{"id":120961,"date":"2025-07-22T16:31:55","date_gmt":"2025-07-22T08:31:55","guid":{"rendered":"https:\/\/honwaygroup.com\/%e5%88%9b%e6%96%b0%e7%a0%94%e7%a3%a8%e6%8a%9b%e5%85%89%e8%80%97%e6%9d%90%ef%bc%9a%e9%a9%b1%e5%8a%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e4%ba%a7%e4%b8%9a%e8%bf%88%e5%90%91%e6%9b%b4%e9%ab%98%e7%b2%be%e5%af%86\/"},"modified":"2025-08-06T17:27:08","modified_gmt":"2025-08-06T09:27:08","slug":"%e5%88%9b%e6%96%b0%e7%a0%94%e7%a3%a8%e6%8a%9b%e5%85%89%e8%80%97%e6%9d%90%ef%bc%9a%e9%a9%b1%e5%8a%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e4%ba%a7%e4%b8%9a%e8%bf%88%e5%90%91%e6%9b%b4%e9%ab%98%e7%b2%be%e5%af%86","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/zh-hans\/%e5%88%9b%e6%96%b0%e7%a0%94%e7%a3%a8%e6%8a%9b%e5%85%89%e8%80%97%e6%9d%90%ef%bc%9a%e9%a9%b1%e5%8a%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e4%ba%a7%e4%b8%9a%e8%bf%88%e5%90%91%e6%9b%b4%e9%ab%98%e7%b2%be%e5%af%86\/","title":{"rendered":"\u521b\u65b0\u7814\u78e8\u629b\u5149\u8017\u6750\uff1a\u9a71\u52a8\u534a\u5bfc\u4f53\u4ea7\u4e1a\u8fc8\u5411\u66f4\u9ad8\u7cbe\u5bc6\u5ea6"},"content":{"rendered":"\n<p class=\"has-medium-font-size\">\u5728\u534a\u5bfc\u4f53\u4ea7\u4e1a\uff0c\u5bf9\u300c\u9ad8\u7cbe\u5bc6\u5ea6\u300d\u7684\u8ffd\u6c42\u4ece\u672a\u6b62\u6b65\u3002\u4ece\u65e9\u671f\u5fae\u7c73\u7ea7\u5236\u7a0b\u8d70\u5411\u73b0\u5728\u76843nm\u30012nm\u5148\u8fdb\u8282\u70b9\uff0c\u6676\u7247\u8bbe\u8ba1\u65e5\u76ca\u590d\u6742\uff0c\u7ed3\u6784\u65e5\u8d8b\u5fae\u7f29\uff0c\u800c\u5bf9\u5236\u7a0b\u4e2d\u6bcf\u4e00\u9879\u73af\u8282\u7684\u8981\u6c42\u4e5f\u968f\u4e4b\u63d0\u9ad8\uff0c\u5c24\u5176\u662f\u6676\u5706\u8868\u9762\u7684\u5e73\u5766\u5ea6\u4e0e\u7f3a\u9677\u63a7\u5236\uff0c\u6210\u4e3a\u51b3\u5b9a\u6210\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u5ea6\u7684\u5173\u952e\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u4f20\u7edf\u4e0a\uff0c\u7814\u78e8\u629b\u5149\u8017\u6750\u5e38\u88ab\u89c6\u4e3a\u914d\u89d2\uff0c\u8f85\u52a9\u5b8c\u6210\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09\u4e0e\u5176\u4ed6\u76f8\u5173\u5236\u7a0b\u6b65\u9aa4\u3002\u7136\u800c\uff0c\u5728\u4eca\u65e5\u8fd9\u4e2a\u300c\u539f\u5b50\u7ea7\u7cbe\u5ea6\u300d\u4e3a\u76ee\u6807\u7684\u65f6\u4ee3\uff0c\u8fd9\u4e9b\u8017\u6750\u65e9\u5df2\u4e0d\u518d\u53ea\u662f\u8f85\u52a9\u89d2\u8272\uff0c\u800c\u662f\u9a71\u52a8\u5236\u7a0b\u54c1\u8d28\u63d0\u5347\u3001\u652f\u6491\u6280\u672f\u8282\u70b9\u5411\u524d\u63a8\u8fdb\u7684\u6838\u5fc3\u63a8\u624b\u3002\u8017\u6750\u7684\u521b\u65b0\u4e0e\u6027\u80fd\uff0c\u5df2\u6df1\u523b\u5f71\u54cd\u6676\u5706\u5236\u7a0b\u4e2d\u6bcf\u4e00\u540b\u9762\u79ef\u7684\u6210\u8d25\u3002<\/p>\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>\u76ee\u5f55<\/h2><nav><ul><li class=\"\"><a href=\"#%E6%99%B6%E5%9C%93%E8%A1%A8%E9%9D%A2%E7%B2%97%E7%B3%99%E5%BA%A6%E7%9A%84%E7%B2%BE%E5%AF%86%E8%A6%8F%E6%A0%BC\">\u6676\u5706\u8868\u9762\u7c97\u7cd9\u5ea6\u7684\u7cbe\u5bc6\u89c4\u683c<\/a><\/li><li class=\"\"><a href=\"#%E5%A6%82%E4%BD%95%E6%8F%90%E5%8D%87%E7%B2%BE%E5%AF%86%E5%BA%A6%EF%BC%9F%E5%8D%8A%E5%B0%8E%E9%AB%94%E8%A3%BD%E7%A8%8B%E5%B0%8D%E8%80%97%E6%9D%90%E7%9A%84%E6%A5%B5%E8%87%B4%E8%A6%81%E6%B1%82\">\u5982\u4f55\u63d0\u5347\u7cbe\u5bc6\u5ea6\uff1f\u534a\u5bfc\u4f53\u5236\u7a0b\u5bf9\u8017\u6750\u7684\u6781\u81f4\u8981\u6c42<\/a><\/li><li class=\"\"><a href=\"#%E8%A3%BD%E7%A8%8B%E6%AA%A2%E6%B8%AC%E6%8A%80%E8%A1%93\">\u5236\u7a0b\u68c0\u6d4b\u6280\u672f<\/a><\/li><li class=\"\"><a href=\"#%E5%AE%8F%E5%B4%B4%E7%A0%94%E7%A3%A8%E6%B6%B2%E7%B3%BB%E5%88%97\">\u5b8f\u5d34\u7814\u78e8\u6db2\u7cfb\u5217<\/a><\/li><li class=\"\"><a href=\"#%E5%AE%8F%E5%B4%B4%E6%8B%8B%E5%85%89%E5%A2%8A%E7%B3%BB%E5%88%97\">\u5b8f\u5d34\u629b\u5149\u57ab\u7cfb\u5217<\/a><\/li><li class=\"\"><a href=\"#%E5%AE%8F%E5%B4%B4%E7%B2%BE%E5%AF%86%E7%A0%82%E8%BC%AA%E7%B3%BB%E5%88%97\">\u5b8f\u5d34\u7cbe\u5bc6\u7802\u8f6e\u7cfb\u5217<\/a><\/li><li class=\"\"><a href=\"#%E5%AE%8F%E5%B4%B4%E6%99%B6%E5%9C%93%E5%88%92%E7%89%87%E5%88%80%E7%B3%BB%E5%88%97%EF%BC%9A%E7%B2%BE%E6%BA%96%E5%B0%8D%E6%87%89%E5%A4%9A%E6%A8%A3%E6%9D%90%E6%96%99%E7%9A%84%E9%AB%98%E6%95%88%E5%88%87%E5%89%B2%E6%96%B9%E6%A1%88\">\u5b8f\u5d34\u6676\u5706\u5212\u7247\u5200\u7cfb\u5217\uff1a\u7cbe\u51c6\u5bf9\u5e94\u591a\u6837\u6750\u6599\u7684\u9ad8\u6548\u5207\u5272\u65b9\u6848<\/a><\/li><li class=\"\"><a href=\"#%E7%AB%8B%E5%8D%B3%E8%A1%8C%E5%8B%95%EF%BC%8C%E8%88%87%E6%88%91%E5%80%91%E5%85%B1%E5%90%8C%E9%96%8B%E5%95%9F%E5%8D%8A%E5%B0%8E%E9%AB%94%E7%B2%BE%E5%AF%86%E8%A3%BD%E7%A8%8B%E7%9A%84%E6%96%B0%E7%AF%87%E7%AB%A0%EF%BC%81\">\u7acb\u5373\u884c\u52d5\uff0c\u8207\u6211\u5011\u5171\u540c\u958b\u555f\u534a\u5c0e\u9ad4\u7cbe\u5bc6\u88fd\u7a0b\u7684\u65b0\u7bc7\u7ae0\uff01<\/a><\/li><li class=\"\"><a href=\"#%E6%9B%B4%E5%A4%9A%E5%AE%8F%E5%B4%B4%E9%91%BD%E7%9F%B3%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E8%80%97%E6%9D%90%E8%B3%87%E8%A8%8A\">\u66f4\u591a\u5b8f\u5d34\u91d1\u521a\u77f3\u7814\u78e8\u629b\u5149\u8017\u6750\u8d44\u8baf<\/a><\/li><li class=\"\"><a href=\"#%E9%96%B1%E8%AE%80%E6%9B%B4%E5%A4%9A%E7%9B%B8%E9%97%9C%E8%AD%B0%E9%A1%8C\">\u9605\u8bfb\u66f4\u591a\u76f8\u5173\u8bae\u9898<\/a><\/li><\/ul><\/nav><\/div>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-f6acd8f213daf10ea003f35fb71c4cf0\" id=\"&#x6676;&#x5713;&#x8868;&#x9762;&#x7C97;&#x7CD9;&#x5EA6;&#x7684;&#x7CBE;&#x5BC6;&#x898F;&#x683C;\">\u6676\u5706\u8868\u9762\u7c97\u7cd9\u5ea6\u7684\u7cbe\u5bc6\u89c4\u683c<\/h2>\n\n<p class=\"has-medium-font-size\">\u5728\u8fc8\u54113nm\u30012nm\u5236\u7a0b\u8282\u70b9\u7684\u65f6\u4ee3\uff0c\u6676\u5706\u8868\u9762\u7684\u7c97\u7cd9\u5ea6\uff08Roughness\uff09\u6210\u4e3a\u5236\u7a0b\u80fd\u5426\u6210\u529f\u7684\u5173\u952e\u56e0\u7d20\u4e4b\u4e00\uff0c\u5176\u6807\u51c6\u65e9\u5df2\u903c\u8fd1\u539f\u5b50\u5c3a\u5ea6\uff1a<\/p>\n\n<figure class=\"wp-block-table has-medium-font-size\"><table class=\"has-fixed-layout\"><tbody><tr><td>\u5236\u7a0b\u9636\u6bb5<\/td><td>\u5e73\u5747\u8868\u9762\u7c97\u7cd9\u5ea6 (Ra) \u89c4\u683c<\/td><\/tr><tr><td>\u6676\u5706\u629b\u5149\u540e\uff08\u88f8\u77fd\uff09<\/td><td>\u2264 0.2 ~ 0.5 nm<\/td><\/tr><tr><td>\u6c27\u5316\u5c42\/\u6c2e\u5316\u5c42\u8868\u9762<\/td><td>\u2264 0.3 ~ 0.8 nm<\/td><\/tr><tr><td>\u9ad8\u4ecb\u7535\u6750\u6599\u8584\u819c\uff08\u5982 HfO\u2082\uff09<\/td><td>\u2264 0.2 ~ 0.4 nm<\/td><\/tr><tr><td>\u591a\u5c42\u5806\u53e0\u7ed3\u6784\u4ecb\u9762\uff08GAA \u7b49\uff09<\/td><td>\u2264 0.1 ~ 0.3 nm<\/td><\/tr><tr><td>\u91d1\u5c5e\u5c42\uff08\u5982\u94dc\u3001\u94b4\uff09\u8868\u9762<\/td><td>\u2264 0.5 ~ 1.0 nm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-0f2012c39c450b8c732d4921ca1326dc\" id=\"&#x5982;&#x4F55;&#x63D0;&#x5347;&#x7CBE;&#x5BC6;&#x5EA6;&#xFF1F;&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x5C0D;&#x8017;&#x6750;&#x7684;&#x6975;&#x81F4;&#x8981;&#x6C42;\">\u5982\u4f55\u63d0\u5347\u7cbe\u5bc6\u5ea6\uff1f\u534a\u5bfc\u4f53\u5236\u7a0b\u5bf9\u8017\u6750\u7684\u6781\u81f4\u8981\u6c42<\/h2>\n\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x5275;&#x65B0;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x8017;&#x6750;&#xFF1A;&#x9A45;&#x52D5;&#x534A;&#x5C0E;&#x9AD4;&#x7522;&#x696D;&#x9081;&#x5411;&#x66F4;&#x9AD8;&#x7CBE;&#x5BC6;&#x5EA6;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x5275;&#x65B0;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x8017;&#x6750;&#xFF1A;&#x9A45;&#x52D5;&#x534A;&#x5C0E;&#x9AD4;&#x7522;&#x696D;&#x9081;&#x5411;&#x66F4;&#x9AD8;&#x7CBE;&#x5BC6;&#x5EA6;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3-1024x630.jpg\" alt=\"\" class=\"wp-image-120833\" style=\"width:1200px;height:auto\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u534a\u5bfc\u4f53\u5236\u7a0b\u5bf9\u300c\u7cbe\u5bc6\u5ea6\u300d\u7684\u5b9a\u4e49\uff0c\u5df2\u8fdc\u8d85\u4f20\u7edf\u52a0\u5de5\u7684\u6982\u5ff5\u3002\u5728\u5148\u8fdb\u5236\u7a0b\u4e2d\uff0c\u6240\u8c13\u7684\u300c\u9ad8\u7cbe\u5bc6\u5ea6\u300d\u4e0d\u518d\u53ea\u662f\u5fae\u7c73\u7ea7\u7684\u8bef\u5dee\u63a7\u5236\uff0c\u800c\u662f\u5411\u5948\u7c73\u3001\u751a\u81f3\u76ae\u7c73\u7b49\u7ea7\u903c\u8fd1\u3002\u8fd9\u5bf9\u7814\u78e8\u629b\u5149\u8017\u6750\u63d0\u51fa\u4e86\u56db\u5927\u6311\u6218\u4e0e\u6280\u672f\u95e8\u69db\uff1a<\/p>\n\n<p class=\"has-medium-font-size\"><strong>1. \u8d85\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ultra-Low Surface Roughness\uff09<\/strong><\/p>\n\n<p class=\"has-medium-font-size\">\u6676\u5706\u8868\u9762\u5fc5\u987b\u8fbe\u5230\u539f\u5b50\u7ea7\u5e73\u5766\uff0c\u5426\u5219\u540e\u7eed\u7684\u5149\u523b\u3001\u9540\u819c\u3001\u8680\u523b\u7b49\u5236\u7a0b\u5c06\u65e0\u6cd5\u7cbe\u51c6\u5bf9\u4f4d\u6216\u5747\u5300\u6c89\u79ef\u3002\u4f8b\u5982\uff0c\u9ad8\u9636\u6676\u5706\u629b\u5149\u540e\u7684\u5e73\u5747\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ra\uff09\u9700\u63a7\u5236\u5728 <strong>0.5 nm \u4ee5\u4e0b<\/strong>\uff0c\u751a\u81f3\u8fdb\u4e00\u6b65\u8981\u6c42<strong> 0.2 nm <\/strong>\u7684\u754c\u9762\u5e73\u6ed1\u5ea6\u3002\u4f20\u7edf\u673a\u68b0\u65b9\u5f0f\u96be\u4ee5\u8fbe\u5230\u6b64\u6807\u51c6\uff0c\u56e0\u6b64\u9700\u4ef0\u8d56\u7cbe\u5bc6\u7684\u5316\u5b66\u673a\u68b0\u7814\u78e8\u4e0e\u5148\u8fdb\u8017\u6750\u7684\u7ed3\u5408\u3002<\/p>\n\n<p class=\"has-medium-font-size\"><strong>2. \u6781\u4f4e\u7f3a\u9677\u7387\uff08Ultra-Low Defectivity\uff09<\/strong><\/p>\n\n<p class=\"has-medium-font-size\">\u5236\u7a0b\u4e2d\u6700\u5e38\u89c1\u7684\u7f3a\u9677\u5305\u62ec\u5212\u75d5\u3001\u9897\u7c92\u3001\u6b8b\u7559\u7269\u3001\u51f9\u9677\u7b49\uff0c\u8fd9\u4e9b\u5fae\u5c0f\u7455\u75b5\u90fd\u53ef\u80fd\u5bfc\u81f4\u7535\u6027\u5f02\u5e38\u6216\u77ed\u8def\uff0c\u8fdb\u800c\u4e25\u91cd\u5f71\u54cd\u6676\u7247\u7684\u826f\u7387\u3002\u6839\u636e\u76ee\u524d\u7684\u68c0\u6d4b\u6280\u672f\uff08\u5982SEM\u3001AFM\u3001\u62c9\u66fc\u5149\u8c31\u7b49\uff09\uff0c\u4e00\u9897\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\u5373\u53ef\u5bf93nm\u5236\u7a0b\u9020\u6210\u4e0d\u53ef\u9006\u635f\u5bb3\u3002\u8017\u6750\u7684\u7eaf\u51c0\u5ea6\u3001\u5206\u6563\u7a33\u5b9a\u6027\u4e0e\u5316\u5b66\u6027\u8d28\u63a7\u5236\uff0c\u76f4\u63a5\u5f71\u54cd\u5176\u5728\u5b9e\u9645\u5e94\u7528\u4e2d\u662f\u5426\u4f1a\u5f15\u5165\u65b0\u7f3a\u9677\u3002<\/p>\n\n<p class=\"has-medium-font-size\"><strong>3. \u5353\u8d8a\u7684\u539a\u5ea6\u5747\u5300\u6027\uff08Excellent Thickness Uniformity\uff09<\/strong><\/p>\n\n<p class=\"has-medium-font-size\">\u5728\u591a\u5c42\u5806\u53e0\u7684\u6676\u5706\u4e0a\uff0c\u629b\u5149\u6bcf\u4e00\u5c42\u90fd\u9700\u63a7\u5236\u6750\u6599\u53bb\u9664\u901f\u7387\uff0c\u4f7f\u6574\u7247\u6676\u5706\u4e0a\u7684\u819c\u539a\u4fdd\u6301\u4e00\u81f4\u3002\u4f8b\u5982\u5728\u9540\u67097 nm\u6c27\u5316\u94dd\u7684\u6676\u5706\u4e0a\u8fdb\u884cCMP\uff0c\u9664\u4e86\u8981\u6c42\u53bb\u9664\u539a\u5ea6\u8bef\u5dee\u5c0f\u4e8e1 nm\u5916\uff0c\u4ecb\u9762\u7c97\u7cd9\u5ea6\u751a\u81f3\u8981\u6c42\u4f4e\u81f3 <strong>0.2 nm<\/strong>\u3002\u8fd9\u5bf9\u8017\u6750\u7684\u5206\u5e03\u5747\u5300\u6027\u4e0e\u529b\u5b66\u7ed3\u6784\u8bbe\u8ba1\u63d0\u51fa\u6781\u9ad8\u8981\u6c42\u3002<\/p>\n\n<p class=\"has-medium-font-size\"><strong>4. \u9ad8\u9009\u62e9\u6bd4\uff08High Selectivity\uff09<\/strong><\/p>\n\n<p class=\"has-medium-font-size\">\u5148\u8fdb\u5236\u7a0b\u5f80\u5f80\u6d89\u53ca\u5f02\u8d28\u6750\u6599\u7684\u591a\u5c42\u7ed3\u6784\uff0c\u5982GAA\uff08Gate-All-Around\uff09\u67b6\u6784\u4e2d\u51fa\u73b0\u7684Inner Spacer\u3001Etch Back\u7b49\u6b65\u9aa4\uff0c\u9700\u7cbe\u51c6\u53bb\u9664\u7279\u5b9a\u6750\u6599\u800c\u4e0d\u4f24\u53ca\u90bb\u8fd1\u5c42\u3002\u8fd9\u5c31\u8981\u6c42\u8017\u6750\u4e0d\u4ec5\u8981\u591f\u300c\u6e29\u67d4\u300d\uff0c\u4e5f\u8981\u80fd\u300c\u8bc6\u6750\u300d\uff0c\u5177\u5907\u826f\u597d\u7684\u6750\u6599\u9009\u62e9\u6027\u53bb\u9664\u80fd\u529b\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u5728\u8fd9\u6837\u7684\u80cc\u666f\u4e0b\uff0c\u5e02\u9762\u4e0a\u5bf9\u7814\u78e8\u629b\u5149\u8017\u6750\u7684\u671f\u671b\uff0c\u65e9\u5df2\u4ece\u300c\u80fd\u7528\u300d\u8fdb\u9636\u5230\u300c\u80fd\u7cbe\u786e\u6267\u884c\u6307\u5b9a\u529f\u80fd\u3001\u7a33\u5b9a\u63a7\u5236\u5236\u7a0b\u53d8\u5f02\u300d\u7684\u7a0b\u5ea6\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-a9b23ca82ed712889672ed284c37b2c5\" id=\"&#x88FD;&#x7A0B;&#x6AA2;&#x6E2C;&#x6280;&#x8853;\">\u5236\u7a0b\u68c0\u6d4b\u6280\u672f<\/h2>\n\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x5275;&#x65B0;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x8017;&#x6750;&#xFF1A;&#x9A45;&#x52D5;&#x534A;&#x5C0E;&#x9AD4;&#x7522;&#x696D;&#x9081;&#x5411;&#x66F4;&#x9AD8;&#x7CBE;&#x5BC6;&#x5EA6;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x5275;&#x65B0;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x8017;&#x6750;&#xFF1A;&#x9A45;&#x52D5;&#x534A;&#x5C0E;&#x9AD4;&#x7522;&#x696D;&#x9081;&#x5411;&#x66F4;&#x9AD8;&#x7CBE;&#x5BC6;&#x5EA6;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5-1024x630.jpg\" alt=\"&#x5948;&#x7C73;&#x63A2;&#x9488;&#x66F2;&#x7387;&#x5F71;&#x54CD;&#x626B;&#x63CF;&#x5F62;&#x8C8C;&#x7684;&#x771F;&#x5B9E;&#x6027;\" class=\"wp-image-120842\" style=\"width:1200px;height:auto\" \/><\/a><figcaption class=\"wp-element-caption\">\u5948\u7c73\u63a2\u9488\u66f2\u7387\u5f71\u54cd\u626b\u63cf\u5f62\u8c8c\u7684\u771f\u5b9e\u6027<\/figcaption><\/figure>\n\n<p class=\"has-medium-font-size\">\u4e3a\u4e86\u786e\u4fdd\u8017\u6750\u80fd\u7b26\u5408\u4e0a\u8ff0\u6781\u81f4\u8981\u6c42\uff0c\u73b0\u4ee3\u534a\u5bfc\u4f53\u5de5\u4e1a\u642d\u914d\u5148\u8fdb\u7684\u68c0\u6d4b\u6280\u672f\uff0c\u4ece\u591a\u89d2\u5ea6\u68c0\u67e5\u6676\u5706\u54c1\u8d28\u3002\u5305\u62ec\uff1a<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>\u65e0\u56fe\u5f62\u7f3a\u9677\u68c0\u6d4b<\/strong>\uff08Non-patterned Defect Inspection\uff09\uff1a\u638c\u63e1\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u9897\u7c92\u6c61\u67d3\u3001\u819c\u5c42\u4e0d\u5747\u3001\u5fae\u88c2\u7eb9\u7b49\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u6709\u56fe\u5f62\u7f3a\u9677\u68c0\u6d4b<\/strong>\uff08Patterned Defect Inspection\uff09\uff1a\u8bc6\u522b\u56fe\u5f62\u504f\u5dee\u3001\u8680\u523b\u7f3a\u9677\u3001\u6b8b\u7559\u7269\u7b49\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u62c9\u66fc\u5149\u8c31\u5206\u6790<\/strong>\uff1a\u5206\u6790\u6750\u6599\u7ed3\u6784\u3001\u5e94\u529b\u4e0e\u6c61\u67d3\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u5948\u7c73\u63a2\u9488\uff08AFM\/STM\uff09\u6280\u672f<\/strong>\uff1a\u63d0\u4f9b\u539f\u5b50\u7ea7\u8868\u9762\u5f62\u8c8c\u8d44\u8baf\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>X\u5149\u53cd\u5c04\u7387\uff08XRR\uff09\u6280\u672f<\/strong>\uff1a\u975e\u7834\u574f\u6027\u91cf\u6d4b\u8d85\u8584\u819c\u539a\u4e0e\u754c\u9762\u7c97\u7cd9\u5ea6\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u8fd9\u4e9b\u68c0\u6d4b\u624b\u6bb5\uff0c\u8fdb\u4e00\u6b65\u63d0\u9ad8\u4e86\u8017\u6750\u7814\u53d1\u4e0e\u54c1\u7ba1\u95e8\u69db\uff0c\u4fc3\u4f7f\u4f9b\u5e94\u5546\u5fc5\u987b\u4ee5\u521b\u65b0\u6750\u6599\u4e0e\u7cbe\u51c6\u5236\u7a0b\u56de\u5e94\u5e02\u573a\u9700\u6c42\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u9762\u5bf9\u8fd9\u4e9b\u524d\u6240\u672a\u6709\u7684\u5236\u7a0b\u6311\u6218\uff0c<strong>\u5b8f\u5d34\u7684\u7814\u78e8\u629b\u5149\u8017\u6750\u4ea7\u54c1\u7ebf\uff0c\u6b63\u662f\u4e3a\u300c\u66f4\u9ad8\u7cbe\u5bc6\u5ea6\u300d\u800c\u91cf\u8eab\u6253\u9020<\/strong>\u3002\u65e0\u8bba\u662f\u5728\u6676\u5706\u7c97\u78e8\u3001\u7cbe\u78e8\u3001CMP \u629b\u5149\u6216\u4fee\u6574\u5668\u5e94\u7528\uff0c\u5b8f\u5d34\u7686\u6295\u5165\u5927\u91cf\u7814\u53d1\u8d44\u6e90\uff0c\u4f18\u5316\u6750\u6599\u7ed3\u6784\u4e0e\u5236\u7a0b\u914d\u65b9\uff0c\u5e2e\u52a9\u5ba2\u6237\u5728\u9ad8\u7aef\u5236\u7a0b\u4e2d\u5b9e\u73b0\u7a33\u5b9a\u3001\u9ad8\u826f\u7387\u7684\u6210\u679c\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-1fbabf952f6e626af84224a138d1cab7\" id=\"&#x5B8F;&#x5D34;&#x7814;&#x78E8;&#x6DB2;&#x7CFB;&#x5217;\">\u5b8f\u5d34\u7814\u78e8\u6db2\u7cfb\u5217<\/h2>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x6574;&#x5408;&#x5716;2_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-scaled.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x6574;&#x5408;&#x5716;2_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-1024x1024.jpg\" alt=\"\" class=\"wp-image-120852\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u5b8f\u5d34\u7684\u7814\u78e8\u6db2\u91c7\u7528\u5148\u8fdb\u7684\u5948\u7c73\u7ea7\u5fae\u7c92\u6280\u672f\uff0c\u63d0\u4f9b\u591a\u79cd\u6750\u6599\u4e13\u7528\u914d\u65b9\u4e0e\u7c92\u5f84\u9009\u62e9\uff0c\u9488\u5bf9\u4e0d\u540c\u8868\u9762\u7279\u6027\u5b9e\u73b0\u6781\u81f4\u6548\u679c\uff1a<\/p>\n\n<figure class=\"wp-block-table has-medium-font-size\"><table class=\"has-fixed-layout\"><tbody><tr><td>\u9879\u76ee<\/td><td>STI\u3001\u4f4ek\u4ecb\u7535\u5c42<\/td><td>\u7845(Si)<\/td><td>\u78b3\u5316\u7845(SiC)<\/td><\/tr><tr><td>\u7814\u78e8\u8017\u6750<\/td><td>\u6c27\u5316\u94c8<\/td><td>\u6c27\u5316\u94dd\u3001\u4e8c\u6c27\u5316\u7845\u7814\u78e8\u6db2\/\u7c89<\/td><td>\u91d1\u521a\u77f3\u7814\u78e8\u6db2\/\u818f<\/td><\/tr><tr><td>\u7814\u78e8\u8017\u65f6<\/td><td><\/td><td>20~30\u5206\u949f<\/td><td>60~120\u5206\u949f<\/td><\/tr><tr><td>\u635f\u5931\u7387<\/td><td><\/td><td>&lt;1%<\/td><td>\u22675~10%<\/td><\/tr><\/tbody><\/table><\/figure>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>\u5b8f\u5d34\u91d1\u521a\u77f3\u629b\u5149\u6db2<\/strong>\uff1a\u5e94\u7528\u9ad8\u7eaf\u5ea6\u91d1\u521a\u77f3\u5fae\u7c92\uff0c\u7c92\u5f84\u53ef\u63a7\u5236\u5728 <strong>\u226450 nm<\/strong>\uff0c\u63d0\u4f9b\u4ece\u7c97\u78e8\u5230\u955c\u9762\u7ea7\u629b\u5149\u7684\u5168\u9762\u652f\u63f4\uff0c\u7279\u522b\u9002\u7528\u4e8e<strong> SiC\u3001GaN \u7b49\u8d85\u786c\u6750\u6599<\/strong>\u7684\u8868\u9762\u5904\u7406\uff0c\u5b9e\u73b0 <strong>Ra \u2264 0.01 \u03bcm\uff0810 nm\uff09<\/strong> \u7684\u6781\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff0c\u663e\u8457\u63d0\u5347\u529f\u7387\u5143\u4ef6\u826f\u7387\u4e0e\u6563\u70ed\u6548\u7387\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u5b8f\u5d34\u6c27\u5316\u94dd\u629b\u5149\u6db2<\/strong>\uff1a\u9488\u5bf9\u7845\u3001\u91d1\u5c5e\u5c42\uff08\u5982\u94dc\u3001\u94a8\uff09\u4e0e\u4ecb\u7535\u5c42\u6750\u6599\u8bbe\u8ba1\uff0c\u517c\u5177<strong>\u6750\u6599\u79fb\u9664\u7387\u4e0e\u8868\u9762\u54c1\u8d28<\/strong>\uff0c\u786e\u4fdd\u9ad8\u826f\u7387\u7684\u591a\u5c42\u5806\u53e0\u5236\u7a0b\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u5b8f\u5d34\u6c27\u5316\u94c8\u629b\u5149\u6db2<\/strong>\uff1a\u9002\u7528\u4e8eSTI\uff08\u6d45\u6c9f\u69fd\u9694\u79bb\uff09\u4e0e\u4f4ek\u4ecb\u7535\u5c42\u5e73\u5766\u5316\uff0c\u5177\u5907<strong>\u9ad8\u9009\u62e9\u6bd4\u4e0e\u4f4e\u7f3a\u9677\u7387<\/strong>\uff0c\u80fd\u7cbe\u51c6\u79fb\u9664\u6307\u5b9a\u5c42\u800c\u4e0d\u4f24\u5bb3\u90bb\u8fd1\u7ed3\u6784\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u5b8f\u5d34\u4e8c\u6c27\u5316\u7845\u629b\u5149\u6db2<\/strong>\uff1a\u5e7f\u6cdb\u7528\u4e8e\u77fd\u6676\u5706\u4e0e\u4ecb\u7535\u5c42\u7684\u7cbe\u629b\uff0c\u5177\u5907<strong>\u7a33\u5b9a\u53bb\u9664\u901f\u7387\u4e0e\u4f18\u5f02\u5e73\u5766\u5ea6\u63a7\u5236<\/strong>\uff0c\u4e3a\u9ad8\u9636\u903b\u8f91\u6676\u7247\u4e0e\u8bb0\u5fc6\u4f53\u5236\u7a0b\u63d0\u4f9b\u7406\u60f3\u89e3\u51b3\u65b9\u6848\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u8fd9\u4e9b\u591a\u6837\u5316\u7684\u78e8\u6599\u9009\u62e9\uff0c\u8ba9\u5b8f\u5d34\u5f97\u4ee5\u4f9d\u6750\u6599\u6027\u8d28\u7cbe\u51c6\u914d\u5bf9\uff0c\u4e0d\u8bba\u662f\u521a\u6027\u77fd\u6676\u3001\u590d\u6742\u91d1\u5c5e\u3001\u6216\u8106\u6027\u6c27\u5316\u7269\uff0c\u90fd\u80fd\u627e\u5230\u6700\u9002\u5408\u7684\u7814\u78e8\u65b9\u6848\u3002<\/p>\n\n<p class=\"has-medium-font-size\"><strong>\u5b8f\u5d34\u7814\u78e8\u6db2\u7279\u8272<\/strong><\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>\u9ad8\u7a33\u5b9a\u6027<\/strong>\uff1a\u957f\u65f6\u95f4\u4f7f\u7528\u4e0d\u6613\u6c89\u6dc0\u3001\u4e0d\u7ed3\u6676\uff0c\u51cf\u5c11\u5236\u7a0b\u5f02\u5e38\u98ce\u9669\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u4f4e\u6bd2\u6027\u3001\u6613\u5904\u7406<\/strong>\uff1a\u73af\u4fdd\u914d\u65b9\u8bbe\u8ba1\uff0c\u5e9f\u6db2\u6613\u4e8e\u5904\u7406\uff0c\u7b26\u5408\u7eff\u8272\u5236\u9020\u8d8b\u52bf\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u6297\u6c61\u67d3\u80fd\u529b<\/strong>\uff1a\u6709\u6548\u964d\u4f4e\u6b8b\u7559\u3001\u6c14\u6ce1\u4e0e\u9897\u7c92\u4e8c\u6b21\u6c61\u67d3\u7684\u98ce\u9669\uff0c\u786e\u4fdd\u7f3a\u9677\u7387\u63a7\u5236\u5728\u6700\u5c0f\u503c\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u6613\u6e05\u6d01\u914d\u65b9\uff1a<\/strong>\u6211\u4eec\u6df1\u77e5\u6e05\u6d01\u4e0e\u5de5\u4ef6\u4fdd\u62a4\u7684\u91cd\u8981\u6027\uff0c\u7279\u522b\u8bbe\u8ba1\u6210\u6613\u6e05\u6d01\u914d\u65b9\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u4eceFinFET\u5236\u7a0b\u8fc8\u5411GAA\uff08Gate-All-Around\uff09\u67b6\u6784\uff0c\u5bf9\u7814\u78e8\u6db2\u7684\u8981\u6c42\u66f4\u52a0\u590d\u6742\u3002\u5b8f\u5d34\u56e2\u961f\u63d0\u4f9b\u5ba2\u5236\u5316\u53c2\u6570\u8c03\u6574\uff0c\u9488\u5bf9\u4e0d\u540c\u6750\u6599\uff08\u5982 Si\u3001SiC\u3001GaN\u3001\u6c27\u5316\u7269\u7b49\uff09\u4e0e\u5236\u7a0b\u6761\u4ef6\uff08\u53bb\u9664\u7387\u3001\u9009\u62e9\u6bd4\u3001\u7f3a\u9677\u63a7\u5236\u3001\u7c97\u7cd9\u5ea6\u6807\u51c6\uff09\uff0c\u91cf\u8eab\u6253\u9020\u6700\u4f73\u5316\u65b9\u6848\u3002<\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-8d1fca4520a295cfda91fede6cb2d38e\" id=\"&#x5B8F;&#x5D34;&#x62CB;&#x5149;&#x588A;&#x7CFB;&#x5217;\">\u5b8f\u5d34\u629b\u5149\u57ab\u7cfb\u5217<\/h2>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x62CB;&#x5149;&#x588A;-scaled.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x62CB;&#x5149;&#x588A;-1024x768.jpg\" alt=\"\" class=\"wp-image-120861\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u968f\u7740\u5148\u8fdb\u534a\u5bfc\u4f53\u5236\u7a0b\u5bf9\u8868\u9762\u54c1\u8d28\u7684\u8981\u6c42\u8d8a\u6765\u8d8a\u4e25\u82db\uff0c\u629b\u5149\u57ab\u4f5c\u4e3a\u6676\u5706\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09\u5236\u7a0b\u4e2d\u7684\u5173\u952e\u8017\u6750\uff0c\u5176\u6027\u80fd\u5c06\u76f4\u63a5\u5f71\u54cd\u5230\u6676\u5706\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u6750\u6599\u53bb\u9664\u901f\u7387\u4e0e\u6574\u4f53\u5236\u7a0b\u7a33\u5b9a\u6027\u3002\u5b8f\u5d34\u7cbe\u5bc6\u5f00\u53d1\u7684\u9ad8\u6027\u80fd\u6676\u5706\u7814\u78e8\u629b\u5149\u57ab\uff0c\u7ed3\u5408\u521b\u65b0\u6750\u6599\u79d1\u5b66\u4e0e\u5fae\u89c2\u7ed3\u6784\u8bbe\u8ba1\uff0c\u4e3a\u4e1a\u754c\u63d0\u4f9b\u66f4\u9ad8\u6548\u7387\u3001\u66f4\u4f4e\u6210\u672c\u7684CMP\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n\n<ul class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u6750\u6599\u79d1\u5b66\u7a81\u7834-\u4e94\u5c42\u7ed3\u6784\u5b9e\u73b0\u529f\u80fd\u6574\u5408:<\/strong>\u5b8f\u5d34\u629b\u5149\u57ab\u91c7\u7528\u72ec\u7279\u7684\u4e94\u5c42\u590d\u5408\u7ed3\u6784\u8bbe\u8ba1\uff0c\u76f8\u8f83\u4e8e\u4f20\u7edf\u5355\u5c42\u6216\u4e09\u5c42\u629b\u5149\u57ab\uff0c\u4e0d\u4ec5\u63d0\u9ad8\u4e86\u673a\u68b0\u5f3a\u5ea6\u4e0e\u5f62\u53d8\u63a7\u5236\u80fd\u529b\uff0c\u66f4\u80fd\u9488\u5bf9\u4e0d\u540c\u5236\u7a0b\u9636\u6bb5\u63d0\u4f9b\u7cbe\u51c6\u7684\u652f\u6491\u4e0e\u4ecb\u9762\u56de\u5e94\u3002\u5404\u5c42\u5206\u5de5\u660e\u786e\uff0c\u4ece\u8f7d\u4f53\u57fa\u5e95\u7684\u521a\u6027\u63a7\u5236\uff0c\u5230\u63a5\u89e6\u5c42\u7684\u5f39\u6027\u6a21\u91cf\u4e0e\u6469\u64e6\u7cfb\u6570\u8c03\u8282\uff0c\u518d\u5230\u8868\u5c42\u7684\u52a8\u6001\u8c03\u538b\u80fd\u529b\uff0c\u6bcf\u4e00\u5c42\u90fd\u7ecf\u8fc7\u7cbe\u5bc6\u8bbe\u8ba1\u4e0e\u6750\u6599\u4f18\u5316\uff0c\u786e\u4fdd\u4e0e\u4e0d\u540c\u7c7b\u578b\u7684\u629b\u5149\u6db2\uff08\u5982SiO\u2082\u3001CeO\u2082\u3001Al\u2082O\u2083\u3001\u94bb\u77f3\u7b49\uff09\u9ad8\u5ea6\u5339\u914d\uff0c\u63d0\u5347\u53bb\u9664\u7387\u4e0e\u8868\u9762\u5747\u5300\u6027\u3002<\/li>\n<\/ul>\n\n<ul class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u5fae\u89c2\u7ed3\u6784\u8bbe\u8ba1-\u8ba9\u6d46\u6599\u6d41\u52a8\u4e0e\u6c14\u6ce1\u6392\u51fa\u66f4\u6d41\u7545<\/strong>:\u5b8f\u5d34\u629b\u5149\u57ab\u8868\u9762\u7ecf\u8fc7\u9ad8\u5ea6\u5de5\u7a0b\u5316\u8bbe\u8ba1\uff0c\u5177\u5907\u9ad8\u5bc6\u5ea6\u5fae\u5b54\u7ed3\u6784\u4e0e\u6700\u4f73\u5316\u7684\u6c9f\u69fd\u7eb9\u7406\uff0c\u53ef\u5728\u629b\u5149\u8fc7\u7a0b\u4e2d\u5747\u5300\u5206\u5e03\u7814\u78e8\u6db2\uff0c\u9632\u6b62\u5c40\u90e8\u5806\u79ef\u4e0e\u5e72\u6469\u64e6\uff0c\u5e76\u6709\u6548\u5f15\u5bfc\u6c14\u6ce1\u6392\u51fa\uff0c\u964d\u4f4e\u5fae\u522e\u75d5\u4e0e\u8868\u9762\u7f3a\u9677\u98ce\u9669\u3002<\/li>\n<\/ul>\n\n<ul class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u957f\u5bff\u547d\u4e0e\u5236\u7a0b\u7a33\u5b9a\u6027\uff1a<\/strong>\u5b8f\u5d34\u629b\u5149\u57ab\u5177\u5907\u4f18\u5f02\u7684\u6297\u78e8\u8017\u6027\u4e0e\u5f62\u72b6\u4fdd\u6301\u6027\uff0c\u5373\u4f7f\u5728\u957f\u65f6\u95f4\u9ad8\u8d1f\u8f7d\u6761\u4ef6\u4e0b\u4f7f\u7528\uff0c\u4ecd\u80fd\u7ef4\u6301\u7a33\u5b9a\u7684\u538b\u529b\u5206\u5e03\u4e0e\u7814\u78e8\u6548\u679c\uff0c\u5927\u5e45\u5ef6\u957f\u57ab\u6750\u4f7f\u7528\u5bff\u547d\u3002\u66f4\u6362\u5468\u671f\u7684\u5ef6\u957f\u4e0d\u4ec5\u964d\u4f4e\u6750\u6599\u6210\u672c\uff0c\u540c\u65f6\u4e5f\u51cf\u5c11\u505c\u673a\u9891\u7387\u4e0e\u5236\u7a0b\u53d8\u52a8\u98ce\u9669\uff0c\u63d0\u5347\u6574\u4f53\u4ea7\u7ebf\u7a3c\u52a8\u7387\u4e0e\u826f\u7387\u8868\u73b0\u3002<\/li>\n<\/ul>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-1e05c6f4c4b54317e3846977ce16bdba\" id=\"&#x5B8F;&#x5D34;&#x7CBE;&#x5BC6;&#x7802;&#x8F2A;&#x7CFB;&#x5217;\">\u5b8f\u5d34\u7cbe\u5bc6\u7802\u8f6e\u7cfb\u5217<\/h2>\n\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/PICT_20140609_093544-1.jpg\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/PICT_20140609_093544-1-1024x768.jpg\" alt=\"\" class=\"wp-image-120870\" style=\"width:1200px;height:auto\" srcset=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/PICT_20140609_093544-1-1024x768.jpg 1024w, https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/PICT_20140609_093544-1-300x225.jpg 300w, https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/PICT_20140609_093544-1-768x576.jpg 768w, https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/PICT_20140609_093544-1.jpg 1440w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u4e3a\u4e86\u56e0\u5e94\u6676\u5706\u52a0\u5de5\u4e0d\u540c\u9636\u6bb5\u5bf9\u7c97\u7cd9\u5ea6\u4e0e\u8868\u9762\u54c1\u8d28\u7684\u4e25\u683c\u8981\u6c42\uff0c\u5b8f\u5d34\u63d0\u4f9b\u4e00\u7cfb\u5217\u5bf9\u5e94\u6750\u6599\u4e0e\u5e94\u7528\u7684\u4e13\u4e1a\u7814\u78e8\u7802\u8f6e\uff1a<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>\u7845\u6676\u5706\u7528\u5012\u89d2\u78e8\u524a\u7802\u8f6e<\/strong><br \/>\u7528\u4e8e\u6676\u5706\u8fb9\u7f18\u5012\u89d2\u5904\u7406\uff0c\u53ef\u6709\u6548\u53bb\u9664\u5207\u5272\u540e\u7684\u6bdb\u8fb9\u4e0e\u5fae\u88c2\u75d5\uff0c\u786e\u4fdd\u8fb9\u7f18\u5149\u6ed1\u65e0\u635f\uff0c\u964d\u4f4e\u540e\u6bb5\u5236\u7a0b\u4e2d\u56e0\u5fae\u88c2\u9020\u6210\u7684\u6676\u5706\u5d29\u88c2\u98ce\u9669\uff0c\u5e76\u63d0\u5347\u6574\u4f53\u826f\u7387\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u6676\u5706\u5e73\u9762\u78e8\u524a\u7528\u7802\u8f6e<\/strong><br 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class=\"has-medium-font-size\"><strong>\u6676\u5706\u7535\u94f8\u5212\u7247\u5200<\/strong><br \/>\u9002\u7528\u4e8e\u77fd\u6676\u5706\u3001\u6c27\u5316\u7269\u6676\u5706\u4ee5\u53caSiC\u3001GaAs\u3001GaP\u7b49\u5316\u5408\u7269\u6676\u5706\u6750\u6599\uff0c\u5177\u5907\u8d85\u5c0f\u5207\u7f1d\u4e0e\u9ad8\u52a0\u5de5\u7cbe\u5ea6\u7279\u6027\uff0c\u6709\u6548\u964d\u4f4e\u5207\u5272\u635f\u8017\u5e76\u63d0\u5347\u6676\u7c92\u54c1\u8d28\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u6676\u5706\u5212\u7247\u4e0e\u7cbe\u5bc6\u5143\u4ef6\u5236\u7a0b\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u6676\u5706\u5c01\u88c5\u5212\u7247\u5200-\u786c\u5200<\/strong><br 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