\u56fd\u7684\u65e5\u8fdb\u91d1\u521a\u77f3 (Iljin Diamond) \u53ca\u4e2d\u56fd\u7684\u4e9a\u6d32\u91d1\u521a\u77f3\u800c\u5174\u8bbc\u3002 2004 \u5e74\u8d77 Diamond Innovations \u4e5f\u5f00\u59cb\u63a5\u53d7\u5b8b\u5065\u6c11\u7684\u6280\u672f\u652f\u63f4\u6539\u8fdb\u5176\u9ad8\u538b\u5408\u6210\u7684\u5236\u7a0b\u3002<\/p>\n<p>\u989c\u5fd7\u5b66\u4e43\u4ee5\u65e5\u672c Seki \u5236\u9020\u7684 ASTeX AX5250 \u751f\u957f\u91d1\u521a\u77f3\u3002 \u673a\u53f0\u7684\u529f\u7387\u4e3a 5 Kw \u800c\u5fae\u6ce2\u7684\u9891\u7387\u662f 2.45 GHz\u3002 \u751f\u6210\u9ec4\u8272\u91d1\u521a\u77f3\u7684\u901f\u5ea6\u4e3a\u6bcf\u5c0f\u65f6 15 \u5fae\u7c73\u6216 1\/3 \u514b\u62c9\u3002 \u82e5\u751f\u957f\u65e0\u8272\u900f\u660e\u7684\u91d1\u521a\u77f3\u5219\u901f\u5ea6\u964d\u5230 5 \u5fae\u7c73\u4ee5\u4e0b\u3002 \u4f46\u5728\u751f\u957f\u8fc7\u7a0b\u4e2d (100) \u9762\u4f1a\u5806\u79ef\u51fa (111) \u9762\u7684\u5c0f\u91d1\u5b57\u5854\uff0c \u964d\u4f4e\u4e86\u751f\u957f\u901f\u5ea6\uff0c \u56e0\u6b64\u5e38\u987b\u4e2d\u65ad\u751f\u957f\uff0c \u53d6\u51fa\u91d1\u521a\u77f3\u7814\u78e8\u540e\u518d\u653e\u56de\u63a5\u529b\u589e\u539a\u3002<\/p>\n<p>\u4ee5 5 Kw \u5168\u80fd\u751f\u957f\u7684\u9762\u79ef\u53ef\u8fbe 100 \u5e73\u65b9\u516c\u5206\u3002 \u6c89\u79ef\u5355\u6676\u91d1\u521a\u77f3\u7684\u6e29\u5ea6\u7ea6\u4e3a 1200\u2103\uff0c \u56e0\u6b64\u5b83\u7684\u751f\u957f\u6548\u7387\u6bcf 100 \u5ea6\u7535 (100 KwH) \u53ef\u9ad8\u8fbe 3 cc\uff0c \u6bd4\u4f20\u7edf\u5728\u8f83\u4f4e\u6e29\u5ea6 (900\u2103) \u751f\u957f\u591a\u6676\u91d1\u521a\u77f3\u819c\u7684 CVD \u9ad8\u4e86 10 \u500d\u3002 \u4e0e\u6b64\u76f8\u8f83\uff0c \u6c14\u76f8\u6c89\u79ef\u91d1\u521a\u77f3\u7684\u76f4\u63a5\u6210\u672c\u7ea6\u4e3a\u6bcf\u5c0f\u65f6$10 \u6216\u6bcf\u514b\u62c9\u91d1\u521a\u77f3$100\u3002<\/p>\n<p>\u6c14\u76f8\u6c89\u79ef (CVD) \u4e43\u5728\u77f3\u58a8\u7a33\u5b9a\u533a\u751f\u957f\u4ecb\u7a33\u5b9a\u91d1\u521a\u77f3\uff0c \u56e0\u6b64\u5fc5\u987b\u4f7f\u7528\u5927\u91cf\u80fd\u6e90\u89e3\u79bb\u6c22\u5206\u5b50\u6765\u4fdd\u62a4\u91d1\u521a\u77f3\u952e (sp3)\u3002 \u5373\u4f7f\u5982\u6b64\uff0c \u7531\u4e8e\u6c14\u4f53\u5206\u5b50\u6bd4\u6db2\u4f53\u7a00\u758f\u8fd1\u5343\u500d\uff0c \u751f\u957f\u91d1\u521a\u77f3\u7684\u901f\u5ea6\u96be\u4ee5\u63d0\u9ad8\u3002 \u52a0\u4e0a CVD \u4e3a\u4e8c\u7ef4\u7684\u751f\u957f\u6280\u672f\uff0c \u5fc5\u987b\u6c89\u79ef\u5728\u5927\u9762\u79ef\u4e0a\u624d\u6709\u4ef7\u503c\u5927\u91cf\u751f\u4ea7\u5b9d\u77f3\u7ea7\u91d1\u521a\u77f3\uff0c \u4ecd\u5e94\u4f7f\u7528\u9ad8\u538b\u7684\u6db2\u76f8\u6c89\u79ef\u6cd5\u3002 CVD \u91d1\u521a\u77f3\u7684\u78ca\u6676\u5219\u4e3a\u672a\u6765\u5236\u9020\u534a\u5bfc\u4f53\u8584\u819c\u7684\u6709\u6548\u65b9\u6cd5\u3002<\/p>\n<p>2006 \u5e74 7 \u6708 7 \u65e5\u6bdb\u6cb3\u5149\u53ca\u989c\u5fd7\u5b66\u5728\u53f0\u5317\u56fd\u9645\u4f1a\u8bae\u4e2d\u5fc3\u5404\u4ee5 \u300c\u65b0\u91d1\u521a\u77f3\u65f6\u4ee3\u300d \u53ca \u300c\u9ad8\u901f\u751f\u957f\u5927\u5355\u6676\u91d1\u521a\u77f3\u300d \u4e3a\u9898\u6f14\u8bb2 \u300c\u4e3a\u53f0\u6e7e\u4eba\u9020\u91d1\u521a\u77f3\u5de5\u4e1a\u50ac\u751f\u300d\u3002 \u6bdb\u6cb3\u5149\u63d0\u51fa\u751f\u957f 4 \u540b\u91d1\u521a\u77f3\u677f\u7684\u613f\u666f\uff0c \u800c\u989c\u5fd7\u5b66\u63d0\u51fa\u6bcf\u5c0f\u65f6\u751f\u957f 0.1 mm \u7684\u53ef\u80fd\u6027\u3002 \u4ea4\u5927\u7684\u674e\u663e\u5fb7\u66fe\u8bbf\u95ee\u6bdb\u6cb3\u5149\u7684\u5b9e\u9a8c\u5ba4\u63a2\u8be2\u6280\u672f\u79fb\u8f6c\uff0c \u4f46\u4ef7\u7801\u5374\u8c08\u4e0d\u62e2\uff0c \u674e\u663e\u5fb7\u4e43\u5728 2007 \u5e74\u6210\u7acb \u300c\u521b\u52bf\u6750\u6599\u79d1\u6280\u516c\u53f8\u300d \u7814\u53d1\u76f8\u5173\u6280\u672f\u3002<\/p>\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>1994 \u5e74GE \u7684Thomas R.  [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":16575,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"default","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1782],"tags":[1999,1998,2001,1774,2000],"class_list":["post-32771","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-1782","tag-cvd-zh-hans","tag-1998","tag-2001","tag-diamond-classroom-zh-hans","tag-2000"],"_links":{"self":[{"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/posts\/32771","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/comments?post=32771"}],"version-history":[{"count":0,"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/posts\/32771\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/media\/16575"}],"wp:attachment":[{"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/media?parent=32771"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/categories?post=32771"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/honwaygroup.com\/zh-hans\/wp-json\/wp\/v2\/tags?post=32771"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}