{"id":121133,"date":"2025-07-29T09:00:00","date_gmt":"2025-07-29T01:00:00","guid":{"rendered":"https:\/\/honwaygroup.com\/%e5%8d%8a%e5%af%bc%e4%bd%93%e6%9c%ac%e4%bd%93%e6%8a%9b%e5%85%89%e5%85%89%e5%ad%a6%e3%80%8c%e8%96%84%e5%9e%8b%e5%8c%96%e3%80%8d%e7%a0%94%e7%a9%b6%ef%bc%9a%e5%ae%9e%e7%8e%b0%e8%b6%85%e5%b9%b3%e6%99%b6\/"},"modified":"2025-08-11T09:21:07","modified_gmt":"2025-08-11T01:21:07","slug":"%e5%8d%8a%e5%af%bc%e4%bd%93%e6%9c%ac%e4%bd%93%e6%8a%9b%e5%85%89%e5%85%89%e5%ad%a6%e3%80%8c%e8%96%84%e5%9e%8b%e5%8c%96%e3%80%8d%e7%a0%94%e7%a9%b6%ef%bc%9a%e5%ae%9e%e7%8e%b0%e8%b6%85%e5%b9%b3%e6%99%b6","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/zh-hans\/%e5%8d%8a%e5%af%bc%e4%bd%93%e6%9c%ac%e4%bd%93%e6%8a%9b%e5%85%89%e5%85%89%e5%ad%a6%e3%80%8c%e8%96%84%e5%9e%8b%e5%8c%96%e3%80%8d%e7%a0%94%e7%a9%b6%ef%bc%9a%e5%ae%9e%e7%8e%b0%e8%b6%85%e5%b9%b3%e6%99%b6\/","title":{"rendered":"\u534a\u5bfc\u4f53\u672c\u4f53\u629b\u5149\u5149\u5b66\u300c\u8584\u578b\u5316\u300d\u7814\u7a76\uff1a\u5b9e\u73b0\u8d85\u5e73\u6676\u5706\u7684\u5173\u952e"},"content":{"rendered":"\n<p class=\"has-medium-font-size\">\u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u6301\u7eed\u5411\u5fae\u7f29\u3001\u4f4e\u529f\u8017\u4e0e\u9ad8\u6574\u5408\u5ea6\u8fc8\u8fdb\uff0c\u6676\u5706\u4e0d\u4ec5\u5728\u5c3a\u5bf8\u4e0a\u53d8\u5f97\u66f4\u5927-\u4ece 200mm \u5230 300mm\u3001\u751a\u81f3\u8fc8\u5411 450mm\uff0c\u5176\u539a\u5ea6\u5374\u5448\u73b0\u76f8\u53cd\u7684\u8d8b\u52bf\u2014\u2014\u8d8a\u6765\u8d8a\u300c\u8584\u300d\u3002\u8fd9\u79cd\u6f14\u8fdb\u5e76\u975e\u5355\u7eaf\u4e3a\u4e86\u8282\u7701\u6750\u6599\u6210\u672c\uff0c\u800c\u662f\u51fa\u4e8e\u529f\u80fd\u4e0e\u5236\u7a0b\u7684\u53cc\u91cd\u9700\u6c42\uff1a<strong>\u51cf\u5c11\u5143\u4ef6\u95f4\u7684\u4e92\u8fde\u8ddd\u79bb\u3001\u964d\u4f4e\u5c01\u88c5\u9ad8\u5ea6\u3001\u63d0\u5347\u6563\u70ed\u6548\u7387\u3002<\/strong><\/p>\n\n<p class=\"has-medium-font-size\">\u7136\u800c\uff0c\u300c\u8d8a\u8584\u8d8a\u597d\u300d\u7684\u80cc\u540e\uff0c\u662f\u6781\u5927\u7684\u6280\u672f\u6311\u6218\u3002\u6676\u5706\u539a\u5ea6\u4ece\u539f\u59cb\u7684 700~800 \u03bcm \u51cf\u5c11\u81f3 70~80 \u03bcm\uff0c\u751a\u81f3\u8fdb\u4e00\u6b65\u964d\u4f4e\u81f3 20 \u03bcm \u4ee5\u4e0b\uff0c\u8fd9\u6837\u7684\u8f6c\u53d8\u4f7f\u6676\u5706\u5982\u540c\u7eb8\u7247\u822c\u8106\u5f31\uff0c\u4efb\u4f55\u4e00\u4e1d\u673a\u68b0\u5e94\u529b\u3001\u8868\u9762\u4e0d\u5e73\u6216\u5fae\u88c2\u7eb9\u90fd\u53ef\u80fd\u5bfc\u81f4\u7834\u88c2\u4e0e\u62a5\u5e9f\u3002\u5728\u8fd9\u6837\u7684\u80cc\u666f\u4e0b\uff0c\u300c\u8584\u300d\u7684\u80cc\u540e\uff0c\u8574\u85cf\u7684\u662f\u4e00\u95e8\u6781\u5176\u7cbe\u5bc6\u7684\u5de5\u7a0b\u5b66\u95ee\uff0c\u4e5f\u6b63\u662f\u6211\u4eec\u4eca\u5929\u8981\u63a2\u8ba8\u7684\u6838\u5fc3\u3002<\/p>\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>\u76ee\u5f55<\/h2><nav><ul><li class=\"\"><a href=\"#%E8%B6%85%E5%B9%B3%E5%9D%A6%E6%99%B6%E5%9C%93%EF%BC%9A%E7%82%BA%E4%BD%95%E6%98%AF%E5%8D%8A%E5%B0%8E%E9%AB%94%E8%A3%BD%E7%A8%8B%E7%9A%84%E3%80%8C%E9%9A%B1%E5%BD%A2%E5%86%A0%E8%BB%8D%E3%80%8D%EF%BC%9F\">\u8d85\u5e73\u5766\u6676\u5706\uff1a\u4e3a\u4f55\u662f\u534a\u5bfc\u4f53\u5236\u7a0b\u7684\u300c\u9690\u5f62\u51a0\u519b\u300d\uff1f<\/a><\/li><li class=\"\"><a href=\"#%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%EF%BC%9A%E5%AF%A6%E7%8F%BE%E6%99%B6%E5%9C%93%E8%96%84%E5%8C%96%E8%88%87%E8%B6%85%E5%B9%B3%E5%9D%A6%E5%8C%96%E7%9A%84%E6%A0%B8%E5%BF%83%E5%B7%A5%E8%97%9D\">\u7814\u78e8\u629b\u5149\uff1a\u5b9e\u73b0\u6676\u5706\u8584\u5316\u4e0e\u8d85\u5e73\u5766\u5316\u7684\u6838\u5fc3\u5de5\u827a<\/a><ul><li class=\"\"><a href=\"#%E8%83%8C%E9%9D%A2%E7%A0%94%E7%A3%A8%EF%BC%88-backside-grinding%EF%BC%89\">\u80cc\u9762\u7814\u78e8\uff08Backside Grinding\uff09<\/a><\/li><li class=\"\"><a href=\"#%E5%8C%96%E5%AD%B8%E6%A9%9F%E6%A2%B0%E5%B9%B3%E5%9D%A6%E5%8C%96%EF%BC%88cmp%EF%BC%89\">\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09<\/a><\/li><\/ul><\/li><li class=\"\"><a href=\"#%E3%80%8C%E8%96%84%E3%80%8D%E7%9A%84%E6%8C%91%E6%88%B0%E8%88%87%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E8%80%97%E6%9D%90%E7%9A%84%E5%89%B5%E6%96%B0%E6%87%89%E5%B0%8D\">\u300c\u8584\u300d\u7684\u6311\u6218\u4e0e\u7814\u78e8\u629b\u5149\u8017\u6750\u7684\u521b\u65b0\u5e94\u5bf9<\/a><\/li><li class=\"\"><a href=\"#%E5%AE%8F%E5%B4%B4%E8%80%97%E6%9D%90%E5%A6%82%E4%BD%95%E5%AF%A6%E7%8F%BE%E5%8D%93%E8%B6%8A%E7%9A%84%E8%96%84%E5%8C%96%E8%88%87%E5%B9%B3%E5%9D%A6%E5%8C%96\">\u5b8f\u5d34\u8017\u6750\u5982\u4f55\u5b9e\u73b0\u5353\u8d8a\u7684\u8584\u5316\u4e0e\u5e73\u5766\u5316<\/a><\/li><li class=\"\"><a href=\"#%E7%B5%90%E8%AB%96\">\u7ed3\u8bba<\/a><\/li><li class=\"\"><a href=\"#%E7%AB%8B%E5%8D%B3%E8%A1%8C%E5%8B%95%EF%BC%8C%E8%88%87%E6%88%91%E5%80%91%E5%85%B1%E5%90%8C%E9%96%8B%E5%95%9F%E5%8D%8A%E5%B0%8E%E9%AB%94%E7%B2%BE%E5%AF%86%E8%A3%BD%E7%A8%8B%E7%9A%84%E6%96%B0%E7%AF%87%E7%AB%A0%EF%BC%81\">\u7acb\u5373\u884c\u52d5\uff0c\u8207\u6211\u5011\u5171\u540c\u958b\u555f\u534a\u5c0e\u9ad4\u7cbe\u5bc6\u88fd\u7a0b\u7684\u65b0\u7bc7\u7ae0\uff01<\/a><\/li><li class=\"\"><a href=\"#%E6%9B%B4%E5%A4%9A%E5%AE%8F%E5%B4%B4%E9%91%BD%E7%9F%B3%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E8%80%97%E6%9D%90%E8%B3%87%E8%A8%8A\">\u66f4\u591a\u5b8f\u5d34\u91d1\u521a\u77f3\u7814\u78e8\u629b\u5149\u8017\u6750\u8d44\u8baf<\/a><\/li><li class=\"\"><a href=\"#%E9%96%B1%E8%AE%80%E6%9B%B4%E5%A4%9A%E7%9B%B8%E9%97%9C%E8%AD%B0%E9%A1%8C\">\u9605\u8bfb\u66f4\u591a\u76f8\u5173\u8bae\u9898<\/a><\/li><\/ul><\/nav><\/div>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-cd5593c4664b249fcb9c5769215b50c2\" id=\"&#x8D85;&#x5E73;&#x5766;&#x6676;&#x5713;&#xFF1A;&#x70BA;&#x4F55;&#x662F;&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x7684;&#x300C;&#x96B1;&#x5F62;&#x51A0;&#x8ECD;&#x300D;&#xFF1F;\">\u8d85\u5e73\u5766\u6676\u5706\uff1a\u4e3a\u4f55\u662f\u534a\u5bfc\u4f53\u5236\u7a0b\u7684\u300c\u9690\u5f62\u51a0\u519b\u300d\uff1f<\/h2>\n\n<p class=\"has-medium-font-size\">\u6676\u5706\u8868\u9762\u5e73\u5766\u5ea6\u7684\u91cd\u8981\u6027\uff0c\u5f80\u5f80\u88ab\u4e00\u822c\u4eba\u6240\u5ffd\u7565\uff0c\u4f46\u5b83\u5374\u662f\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u300c\u9690\u5f62\u51a0\u519b\u300d\u3002\u5728\u5fae\u5f71\u3001\u8584\u819c\u6c89\u79ef\u3001\u8680\u523b\u7b49\u5236\u7a0b\u4e2d\uff0c\u82e5\u8868\u9762\u6709\u5948\u7c73\u7ea7\u7684\u4e0d\u5e73\u6574\uff0c\u4fbf\u4f1a\u5bfc\u81f4\u5149\u523b\u5bf9\u7126\u8bef\u5dee\u3001\u8584\u819c\u539a\u5ea6\u4e0d\u5747\u3001\u8680\u523b\u6df1\u5ea6\u5931\u63a7\uff0c\u6700\u7ec8\u5f71\u54cd\u7535\u8def\u56fe\u6848\u7684\u89e3\u6790\u5ea6\u4e0e\u7cbe\u51c6\u5ea6\u3002<\/p>\n\n<p class=\"has-medium-font-size\"><strong>\u60f3\u50cf\u5728\u76d6\u6469\u5929\u5927\u697c\u524d\uff0c\u5730\u57fa\u82e5\u8d77\u4f0f\u4e0d\u5e73\uff0c\u5373\u4f7f\u5efa\u6750\u518d\u597d\u4e5f\u96be\u4ee5\u6784\u7b51\u7a33\u56fa\u7684\u7ed3\u6784<\/strong>\u3002\u540c\u6837\u9053\u7406\uff0c\u6676\u5706\u7684\u5e73\u5766\u5ea6\u76f4\u63a5\u51b3\u5b9a\u4e0a\u5c42\u7535\u8def\u7684\u5806\u53e0\u54c1\u8d28\u4e0e\u6676\u7247\u7684\u6700\u7ec8\u6548\u80fd\u4e0e\u826f\u7387\u3002\u5728\u5148\u8fdb\u5236\u7a0b\u5982 FinFET \u6216 GAA \u67b6\u6784\u4e0b\uff0c\u5948\u7c73\u7ea7\u5dee\u5f02\u90fd\u53ef\u80fd\u6210\u4e3a\u81f4\u547d\u98ce\u9669\uff0c\u8fd9\u6b63\u662f\u5e73\u5766\u5316\u6280\u672f\u65e5\u76ca\u91cd\u8981\u7684\u539f\u56e0\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-4d520567ab2894b48e1e87fa6599524e\" id=\"&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5BE6;&#x73FE;&#x6676;&#x5713;&#x8584;&#x5316;&#x8207;&#x8D85;&#x5E73;&#x5766;&#x5316;&#x7684;&#x6838;&#x5FC3;&#x5DE5;&#x85DD;\">\u7814\u78e8\u629b\u5149\uff1a\u5b9e\u73b0\u6676\u5706\u8584\u5316\u4e0e\u8d85\u5e73\u5766\u5316\u7684\u6838\u5fc3\u5de5\u827a<\/h2>\n\n<h3 class=\"wp-block-heading\" id=\"&#x80CC;&#x9762;&#x7814;&#x78E8;&#xFF08;-backside-grinding&#xFF09;\">\u80cc\u9762\u7814\u78e8\uff08Backside Grinding\uff09<\/h3>\n\n<p class=\"has-medium-font-size\">\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\uff0c\u6676\u5706\u8584\u5316\u4e0d\u4ec5\u662f\u4e3a\u4e86\u8282\u7701\u6750\u6599\u6210\u672c\uff0c\u66f4\u662f\u5b9e\u73b0\u5148\u8fdb\u5c01\u88c5\u4e0e\u70ed\u7ba1\u7406\u9700\u6c42\u7684\u5173\u952e\u6b65\u9aa4\u3002\u6676\u5706\u80cc\u9762\u7814\u78e8\u6280\u672f\uff08Backside Grinding\uff09\u4e3b\u8981\u5e94\u7528\u4e8e\u5236\u7a0b\u540e\u6bb5\uff0c\u5c24\u5176\u5728\u6676\u5706\u5b8c\u6210\u6b63\u9762\u7535\u8def\u5236\u4f5c\u4e4b\u540e\uff0c\u8fdb\u5165\u5c01\u88c5\u524d\u9636\u6bb5\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u6676\u5706\u7684\u539f\u59cb\u539a\u5ea6\u901a\u5e38\u4e3a <strong>700~800 \u03bcm<\/strong>\uff0c\u900f\u8fc7\u7c97\u78e8\uff08Coarse Grinding\uff09\u53ef\u8fc5\u901f\u79fb\u9664\u5927\u90e8\u5206\u6750\u6599\uff0c\u518d\u7ecf\u7cbe\u78e8\uff08Fine Grinding\uff09\u5904\u7406\u8fbe\u5230\u7cbe\u786e\u539a\u5ea6\u4e0e\u66f4\u4f73\u8868\u9762\u54c1\u8d28\u3002\u5178\u578b\u5236\u7a0b\u76ee\u6807\u539a\u5ea6\u4e3a<strong> 70~80 \u03bcm<\/strong>\uff0c\u800c\u5728\u9ad8\u5bc6\u5ea6\u5806\u53e0\u4e0e\u8d85\u8584\u5c01\u88c5\u9700\u6c42\u4e0b\uff0c\u8fdb\u4e00\u6b65\u53ef\u964d\u4f4e\u81f3 <strong>20~30 \u03bcm<\/strong>\uff0c\u652f\u63f4\u5982 <strong>3D IC\u3001MCP\uff08Multi-Chip Package\uff09<\/strong> \u53ca <strong>Heterogeneous Integration<\/strong> \u7b49\u5c01\u88c5\u6280\u672f\u3002<\/p>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x7684;&#x300C;&#x8584;&#x300D;&#x5B78;&#x554F;&#xFF1A;&#x5BE6;&#x73FE;&#x8D85;&#x5E73;&#x5766;&#x6676;&#x5713;&#x7684;&#x95DC;&#x9375;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3.avif\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x7684;&#x300C;&#x8584;&#x300D;&#x5B78;&#x554F;&#xFF1A;&#x5BE6;&#x73FE;&#x8D85;&#x5E73;&#x5766;&#x6676;&#x5713;&#x7684;&#x95DC;&#x9375;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3-1024x630.avif\" alt=\"\" class=\"wp-image-121008\"\/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u80cc\u7814\u8fc7\u7a0b\u9700\u683c\u5916\u6ce8\u610f<strong>\u673a\u68b0\u5e94\u529b\u63a7\u5236\u4e0e\u70ed\u6548\u5e94\u7ba1\u7406<\/strong>\u3002\u4e3a\u9632\u6b62\u6676\u5706\u5f2f\u7fd8\u6216\u7834\u88c2\uff0c\u901a\u5e38\u4f1a\u5148\u8d34\u9644\u4e00\u5c42\u9ad8\u9ecf\u6027\u3001\u5177\u7f13\u51b2\u6027\u7684\u4fdd\u62a4\u80f6\u5e26\uff0c\u56fa\u5b9a\u4e8e\u7814\u78e8\u76d8\u4e0a\uff0c\u4fdd\u969c\u7535\u8def\u9762\u4e0d\u53d7\u635f\u3002\u6b64\u5916\uff0c\u4e3a\u8fdb\u4e00\u6b65\u964d\u4f4e\u8584\u6676\u5706\u7684\u5212\u7247\u98ce\u9669\uff0c\u53ef\u91c7\u7528\u300c\u5148\u5212\u7247\u540e\u51cf\u8584\u300d\uff08DBG, <strong>Dice Before Grinding<\/strong>\uff09\u5de5\u827a\u6d41\u7a0b\uff0c\u5148\u5c06\u6676\u5706\u80cc\u9762\u6807\u8bb0\u4e0e\u5207\u5272\uff0c\u518d\u8fdb\u884c\u7814\u78e8\uff0c\u4f7f\u5355\u9897\u6676\u7c92\u5728\u51cf\u8584\u540e\u66f4\u4e0d\u6613\u7834\u635f\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u5b8f\u5d34\u7684\u7814\u78e8\u8017\u6750\u8bbe\u8ba1\u4fbf\u8003\u8651\u5230\u8fd9\u4e9b\u5fae\u7ed3\u6784\u6311\u6218\uff0c<strong>\u900f\u8fc7\u7c92\u5f84\u5747\u5300\u3001\u78e8\u635f\u53ef\u63a7\u7684CMP\u4e13\u7528\u91d1\u521a\u77f3\u7814\u78e8\u6db2\uff0c\u7ed3\u5408\u9ad8\u8010\u78e8\u7814\u78e8\u57ab<\/strong>\uff0c\u5b9e\u73b0\u9ad8\u6548\u7387\u6750\u6599\u79fb\u9664\u540c\u65f6\u4fdd\u7559\u6676\u5706\u5b8c\u6574\u6027\u4e0e\u8868\u9762\u5747\u8d28\u6027\u3002\u6b64\u6280\u672f\u4ea6\u9002\u7528\u4e8e\u786c\u8106\u6750\u8d28\u5982 <strong>SiC\u3001GaN\u3001\u84dd\u5b9d\u77f3<\/strong> \u7b49\u5148\u8fdb\u529f\u7387\u5143\u4ef6\u57fa\u677f\u3002<\/p>\n\n<h3 class=\"wp-block-heading\" id=\"&#x5316;&#x5B78;&#x6A5F;&#x68B0;&#x5E73;&#x5766;&#x5316;&#xFF08;cmp&#xFF09;\">\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09<\/h3>\n\n<p class=\"has-medium-font-size\"><strong>\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09 <\/strong>\u662f\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u6781\u4e3a\u5173\u952e\u7684\u300c\u4e2d\u4ecb\u6280\u672f\u300d\uff0c\u5b83\u5728\u6bcf\u4e00\u5c42\u8584\u819c\u6c89\u79ef\u6216\u8680\u523b\u540e\u63d0\u4f9b\u5fc5\u8981\u7684\u8868\u9762\u4fee\u6574\uff0c\u786e\u4fdd\u540e\u7eed\u5236\u7a0b\u7cbe\u5ea6\u4e0e\u7ed3\u6784\u5747\u5300\u6027\u3002<\/p>\n\n<p class=\"has-medium-font-size\">CMP \u6280\u672f\u6838\u5fc3\u5728\u4e8e\u540c\u65f6\u5229\u7528\u673a\u68b0\u7814\u78e8\u529b\u4e0e\u5316\u5b66\u8150\u8680\u53cd\u5e94\uff0c\u4ee5\u9009\u62e9\u6027\u5730\u53bb\u9664\u6676\u5706\u8868\u9762\u51f8\u8d77\u7269\uff0c\u4f7f\u8868\u9762\u8fbe\u5230\u5948\u7c73\u7ea7\u5e73\u5766\u5ea6\uff08\u901a\u5e38 Ra &lt; 1 nm\uff0c\u751a\u81f3\u53ef\u8fbe sub-nm \u7b49\u7ea7\uff09\u3002\u5176\u5173\u952e\u6750\u6599\u4e3a\uff1a<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u629b\u5149\u6db2\uff08Slurry\uff09\uff1a<\/strong>\u542b\u5948\u7c73\u7ea7\u78e8\u6599\uff0c\u5982:\u91d1\u521a\u77f3\u3001\u6c27\u5316\u94dd\u3001\u4e8c\u6c27\u5316\u77fd\u3001\u6c27\u5316\u94c8\u7b49\u4e0e\u7279\u5b9a\u5316\u5b66\u6dfb\u52a0\u5242\uff0c\u7528\u4e8e\u9009\u62e9\u6027\u8150\u8680\u76ee\u6807\u6750\u6599\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u629b\u5149\u57ab\uff08Pad\uff09<\/strong>\uff1a\u9ad8\u5f39\u6027\u805a\u5408\u7269\u7ed3\u6784\uff0c\u63d0\u4f9b\u78e8\u524a\u538b\u529b\u4e0e\u6db2\u4f53\u5206\u5e03\u5747\u5300\u6027\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">CMP \u5e7f\u6cdb\u5e94\u7528\u4e8e\u4ee5\u4e0b\u534a\u5bfc\u4f53\u5236\u7a0b\u9636\u6bb5\uff1a<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>STI\uff08Shallow Trench Isolation\uff09\u586b\u5145\u540e\u7684\u5e73\u5766\u5316<\/strong>\uff1a\u6d88\u9664\u586b\u5145\u6c27\u5316\u5c42\u4e0e\u77fd\u57fa\u677f\u95f4\u7684\u4e0d\u5e73\u5dee\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u91d1\u5c5e\u5c42\uff08\u5982 Cu, W\uff09\u6574\u5e73<\/strong>\uff1a\u786e\u4fdd\u91d1\u5c5e\u4e92\u8fde\u5c42\u539a\u5ea6\u5747\u5300\uff0c\u907f\u514d\u7535\u963b\u5f02\u5e38\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\"><strong>\u591a\u5c42\u4e92\u8fde\u5236\u7a0b\uff08MLI\uff09\u5806\u53e0<\/strong>\uff1a\u6bcf\u4e00\u5c42\u6c89\u79ef\u540e\u987b\u4ee5 CMP \u4fee\u5e73\uff0c\u5426\u5219\u5c42\u4e0e\u5c42\u95f4\u5806\u53e0\u4f1a\u4ea7\u751f\u79ef\u9519\u6216\u77ed\u8def\u3002<\/p>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x7684;&#x300C;&#x8584;&#x300D;&#x5B78;&#x554F;&#xFF1A;&#x5BE6;&#x73FE;&#x8D85;&#x5E73;&#x5766;&#x6676;&#x5713;&#x7684;&#x95DC;&#x9375;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x7684;&#x300C;&#x8584;&#x300D;&#x5B78;&#x554F;&#xFF1A;&#x5BE6;&#x73FE;&#x8D85;&#x5E73;&#x5766;&#x6676;&#x5713;&#x7684;&#x95DC;&#x9375;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5-1024x630.jpg\" alt=\"\" class=\"wp-image-121017\"\/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u5b8f\u5d34\u63d0\u4f9b\u591a\u79cd CMP \u629b\u5149\u6db2\u4e0e\u629b\u5149\u57ab\u7ec4\u5408\uff0c\u80fd\u6839\u636e\u4e0d\u540c\u6750\u6599\uff0c\u5982 Low-K \u4ecb\u7535\u5c42\u3001TaN \u963b\u969c\u5c42\u3001\u94dc\u3001\u6c27\u5316\u77fd\u4e0e\u4e0d\u540c\u9009\u62e9\u9700\u6c42\uff0c\u63d0\u4f9b\u6700\u4f73\u5339\u914d\u65b9\u6848\u3002\u5176\u5948\u7c73\u7ea7\u5206\u6563\u6280\u672f\u4e0e\u7a33\u5b9a\u5316\u914d\u65b9\u80fd\u6709\u6548\u907f\u514d <strong>\u629b\u5149\u6db2\u7ed3\u5757\u4e0e\u522e\u75d5\u5f62\u6210<\/strong>\uff0c\u5b9e\u73b0\u7a33\u5b9a\u7684\u79fb\u9664\u7387\uff08RR\uff09\u4e0e\u964d\u4f4e\u7f3a\u9677\u7387\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-e4fab0f01bd37720eb9c37c6ec20601d\" id=\"&#x300C;&#x8584;&#x300D;&#x7684;&#x6311;&#x6230;&#x8207;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x8017;&#x6750;&#x7684;&#x5275;&#x65B0;&#x61C9;&#x5C0D;\">\u300c\u8584\u300d\u7684\u6311\u6218\u4e0e\u7814\u78e8\u629b\u5149\u8017\u6750\u7684\u521b\u65b0\u5e94\u5bf9<\/h2>\n\n<p class=\"has-medium-font-size\">\u5728\u8ffd\u6c42\u6781\u81f4\u300c\u8584\u300d\u4e0e\u300c\u5e73\u300d\u7684\u9053\u8def\u4e0a\uff0c\u4f20\u7edf\u8017\u6750\u5df2\u65e0\u6cd5\u6ee1\u8db3\u73b0\u4ee3\u5236\u7a0b\u7684\u9700\u6c42\u3002\u5b8f\u5d34\u56e2\u961f\u7ed3\u5408\u6750\u6599\u79d1\u5b66\u4e0e\u5236\u7a0b\u7406\u89e3\uff0c\u5f00\u53d1\u51fa\u4e00\u7cfb\u5217\u521b\u65b0\u7814\u78e8\u4e0e\u629b\u5149\u8017\u6750\uff0c\u4e13\u4e3a\u89e3\u51b3\u5148\u8fdb\u5236\u7a0b\u75db\u70b9\u800c\u8bbe\u8ba1\u3002<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u8d85\u8584\u6676\u5706\u7684\u5e94\u529b\u63a7\u5236<\/strong>:\u5b8f\u5d34\u7814\u78e8\u6db2\u5177\u5907\u6e29\u548c\u3001\u5747\u5300\u7684\u7814\u78e8\u4f5c\u7528\uff0c\u642d\u914d\u9ad8\u5f39\u6027\u7684\u629b\u5149\u57ab\u7ed3\u6784\uff0c\u6709\u6548\u5206\u6563\u5e94\u529b\uff0c\u51cf\u5c11\u7fd8\u66f2\u4e0e\u5fae\u88c2\u98ce\u9669\uff0c\u4fdd\u62a4\u6781\u8584\u6676\u5706\u5728\u5236\u7a0b\u4e2d\u7ef4\u6301\u5b8c\u6574\u6027\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u8868\u9762\u65e0\u635f\u4f24\u7814\u78e8<\/strong>:\u5229\u7528\u9ad8\u7eaf\u5ea6\u91d1\u521a\u77f3\u5fae\u7c92\uff08\u7c92\u5f84 \u2264 50 nm\uff09\u4e0e\u7279\u6b8a\u5206\u6563\u6280\u672f\uff0c\u6211\u4eec\u7684\u629b\u5149\u6db2\u53ef\u5728\u6709\u6548\u79fb\u9664\u6750\u6599\u7684\u540c\u65f6\uff0c\u907f\u514d\u4ea7\u751f\u5212\u75d5\u4e0e\u6b21\u8868\u9762\u7f3a\u9677\uff0c\u662f\u9ad8\u9636\u529f\u7387\u5143\u4ef6\u4e0e\u9ad8\u9891\u901a\u8baf\u6676\u7247\u7684\u7406\u60f3\u9009\u62e9\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u7cbe\u786e\u7684\u53bb\u9664\u901f\u7387\u63a7\u5236<\/strong>:\u7814\u78e8\u6db2\u4e0e\u629b\u5149\u57ab\u7684\u534f\u540c\u8bbe\u8ba1\uff0c\u5b9e\u73b0\u6781\u9ad8\u7684\u6750\u6599\u53bb\u9664\u5747\u5300\u6027\u4e0e\u901f\u7387\u63a7\u5236\u80fd\u529b\uff0c\u5373\u4f7f\u5728 20 \u03bcm \u4ee5\u4e0b\u7684\u8d85\u8584\u6676\u5706\uff0c\u4e5f\u80fd\u7cbe\u51c6\u8fbe\u5230\u9884\u5b9a\u539a\u5ea6\u4e0e\u5e73\u5766\u5ea6\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\"><strong>\u7ec8\u6781\u6e05\u6d01\u5ea6<\/strong>:\u6240\u6709\u8017\u6750\u7686\u91c7\u7528\u4f4e\u6b8b\u7559\u3001\u6297\u6c61\u67d3\u914d\u65b9\uff0c\u53ef\u5b9e\u73b0\u65e0\u9897\u7c92\u3001\u65e0\u5316\u5b66\u6b8b\u7559\u7684\u629b\u5149\u8868\u9762\uff0c\u6ee1\u8db3\u6700\u4e25\u82db\u7684\u5236\u7a0b\u6d01\u51c0\u6807\u51c6\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-552db74bbdaca9f37eff254802064f9f\" id=\"&#x5B8F;&#x5D34;&#x8017;&#x6750;&#x5982;&#x4F55;&#x5BE6;&#x73FE;&#x5353;&#x8D8A;&#x7684;&#x8584;&#x5316;&#x8207;&#x5E73;&#x5766;&#x5316;\">\u5b8f\u5d34\u8017\u6750\u5982\u4f55\u5b9e\u73b0\u5353\u8d8a\u7684\u8584\u5316\u4e0e\u5e73\u5766\u5316<\/h2>\n\n<p class=\"has-medium-font-size\">\u5728\u9ad8\u89c4\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\uff0c\u6211\u4eec\u7684\u8017\u6750\u6210\u529f\u5b9e\u73b0\u66f4\u9ad8\u7684\u6d01\u51c0\u6807\u51c6\u4e0e\u64cd\u4f5c\u53ef\u9760\u6027:<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong><a href=\"\/?product_cat=&#x7814;&#x78E8;&#x6DB2;\">\u91d1\u521a\u77f3\u7814\u78e8\u6db2<\/a><\/strong>\uff1a\u5b8f\u5d34\u7684\u91d1\u521a\u77f3\u629b\u5149\u6db2\uff0c\u4e13\u4e3a SiC\u3001GaN \u7b49\u9ad8\u786c\u5ea6\u6750\u6599\u8bbe\u8ba1\uff0c\u91c7\u7528\u8868\u9762\u5fae\u7ed3\u6784\u6539\u8d28\u6280\u672f\uff0c\u5305\u62ec\u5bfc\u5165\u7403\u5f62\u91d1\u521a\u77f3\u9897\u7c92\uff0c\u6709\u6548\u964d\u4f4e\u7814\u78e8\u8fc7\u7a0b\u4e2d\u7684\u522e\u75d5\u4e0e\u8868\u9762\u5e94\u529b\uff0c\u4f7f\u5de5\u4ef6\u8868\u9762\u66f4\u4e0d\u6613\u53d7\u635f\u3002\u6b64\u6280\u672f\u80fd\u5728\u80cc\u9762\u7814\u78e8\u9636\u6bb5\u8fbe\u6210\u6781\u4f4e\u6b21\u8868\u9762\u635f\u4f24\uff0c\u4e3a\u9ad8\u529f\u7387\u5143\u4ef6\u7684\u6563\u70ed\u4e0e\u53ef\u9760\u5ea6\u63d0\u4f9b\u5f3a\u800c\u6709\u529b\u7684\u4fdd\u969c\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>CMP \u89e3\u51b3\u65b9\u6848<\/strong>\uff1a\u642d\u914d\u5b8f\u5d34\u4e94\u5c42\u9ad8\u6027\u80fd\u629b\u5149\u57ab\u4e0e\u6c27\u5316\u94c8\u629b\u5149\u6db2\uff0c\u6211\u4eec\u53ef\u5c06\u6676\u5706\u8868\u9762\u7c97\u7cd9\u5ea6\u964d\u4f4e\u81f3 Ra \u2264 10 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data-id=\"https:\/\/honwaygroup.com\/product\/%e6%99%b6%e5%9c%93%e5%b9%b3%e9%9d%a2%e7%a3%a8%e5%89%8a%e7%94%a8%e7%a0%82%e8%bc%aa\/\">\u6676\u5706\u7814\u78e8\u7802\u8f6e<\/a><\/strong>:\u6211\u4eec\u7684\u6676\u5706\u5e73\u9762\u78e8\u524a\u7802\u8f6e\u9002\u7528\u4e8e\u591a\u79cd\u6676\u5706\u6750\u6599\uff0c\u5177\u5907\u7a33\u5b9a\u7684\u9ad8\u6750\u6599\u79fb\u9664\u7387\uff0c\u53ef\u6709\u6548\u7f29\u77ed\u52a0\u5de5\u65f6\u95f4\u5e76\u63d0\u5347\u751f\u4ea7\u6548\u7387\u3002\u5176\u4f18\u5f02\u7684\u78e8\u8017\u63a7\u5236\u8bbe\u8ba1\uff0c\u786e\u4fdd\u7802\u8f6e\u5bff\u547d\u66f4\u957f\uff0c\u5e76\u5728\u7814\u78e8\u8fc7\u7a0b\u4e2d\u4fdd\u6301\u4f4e\u7814\u524a\u963b\u529b\uff0c\u51cf\u5c11\u8bbe\u5907\u8d1f\u62c5\u5e76\u4fdd\u62a4\u5de5\u4ef6\uff0c\u786e\u4fdd\u52a0\u5de5\u54c1\u8d28\u7a33\u5b9a\u3002\u7279\u522b\u9002\u7528\u4e8e\u77fd\u6676\u5706\u7684\u5e73\u5766\u5316\u53ca\u80cc\u9762\u51cf\u8584\u7814\u78e8\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong><a href=\"https:\/\/honwaygroup.com\/zh-hans\/product\/%e7%9f%bd%e6%99%b6%e5%9c%86%e7%94%a8%e5%80%92%e8%a7%92%e7%a3%a8%e5%89%8a%e7%a0%82%e8%bd%ae\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product\/%e7%9f%bd%e6%99%b6%e5%9c%93%e7%94%a8%e5%80%92%e8%a7%92%e7%a3%a8%e5%89%8a%e7%a0%82%e8%bc%aa\/\">\u77fd\u6676\u5706\u5012\u89d2\u7802\u8f6e<\/a><\/strong>:\u4e13\u4e3a\u534a\u5bfc\u4f53\u6750\u6599\u57fa\u677f\u5012\u89d2\u4e0e\u78e8\u524a\u8bbe\u8ba1\uff0c\u91c7\u7528\u9ad8\u7cbe\u5ea6\u7cbe\u52a0\u5de5\u6280\u672f\uff0c\u5177\u5907\u5747\u5300\u7ec6\u5fae\u7684\u78e8\u7c92\u5c42\u7ed3\u6784\uff0c\u7ecf\u4fee\u6574\u540e\u80fd\u8fbe\u5230\u4f4e\u7f3a\u9677\u7387\u4e0e\u5353\u8d8a\u52a0\u5de5\u7cbe\u5ea6\u3002\u4ea7\u54c1\u7ebf\u6db5\u76d6\u5916\u5468\u53ca\u51f9\u69fd\u52a0\u5de5\uff0c\u5e76\u63d0\u4f9b\u5355\u69fd\u578b\u3001\u591a\u69fd\u578b\u53ca\u7cbe\u7c97\u52a0\u5de5\u6df7\u5408\u578b\u7b49\u591a\u79cd\u6b3e\u5f0f\uff0c\u6ee1\u8db3\u4e0d\u540c\u5236\u7a0b\u9700\u6c42\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong><a href=\"\/?product_cat=\u534a\u5bfc\u4f53\">\u6676\u5706\u5212\u7247\u5200<\/a><\/strong>:\u5b8f\u5d34\u5212\u7247\u5200\u4ea7\u54c1\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u6676\u5706\u3001\u5c01\u88c5\u57fa\u677f\u4ee5\u53caLTCC\u3001PZT\u3001TGG\u7b49\u5404\u7c7b\u786c\u8106\u6750\u6599\u7684\u52a0\u5de5\uff0c\u6df1\u53d7\u5c01\u6d4b\u4e0e\u540e\u6bb5\u5c01\u88c5\u4ea7\u7ebf\u9752\u7750\u3002 HWD25\u7cfb\u5217\u786c\u5200\u5177\u5907\u6781\u5c0f\u5207\u7f1d\u4e0e\u4f18\u5f02\u52a0\u5de5\u7cbe\u5ea6\uff0c\u9002\u7528\u4e8e\u77fd\u6676\u5706\u4e0e\u5404\u7c7b\u5316\u5408\u7269\u6676\u5706\uff1bHWS25\u786c\u5200\u5f3a\u8c03\u5207\u5272\u7a33\u5b9a\u6027\u4e0e\u5c3a\u5bf8\u63a7\u5236\uff0c\u9002\u7528\u4e8e\u9676\u74f7LED\u57fa\u677f\u4e0e\u786c\u8106\u5c01\u88c5\u6750\u6599\uff1bEWS25\u8f6f\u5200\u5219\u517c\u5177\u9ad8\u901f\u5207\u5272\u4e0e\u957f\u5bff\u547d\uff0c\u7279\u522b\u9002\u7528\u4e8ePCB\u3001EMC\u3001Chip LED\u7b49\u57fa\u677f\uff0c\u5168\u9762\u6ee1\u8db3\u534a\u5bfc\u4f53\u5c01\u88c5\u9886\u57df\u7684\u591a\u5143\u9700\u6c42\u3002<\/li>\n<\/ul>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-bae8315d572700c469b5a0fc00e9354f\" id=\"&#x7D50;&#x8AD6;\"><strong>\u7ed3\u8bba<\/strong><\/h2>\n\n<p class=\"has-medium-font-size\">\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e0d\u65ad\u8fc8\u5411\u6781\u9650\u7684\u4eca\u65e5\uff0c\u6bcf\u4e00\u5c42\u6676\u7247\u7684\u6210\u529f\u5806\u53e0\u3001\u6bcf\u4e00\u4e2a\u7535\u8def\u7684\u7cbe\u786e\u6210\u5f62\uff0c\u90fd\u5960\u57fa\u4e8e\u4e00\u5757\u53c8\u8584\u53c8\u5e73\u7684\u6676\u5706\u4e0a\u3002\u5b8f\u5d34\u6df1\u77e5\u8fd9\u9879\u300c\u8584\u300d\u5b66\u95ee\u7684\u91cd\u8981\u6027\uff0c\u81f4\u529b\u4e8e\u7814\u53d1\u80fd\u591f\u9762\u5bf9\u672a\u6765\u6311\u6218\u7684\u8017\u6750\u89e3\u51b3\u65b9\u6848\uff0c\u52a9\u529b\u4e1a\u754c\u6253\u9020\u66f4\u5c0f\u3001\u66f4\u5feb\u3001\u66f4\u5f3a\u7684\u534a\u5bfc\u4f53\u4ea7\u54c1\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u8ba9\u6211\u4eec\u7528\u6280\u672f\uff0c\u4e3a\u672a\u6765\u5e73\u5766\u597d\u8d70\u7684\u9053\u8def\uff0c\u78e8\u51fa\u6700\u575a\u5b9e\u7684\u57fa\u7840\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-5858c30452e8b8e3dbffb3e4d9d6a731\" id=\"&#x7ACB;&#x5373;&#x884C;&#x52D5;&#xFF0C;&#x8207;&#x6211;&#x5011;&#x5171;&#x540C;&#x958B;&#x555F;&#x534A;&#x5C0E;&#x9AD4;&#x7CBE;&#x5BC6;&#x88FD;&#x7A0B;&#x7684;&#x65B0;&#x7BC7;&#x7AE0;&#xFF01;\">\u7acb\u5373\u884c\u52d5\uff0c\u8207\u6211\u5011\u5171\u540c\u958b\u555f\u534a\u5c0e\u9ad4\u7cbe\u5bc6\u88fd\u7a0b\u7684\u65b0\u7bc7\u7ae0\uff01<\/h2>\n\n<ol class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>\u514d\u8d39\u54a8\u8be2\u4e0e\u4e13\u6848\u8bc4\u4f30\uff1a<\/strong> 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