{"id":120452,"date":"2025-07-17T09:00:00","date_gmt":"2025-07-17T01:00:00","guid":{"rendered":"https:\/\/honwaygroup.com\/?p=120452"},"modified":"2025-08-06T17:27:07","modified_gmt":"2025-08-06T09:27:07","slug":"%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e7%a8%8b%e4%b8%ad%e7%9a%84%e7%a0%94%e7%a3%a8%e6%8a%9b%e5%85%89%ef%bc%9a%e4%bb%8e%e6%9d%90%e6%96%99%e9%80%89%e6%8b%a9%e5%88%b0%e8%80%97%e6%9d%90%e8%b5%8b%e8%83%bd","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/zh-hans\/%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e7%a8%8b%e4%b8%ad%e7%9a%84%e7%a0%94%e7%a3%a8%e6%8a%9b%e5%85%89%ef%bc%9a%e4%bb%8e%e6%9d%90%e6%96%99%e9%80%89%e6%8b%a9%e5%88%b0%e8%80%97%e6%9d%90%e8%b5%8b%e8%83%bd\/","title":{"rendered":"\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u7684\u7814\u78e8\u629b\u5149\uff1a\u4ece\u6750\u6599\u9009\u62e9\u5230\u8017\u6750\u8d4b\u80fd\u7684\u5353\u8d8a\u5236\u7a0b"},"content":{"rendered":"\n<p class=\"has-medium-font-size\">\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u6676\u5706\u7684\u5e73\u5766\u5ea6\u662f\u7cbe\u5bc6\u7535\u8def\u5806\u53e0\u7684\u5173\u952e\u3002<strong>\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09 <\/strong>\u6280\u672f\u626e\u6f14\u7740\u300c\u6676\u5706\u78e8\u76ae\u5e08\u300d\u7684\u89d2\u8272\uff0c\u5b83\u7ed3\u5408\u5316\u5b66\u4e0e\u673a\u68b0\u4f5c\u7528\uff0c\u7cbe\u51c6\u5730\u53bb\u9664\u6676\u5706\u8868\u9762\u591a\u4f59\u6750\u6599\uff0c\u4e3a\u540e\u7eed\u5236\u7a0b\u5960\u5b9a\u5b8c\u7f8e\u57fa\u7840\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u5b8f\u5d34\u6df1\u8015\u534a\u5bfc\u4f53\u7814\u78e8\u629b\u5149\u9886\u57df\uff0c\u6df1\u77e5\u6676\u5706\u7684\u6781\u81f4\u5e73\u5766\u5ea6\u662f\u6210\u5c31\u9ad8\u6548\u6676\u7247\u7684\u57fa\u77f3\u3002\u9762\u5bf9\u65e5\u76ca\u4e25\u5cfb\u7684\u5236\u7a0b\u6311\u6218\uff0c\u6211\u4eec\u63d0\u4f9b<strong>\u5168\u9762\u4e14\u9ad8\u6548\u7684 CMP \u6838\u5fc3\u8017\u6750\u89e3\u51b3\u65b9\u6848<\/strong>\uff0c\u6db5\u76d6<strong>\u91d1\u521a\u77f3\u3001\u6c27\u5316\u94dd\u3001\u6c27\u5316\u94c8\u3001\u4e8c\u6c27\u5316\u7845<\/strong>\u7b49\u591a\u79cd\u9ad8\u6027\u80fd\u629b\u5149\u6750\u6599\uff0c\u80fd\u5168\u9762\u534f\u52a9\u6676\u5706\u4ece\u7c97\u78e8\u5230\u955c\u9762\u7cbe\u629b\uff0c\u4e3a\u60a8\u7684\u7cbe\u5bc6\u5236\u7a0b\u5960\u5b9a\u5b8c\u7f8e\u57fa\u7840\u3002<\/p>\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>\u76ee\u5f55<\/h2><nav><ul><li class=\"\"><a href=\"#%E4%BB%80%E9%BA%BC%E6%98%AFcmp\">\u4ec0\u4e48\u662fCMP?<\/a><\/li><li class=\"\"><a href=\"#%E7%82%BA%E4%BD%95%E5%8D%8A%E5%B0%8E%E9%AB%94%E9%9C%80%E8%A6%81%E9%80%B2%E8%A1%8C%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89\">\u4e3a\u4f55\u534a\u5bfc\u4f53\u9700\u8981\u8fdb\u884c\u7814\u78e8\u629b\u5149?<\/a><ul><li class=\"\"><a href=\"#cmp-%E8%A3%BD%E7%A8%8B%E4%B8%8D%E5%8F%AF%E6%88%96%E7%BC%BA%E7%9A%84%E5%8E%9F%E5%9B%A0\">CMP \u5236\u7a0b\u4e0d\u53ef\u6216\u7f3a\u7684\u539f\u56e0<\/a><\/li><li class=\"\"><a href=\"#%E6%99%B6%E5%9C%93%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E5%BE%8C%E7%9A%84%E8%A6%8F%E6%A0%BC%E8%A6%81%E6%B1%82\">\u6676\u5706\u7814\u78e8\u629b\u5149\u540e\u7684\u89c4\u683c\u8981\u6c42<\/a><ul><li class=\"\"><a href=\"#1-%E5%8E%9A%E5%BA%A6%E6%8E%A7%E5%88%B6\">1. \u539a\u5ea6\u63a7\u5236<\/a><\/li><li class=\"\"><a href=\"#2-%E8%A1%A8%E9%9D%A2%E5%B9%B3%E5%9D%A6%E5%BA%A6%E8%88%87%E7%B2%97%E7%B3%99%E5%BA%A6%EF%BC%88-ra-%E5%80%BC%EF%BC%89\">2. \u8868\u9762\u5e73\u5766\u5ea6\u4e0e\u7c97\u7cd9\u5ea6\uff08Ra \u503c\uff09<\/a><\/li><li class=\"\"><a href=\"#3-%E7%BC%BA%E9%99%B7%E6%8E%A7%E5%88%B6\">3. \u7f3a\u9677\u63a7\u5236<\/a><\/li><\/ul><\/li><\/ul><\/li><li class=\"\"><a href=\"#%E5%8D%8A%E5%B0%8E%E9%AB%94%E6%9D%90%E6%96%99%E5%9C%A8%E7%A0%94%E7%A3%A8%E6%99%82%E6%89%80%E9%81%87%E5%88%B0%E7%9A%84%E6%8C%91%E6%88%B0\">\u534a\u5bfc\u4f53\u6750\u6599\u5728\u7814\u78e8\u65f6\u6240\u9047\u5230\u7684\u6311\u6218?<\/a><ul><li class=\"\"><a href=\"#%E5%A6%82%E4%BD%95%E6%8F%90%E5%8D%87%E6%99%B6%E5%9C%93%E5%B9%B3%E5%9D%A6%E5%BA%A6\">\u5982\u4f55\u63d0\u5347\u6676\u5706\u5e73\u5766\u5ea6<\/a><\/li><\/ul><\/li><li class=\"\"><a href=\"#cmp%E7%9A%84%E9%97%9C%E9%8D%B5%E7%A0%94%E7%A3%A8%E5%B7%A5%E5%85%B7\">CMP\u7684\u5173\u952e\u7814\u78e8\u5de5\u5177<\/a><\/li><li class=\"\"><a href=\"#%E7%AB%8B%E5%8D%B3%E8%A1%8C%E5%8B%95%EF%BC%8C%E8%88%87%E6%88%91%E5%80%91%E5%85%B1%E5%90%8C%E9%96%8B%E5%95%9F%E5%8D%8A%E5%B0%8E%E9%AB%94%E7%B2%BE%E5%AF%86%E8%A3%BD%E7%A8%8B%E7%9A%84%E6%96%B0%E7%AF%87%E7%AB%A0%EF%BC%81\">\u7acb\u5373\u884c\u52d5\uff0c\u8207\u6211\u5011\u5171\u540c\u958b\u555f\u534a\u5c0e\u9ad4\u7cbe\u5bc6\u88fd\u7a0b\u7684\u65b0\u7bc7\u7ae0\uff01<\/a><\/li><li class=\"\"><a href=\"#%E6%9B%B4%E5%A4%9A%E5%AE%8F%E5%B4%B4%E9%91%BD%E7%9F%B3%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E8%80%97%E6%9D%90%E8%B3%87%E8%A8%8A\">\u66f4\u591a\u5b8f\u5d34\u91d1\u521a\u77f3\u7814\u78e8\u629b\u5149\u8017\u6750\u8d44\u8baf<\/a><\/li><li class=\"\"><a href=\"#%E9%96%B1%E8%AE%80%E6%9B%B4%E5%A4%9A%E7%9B%B8%E9%97%9C%E8%AD%B0%E9%A1%8C\">\u9605\u8bfb\u66f4\u591a\u76f8\u5173\u8bae\u9898<\/a><\/li><\/ul><\/nav><\/div>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-dd9efd8294374ca8ef1d143d466063c0\" id=\"&#x4EC0;&#x9EBC;&#x662F;cmp\">\u4ec0\u4e48\u662fCMP?<\/h2>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3.avif\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3-1024x630.jpg\" alt=\"\" class=\"wp-image-113607\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">CMP\uff0c\u5168\u79f0\u662f<strong>\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08Chemical Mechanical Planarization\uff09<\/strong>\uff0c\u53c8\u79f0<strong>\u5316\u5b66\u673a\u68b0\u7814\u78e8\uff08Chemical Mechanical Polishing\uff09<\/strong>\uff0c\u5b83\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4e00\u9879\u6781\u4e3a\u5173\u952e\u7684\u5236\u7a0b\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u7b80\u5355\u6765\u8bf4\uff0cCMP \u5c31\u50cf\u662f\u534a\u5bfc\u4f53\u6676\u5706\u7684\u300c\u78e8\u76ae\u300d\u6280\u672f\uff0c\u5b83\u7ed3\u5408\u4e86\u5316\u5b66\u8150\u8680\u548c\u673a\u68b0\u7814\u78e8\u7684\u529b\u91cf\uff0c\u76ee\u6807\u662f\u5c06\u6676\u5706\u8868\u9762\u78e8\u5f97\u65e2\u5e73\u5766\u53c8\u5149\u6ed1\u3002\u8fd9\u9879\u6280\u672f\u4f1a\u4f7f\u7528\u542b\u6709\u5948\u7c73\u7ea7\u78e8\u6599\u7684\u629b\u5149\u6db2\uff08Slurry\uff09\u4ee5\u53ca\u7814\u78e8\u57ab\uff0c\u900f\u8fc7\u7cbe\u786e\u7684\u63a7\u5236\u6765\u53bb\u9664\u6676\u5706\u4e0a\u591a\u4f59\u7684\u6750\u6599\uff0c\u8fbe\u5230\u5fae\u7c73\u751a\u81f3\u5948\u7c73\u7ea7\u7684\u5e73\u6574\u5ea6\uff0c\u6700\u7ec8\u4f7f\u6676\u5706\u8868\u9762\u5448\u73b0\u300c\u955c\u9762\u300d\u822c\u7684\u5149\u4eae\u6548\u679c\u3002<\/p>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-5dade77c8ffecbf5fb0a6f1ff0911cdf\" id=\"&#x70BA;&#x4F55;&#x534A;&#x5C0E;&#x9AD4;&#x9700;&#x8981;&#x9032;&#x884C;&#x7814;&#x78E8;&#x62CB;&#x5149;\">\u4e3a\u4f55\u534a\u5bfc\u4f53\u9700\u8981\u8fdb\u884c\u7814\u78e8\u629b\u5149?<\/h2>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5-1024x630.jpg\" alt=\"\" class=\"wp-image-113618\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u4e3a\u4e86\u5f62\u6210\u590d\u6742\u7684\u7535\u8def\uff0c\u9700\u8981\u5728\u6676\u5706\u4e0a\u5806\u53e0\u591a\u5c42\u6750\u6599\u3002\u60f3\u50cf\u4e00\u4e0b\u5efa\u9020\u4e00\u5ea7\u6469\u5929\u5927\u697c\uff0c\u6bcf\u4e00\u5c42\u697c\u90fd\u5fc5\u987b\u5e73\u6574\uff0c\u624d\u80fd\u786e\u4fdd\u4e0b\u4e00\u5c42\u7684\u7a33\u56fa\u3002\u540c\u6837\u5730\uff0c\u5982\u679c\u534a\u5bfc\u4f53\u6676\u5706\u5728\u6bcf\u4e00\u9053\u5236\u7a0b\u4e2d\uff0c\u5982\u679c\u90fd\u6709\u8868\u9762\u5e73\u6574\u5ea6\u4e0d\u5747\u6216\u6709\u51f9\u51f8\u4e0d\u5e73\u7684\u7f3a\u9677\uff0c\u8fd9\u5c06\u4f1a\u4e25\u91cd\u5f71\u54cd\u6700\u7ec8\u6676\u7247\u7684\u826f\u7387\u548c\u6548\u80fd\u3002<\/p>\n\n<h3 class=\"wp-block-heading\" id=\"cmp-&#x88FD;&#x7A0B;&#x4E0D;&#x53EF;&#x6216;&#x7F3A;&#x7684;&#x539F;&#x56E0;\"><strong>CMP \u5236\u7a0b\u4e0d\u53ef\u6216\u7f3a\u7684\u539f\u56e0<\/strong><\/h3>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u786e\u4fdd\u7535\u8def\u7cbe\u786e\u5806\u53e0<\/strong>\uff1aCMP \u7684\u4e3b\u8981\u4f5c\u7528\u662f<strong>\u5e73\u5766\u5316<\/strong>\uff0c\u5b83\u80fd\u591f\u51cf\u5c11\u6216\u53bb\u9664\u5728\u53cd\u8986\u5236\u7a0b\u5806\u53e0\u4e2d\u4ea7\u751f\u7684\u9ad8\u4f4e\u8bef\u5dee\uff0c\u786e\u4fdd\u6bcf\u4e00\u5c42\u7535\u8def\u7684\u539a\u5ea6\u5747\u5300\u4e14\u8868\u9762\u5e73\u5766\uff0c\u4e3a\u540e\u7eed\u7684\u5fae\u5f71\u548c\u8680\u523b\u5236\u7a0b\u63d0\u4f9b\u4e00\u4e2a\u7406\u60f3\u7684\u57fa\u7840\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u63d0\u5347\u6676\u7247\u826f\u7387\u4e0e\u6548\u80fd<\/strong>\uff1a\u900f\u8fc7\u7cbe\u786e\u63a7\u5236\u6750\u6599\u53bb\u9664\u91cf\uff0cCMP \u53ef\u4ee5\u907f\u514d\u8fc7\u5ea6\u7814\u78e8\u6216\u7814\u78e8\u4e0d\u8db3\uff0c\u786e\u4fdd\u6676\u7247\u4e2d\u7684\u7535\u8def\u80fd\u591f\u7cbe\u786e\u5f62\u6210\uff0c\u8fdb\u800c\u63d0\u5347\u6676\u7247\u7684\u6548\u80fd\u548c\u5236\u9020\u826f\u7387\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u63a7\u5236\u6676\u5706\u539a\u5ea6<\/strong>\uff1a\u9664\u4e86\u8868\u9762\u5e73\u5766\u5316\uff0c\u7814\u78e8\u5236\u7a0b\u4e5f\u7528\u4e8e\u5c06\u6676\u5706\u51cf\u8584\u3002\u4f8b\u5982\uff0c\u80cc\u9762\u7814\u78e8\uff08Back Grinding\uff09\u4f1a\u5c06\u6676\u5706\u539a\u5ea6\u4ece\u521d\u59cb\u7684 800-700 \u5fae\u7c73\u51cf\u8584\u81f3 80-70 \u5fae\u7c73\uff0c\u751a\u81f3\u900f\u8fc7\u591a\u5c42\u5806\u53e0\u6280\u672f\u53ef\u51cf\u8584\u81f3\u7ea6 20 \u5fae\u7c73\u3002\u8fd9\u5bf9\u4e8e\u591a\u6676\u7247\u5c01\u88c5\uff08MCP\uff09\u7b49\u5e94\u7528\u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a\u5b83\u80fd\u5728\u6709\u9650\u7684\u9ad8\u5ea6\u5185\u5b9e\u73b0\u66f4\u591a\u5c42\u7684\u7535\u8def\u5806\u53e0\uff0c\u4ee5\u6ee1\u8db3\u7535\u5b50\u4ea7\u54c1\u5c0f\u578b\u5316\u548c\u9ad8\u6574\u5408\u5ea6\u7684\u9700\u6c42\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u53bb\u9664\u8868\u9762\u7f3a\u9677\u4e0e\u6b8b\u7559\u7269<\/strong>\uff1a\u7814\u78e8\u548c\u629b\u5149\u4e5f\u80fd\u6539\u5584\u524d\u5236\u7a0b\u7559\u4e0b\u7684\u5fae\u7f3a\u9677\uff0c\u53bb\u9664\u6676\u5706\u8868\u9762\u6b8b\u7559\u7269\uff0c\u8ba9\u8868\u9762\u66f4\u52a0\u5149\u4eae\uff0c\u4ee5\u8fce\u63a5\u4e0b\u4e00\u9053\u5236\u7a0b\u3002\u8fd9\u4e00\u6b65\u9aa4\u5bf9\u4e8e\u786e\u4fdd\u6676\u7247\u54c1\u8d28\u548c\u53ef\u9760\u6027\u81f3\u5173\u91cd\u8981\u3002<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x6676;&#x5713;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x5F8C;&#x7684;&#x898F;&#x683C;&#x8981;&#x6C42;\"><strong>\u6676\u5706\u7814\u78e8\u629b\u5149\u540e\u7684\u89c4\u683c\u8981\u6c42<\/strong><\/h3>\n\n<p class=\"has-medium-font-size\">\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u6676\u5706\u5728\u7ecf\u8fc7\u80cc\u9762\u7814\u78e8\uff08Back Grinding\uff09\u4e0e\u7cbe\u5bc6\u629b\u5149\u540e\uff0c\u987b\u6ee1\u8db3\u6781\u4e3a\u4e25\u683c\u7684\u7269\u7406\u4e0e\u8868\u9762\u89c4\u683c\uff0c\u4ee5\u786e\u4fdd\u540e\u7eed\u5236\u7a0b\u7684\u53ef\u9760\u6027\u4e0e\u6676\u7247\u6027\u80fd\u3002\u4e3b\u8981\u8981\u6c42\u53ef\u5206\u4e3a\u4e09\u5927\u9762\u5411\uff1a<\/p>\n\n<h4 class=\"wp-block-heading\" id=\"1-&#x539A;&#x5EA6;&#x63A7;&#x5236;\"><strong>1. \u539a\u5ea6\u63a7\u5236<\/strong><\/h4>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u6807\u51c6\u53d8\u5316<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li>\u521d\u59cb\u6676\u5706\u539a\u5ea6\uff1a\u7ea6 700\u2013800 \u5fae\u7c73\uff08\u00b5m\uff09\u3002<\/li>\n\n\n\n<li>\u4e00\u822c\u7814\u78e8\u540e\u539a\u5ea6\uff1a\u7f29\u51cf\u81f3 70\u201380 \u5fae\u7c73\u3002<\/li>\n\n\n\n<li>\u8fdb\u9636MCP\uff08\u591a\u6676\u7247\u5c01\u88c5\uff09\u9700\u6c42\uff1a\u53ef\u8fdb\u4e00\u6b65\u51cf\u8584\u81f3 <strong>\u7ea6 20 \u5fae\u7c73<\/strong>\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u6311\u6218\u6027<\/strong>\uff1a\u539a\u5ea6\u8fc7\u539a\u4f1a\u5bfc\u81f4\u6563\u70ed\u4e0d\u826f\uff1b\u8fc7\u8584\u5219\u6613\u788e\u88c2\uff0c\u5c24\u5176\u662f\u5728 12 \u540b\u6676\u5706\u4f7f\u7528\u666e\u53ca\u7684\u60c5\u51b5\u4e0b\uff0c\u539a\u5ea6\u63a7\u5236\u7684\u96be\u5ea6\u968f\u5c01\u88c5\u8d8b\u52bf\u589e\u52a0\u3002<\/li>\n<\/ul>\n\n<h4 class=\"wp-block-heading\" id=\"2-&#x8868;&#x9762;&#x5E73;&#x5766;&#x5EA6;&#x8207;&#x7C97;&#x7CD9;&#x5EA6;&#xFF08;-ra-&#x503C;&#xFF09;\"><strong>2. \u8868\u9762\u5e73\u5766\u5ea6\u4e0e\u7c97\u7cd9\u5ea6\uff08Ra \u503c\uff09<\/strong><\/h4>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li class=\"has-medium-font-size\"><strong>\u7c97\u7cd9\u5ea6\u6307\u6807<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li>\u4f7f\u7528 Ra \u503c\uff08Roughness Average\uff09\u8861\u91cf\u3002<\/li>\n\n\n\n<li>Ra \u8d8a\u5c0f\u4ee3\u8868\u8868\u9762\u8d8a\u5149\u6ed1\uff0c\u7406\u60f3\u72b6\u51b5\u63a5\u8fd1<strong>\u539f\u5b50\u7ea7\u5e73\u5766<\/strong>\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>\u6f5c\u5728\u98ce\u9669<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li>\u8868\u9762\u4e0d\u5747\u5c07\u5f71\u97ff\u96fb\u8def\u5716\u6848\u8f49\u5370\uff0c\u9020\u6210\u5143\u4ef6\u6027\u80fd\u504f\u79fb\u6216\u5931\u6548\u3002<\/li>\n\n\n\n<li>\u5185\u5e94\u529b\u5f15\u53d1\u8868\u9762\u5f62\u53d8\uff0c\u53ef\u80fd\u5bfc\u81f4\u53c2\u6570\u6f02\u79fb\u6216\u53ef\u9760\u5ea6\u4e0b\u964d\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n<h4 class=\"wp-block-heading has-medium-font-size\" id=\"3-&#x7F3A;&#x9677;&#x63A7;&#x5236;\"><strong>3. \u7f3a\u9677\u63a7\u5236<\/strong><\/h4>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u63a7\u5236\u8303\u56f4<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li>\u8868\u9762\u635f\u4f24\u3002<\/li>\n\n\n\n<li>\u5fae\u88c2\u7eb9\u4ea7\u751f\u3002<\/li>\n\n\n\n<li>\u9897\u7c92\u4e0e\u5f02\u7269\u6c61\u67d3\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u91cd\u8981\u6027<\/strong>\uff1a\u5373\u4fbf\u662f\u5fae\u5c0f\u6c61\u67d3\uff0c\u4e5f\u53ef\u80fd\u5728\u540e\u7eed\u5236\u7a0b\u4e2d\u6269\u5927\u4e3a\u81f4\u547d\u7f3a\u9677\uff0c\u5bfc\u81f4\u6676\u7247\u62a5\u5e9f\u3002<\/li>\n\n\n\n<li><strong>\u8584\u6676\u5706\u98ce\u9669<\/strong>\uff1a\u6676\u5706\u8d8a\u8584\uff0c\u5176\u673a\u68b0\u8106\u5f31\u6027\u8d8a\u9ad8\uff0c\u5bf9\u5236\u7a0b\u4e2d\u7684\u5fae\u7c92\u649e\u51fb\u6216\u8f7d\u5177\u673a\u68b0\u5e72\u6270\u7684<strong>\u5bb9\u9519\u7387\u66f4\u4f4e<\/strong>\uff0c\u9700\u7279\u522b\u8c28\u614e\u3002<\/li>\n<\/ul>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-b193d1fce1a0630c840bb5167c5f7eaa\" id=\"&#x534A;&#x5C0E;&#x9AD4;&#x6750;&#x6599;&#x5728;&#x7814;&#x78E8;&#x6642;&#x6240;&#x9047;&#x5230;&#x7684;&#x6311;&#x6230;\">\u534a\u5bfc\u4f53\u6750\u6599\u5728\u7814\u78e8\u65f6\u6240\u9047\u5230\u7684\u6311\u6218?<\/h2>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u6750\u6599\u53bb\u9664\u7684\u7cbe\u786e\u6027\u4e0e\u8868\u9762\u5747\u5300\u6027<\/strong>\uff1a \u534a\u5bfc\u4f53\u5143\u4ef6\u7684\u7cbe\u7ec6\u7ed3\u6784\u8981\u6c42\u7814\u78e8\u8fc7\u7a0b\u80fd\u7cbe\u786e\u63a7\u5236\u6750\u6599\u53bb\u9664\u91cf\uff0c\u5e76\u4fdd\u6301\u9ad8\u5ea6\u7684\u5e73\u5766\u5ea6\u4e0e\u5747\u5300\u6027\u3002\u8fd9\u9700\u8981<strong>\u7cbe\u51c6\u9009\u62e9\u78e8\u6599\u7c7b\u578b\uff08\u5982\u6c27\u5316\u94dd\u3001\u4e8c\u6c27\u5316\u7845\u6216\u91d1\u521a\u77f3\uff09\u4e0e\u7c92\u5f84\u5206\u5e03<\/strong>\uff0c\u4ee5\u786e\u4fdd\u6700\u4f73\u6548\u679c\u3002<\/li>\n\n\n\n<li><strong>\u8868\u9762\u7684\u5747\u5300\u6027<\/strong>\uff1a\u7814\u78e8\u540e\u7684\u8868\u9762\u5fc5\u987b\u5177\u5907<strong>\u9ad8\u5ea6\u7684\u5e73\u5766\u5ea6\u548c\u5747\u5300\u6027<\/strong>\u3002\u4efb\u4f55\u5c40\u90e8\u4e0d\u5747\u5300\u7684\u7814\u78e8\u90fd\u4f1a\u5bfc\u81f4\u540e\u7eed\u5149\u523b\u548c\u8680\u523b\u5236\u7a0b\u7684\u5931\u8d25\uff0c\u8fdb\u800c\u5f71\u54cd\u6574\u4f53\u6676\u7247\u6027\u80fd\u3002<\/li>\n\n\n\n<li><strong>\u7f3a\u9677\u7684\u63a7\u5236<\/strong>\uff1a\u7814\u78e8\u8fc7\u7a0b\u5bb9\u6613\u5f15\u5165<strong>\u8868\u9762\u635f\u4f24\u3001\u5fae\u88c2\u7eb9\u548c\u9897\u7c92\u6c61\u67d3<\/strong>\u7b49\u7f3a\u9677\u3002\u8fd9\u4e9b\u7f3a\u9677\u5373\u4fbf\u5fae\u5c0f\u4e5f\u53ef\u80fd\u5bfc\u81f4\u5143\u4ef6\u5931\u6548\uff0c\u56e0\u6b64\u5fc5\u987b\u6709\u6548\u5730\u63a7\u5236\u5e76\u5c06\u5176\u6700\u5c0f\u5316\u3002\u7279\u522b\u662f\u968f\u7740\u6676\u5706\u8d8a\u8584\uff0c\u7f3a\u9677\u4ea7\u751f\u7684\u673a\u7387\u8d8a\u9ad8\uff0c\u540e\u7eed\u5236\u7a0b\u7684\u96be\u5ea6\u4e5f\u8d8a\u5927\u3002<\/li>\n\n\n\n<li><strong>\u5e94\u529b\u4ea7\u751f\u4e0e\u5f71\u54cd<\/strong>\uff1a\u5728\u7814\u78e8\u8fc7\u7a0b\u4e2d\uff0c\u7814\u78e8\u5934\u4e0e\u6676\u5706\u8868\u9762\u7684\u63a5\u89e6\u4f1a\u4ea7\u751f<strong>\u526a\u5e94\u529b\u548c\u538b\u529b<\/strong>\uff0c\u5316\u5b66\u6eb6\u6db2\u548c\u78e8\u6599\u7684\u6d41\u52a8\u4e5f\u4f1a\u65bd\u52a0\u5e94\u529b\u3002\u8fd9\u4e9b\u5e94\u529b\u53ef\u80fd\u5bfc\u81f4\u6676\u5706\u8868\u9762\u4ea7\u751f\u5851\u6027\u53d8\u5f62\u548c\u6b8b\u4f59\u5e94\u529b\uff0c\u5f71\u54cd\u6700\u7ec8\u7684\u5e73\u6574\u5ea6\u548c\u7c97\u7cd9\u5ea6\uff0c\u751a\u81f3\u5f71\u54cd\u7535\u5b66\u6027\u80fd\uff0c\u5bfc\u81f4\u5143\u4ef6\u53c2\u6570\u6f02\u79fb\u548c\u4ea7\u54c1\u5408\u683c\u7387\u4e0b\u964d\u3002<\/li>\n\n\n\n<li><strong>\u8d85\u786c\u7279\u6b8a\u6750\u6599\u7684\u52a0\u5de5\u96be\u5ea6\uff1a<\/strong> \u9488\u5bf9\u78b3\u5316\u7845\uff08SiC\uff09\u548c\u6c2e\u5316\u9553\uff08GaN\uff09\u7b49\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u5176\u6781\u81f4\u7684\u786c\u5ea6\u4f7f\u4f20\u7edf\u7814\u78e8\u52a0\u5de5\u9762\u4e34\u524d\u6240\u672a\u6709\u7684\u6311\u6218\u3002\u8fd9\u7c7b\u6750\u6599\u5c24\u5176\u9700\u8981<strong>\u91d1\u521a\u77f3<\/strong>\u8fd9\u7c7b\u8d85\u786c\u78e8\u6599\u624d\u80fd\u5b9e\u73b0\u9ad8\u6548\u4e14\u4f4e\u635f\u4f24\u7684\u53bb\u9664\u3002<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x5982;&#x4F55;&#x63D0;&#x5347;&#x6676;&#x5713;&#x5E73;&#x5766;&#x5EA6;\"><strong>\u5982\u4f55\u63d0\u5347\u6676\u5706\u5e73\u5766\u5ea6<\/strong><\/h3>\n\n<p>\u4e3a\u4e86\u514b\u670d\u4e0a\u8ff0\u6311\u6218\uff0c\u63d0\u5347\u6676\u5706\u5e73\u5766\u5ea6\uff0c\u4e1a\u754c\u91c7\u53d6\u4e86\u591a\u79cd\u7b56\u7565\uff1a<\/p>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u4f18\u5316\u52a0\u5de5\u53c2\u6570<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li><strong>\u7814\u78e8\u6db2\u4e0e\u78e8\u6599\u9009\u62e9\uff1a<\/strong> \u7cbe\u51c6\u63a7\u5236\u7814\u78e8\u6db2\u7684\u6d41\u901f\u3001\u6d53\u5ea6\uff0c\u5e76\u6839\u636e\u4e0d\u540c\u7684\u534a\u5bfc\u4f53\u6750\u6599\u548c\u7814\u78e8\u76ee\u6807\uff0c\u7cbe\u786e\u9009\u62e9\u6700\u9002\u5408\u7684\u78e8\u6599\u7c7b\u578b\uff08\u5982\u6c27\u5316\u94dd\u3001\u6c27\u5316\u94c8\u3001\u4e8c\u6c27\u5316\u7845\u6216\u91d1\u521a\u77f3\uff09\u53ca\u5176\u7c92\u5f84\u5206\u5e03\uff08\u4f8b\u5982 50-250 \u5948\u7c73\uff0c\u5e76\u6709\u6548\u63a7\u5236 1-10 \u5fae\u7c73\u7684\u805a\u96c6\u4f53\uff09\u3002\u7814\u78e8\u6db2\u7684\u5316\u5b66\u6027\u8d28\u548c\u78e8\u6599\u7279\u6027\u5fc5\u987b\u5b8c\u7f8e\u5339\u914d\uff0c\u4ee5\u5b9e\u73b0\u5747\u5300\u9ad8\u6548\u7684\u6750\u6599\u53bb\u9664\u548c\u8868\u9762\u6548\u679c\u3002<\/li>\n\n\n\n<li><strong>\u7814\u78e8\u529b\u63a7\u5236<\/strong>\uff1a\u7cbe\u786e\u63a7\u5236\u7814\u78e8\u538b\u529b\u3001\u901f\u5ea6\u548c\u65f6\u95f4\u7b49\u53c2\u6570\uff0c\u4ee5\u8fbe\u5230\u6700\u4f73\u7684\u7814\u78e8\u6548\u679c\uff0c\u907f\u514d\u8fc7\u5927\u538b\u529b\u5bfc\u81f4\u635f\u4f24\u6216\u8fc7\u5c0f\u538b\u529b\u5f71\u54cd\u6548\u7387\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u203b\u4e1a\u754c\u5728\u8fdb\u884c\u7814\u78e8\u65f6\u6709\u4e00\u4e2a\u539f\u5219-<strong>CMP\u91cd\u5de5\u539f\u5219\u3010\u7559\u539a\u4e0d\u7559\u8584\u3011<\/strong>:\u5f53\u4f60\u5728\u8c03\u6574\u53c2\u6570\u65f6\uff0c\u5efa\u8bae\u5b9e\u9645\u79d2\u6570\u8981\u6bd4\u9884\u8ba1\u79d2\u6570\u8981\u77ed\uff0c\u5b81\u53ef\u7559\u6709\u539a\u5ea6\uff0c\u4e5f\u4e0d\u8981\u8fc7\u8584\uff0c\u624d\u6709\u673a\u4f1a\u8fdb\u884c\u91cd\u5de5(rework)\u3002<\/p>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u591a\u6b65\u9aa4\u7814\u78e8\u5de5\u827a<\/strong>\uff1a\u91c7\u7528\u591a\u6b65\u9aa4\u7684\u7814\u78e8\u548c\u629b\u5149\u5de5\u827a\uff0c\u5982\u7c97\u78e8\u3001\u7cbe\u78e8\uff0c\u751a\u81f3\u5728\u6676\u5706\u539a\u5ea6\u5c0f\u4e8e 50 \u5fae\u7c73\u65f6\u91c7\u7528\u5148\u5212\u7247\u540e\u51cf\u8584\uff08DBG\uff09\u7684\u65b9\u6cd5\uff0c\u5373\u5728\u7b2c\u4e00\u6b21\u7814\u78e8\u524d\u5148\u8fdb\u884c\u5212\u7247\uff0c\u518d\u8fdb\u884c\u7814\u78e8\u548c\u7b2c\u4e8c\u6b21\u5212\u7247\uff0c\u4ee5\u5b89\u5168\u5730\u5206\u79bb\u6676\u7247\u5e76\u51cf\u5c11\u7814\u78e8\u8fc7\u7a0b\u4e2d\u7684\u5916\u90e8\u7f3a\u9677\u3002\u8fd9\u79cd\u9010\u6b65\u7cbe\u8fdb\u7684\u65b9\u5f0f\u80fd\u591f\u6709\u6548\u51cf\u5c11\u5e94\u529b\uff0c\u83b7\u5f97\u66f4\u5e73\u6ed1\u7684\u8868\u9762\u3002<\/li>\n\n\n\n<li><strong>\u5c40\u90e8\u52a0\u70ed\u4e0e\u5316\u5b66\u8680\u523b<\/strong>\uff1a\u5728\u7814\u78e8\u629b\u5149\u8fc7\u7a0b\u4e2d\u5f15\u5165\u5c40\u90e8\u52a0\u70ed\uff0c\u53ef\u4ee5\u6539\u53d8\u6676\u5706\u7684\u7269\u7406\u6027\u8d28\uff0c\u4ece\u800c\u51cf\u5c0f\u5e94\u529b\u7684\u5f71\u54cd\u3002\u6b64\u5916\uff0c\u968f\u7740\u6280\u672f\u7684\u53d1\u5c55\uff0c\u5f15\u5165\u534a\u5bfc\u4f53\u524d\u7aef\u5236\u7a0b\u4e2d\u7684\u5316\u5b66\u8680\u523b\u6280\u672f\uff0c\u4e0e\u673a\u68b0\u7814\u78e8\u76f8\u7ed3\u5408\uff0c\u5168\u9762\u5f00\u53d1\u65b0\u7684\u52a0\u5de5\u65b9\u6cd5\uff0c\u4e5f\u662f\u89e3\u51b3\u7814\u78e8\u74f6\u9888\u7684\u65b9\u5411\u3002<\/li>\n\n\n\n<li><strong>\u7814\u78e8\u57ab\u7684\u9009\u62e9\u4e0e\u7ef4\u62a4<\/strong>\uff1a\u7814\u78e8\u57ab\u7684\u6750\u6599\u548c\u7279\u6027\u76f4\u63a5\u5f71\u54cd\u7814\u78e8\u6548\u679c\u548c\u7a33\u5b9a\u6027\uff0c\u5b9a\u671f\u76d1\u6d4b\u5176\u78e8\u635f\u548c\u6c61\u67d3\u5e76\u8fdb\u884c\u7ef4\u62a4\uff0c\u662f\u786e\u4fdd\u5236\u7a0b\u54c1\u8d28\u7684\u91cd\u8981\u73af\u8282\u3002<\/li>\n\n\n\n<li><strong>\u4f9b\u5e94\u94fe\u4e0e\u91c7\u8d2d\u7b56\u7565<\/strong>\uff1a\u9009\u62e9\u9ad8\u54c1\u8d28\u7684\u7814\u78e8\u6750\u6599\u548c\u8bbe\u5907\u4f9b\u5e94\u5546\uff0c\u5e76\u4f18\u5316\u91c7\u8d2d\u6d41\u7a0b\uff0c\u786e\u4fdd\u7b26\u5408\u751f\u4ea7\u9700\u6c42\u548c\u5de5\u827a\u8981\u6c42\u3002<\/li>\n\n\n\n<li><strong>\u6301\u7eed\u6539\u8fdb\u4e0e\u6807\u51c6\u5316<\/strong>\uff1a\u5efa\u7acb\u6807\u51c6\u4f5c\u4e1a\u7a0b\u5e8f\uff08SOP\uff09\u4ee5\u51cf\u5c11\u53d8\u5f02\u6027\uff0c\u5e76\u5b9a\u671f\u5bf9\u751f\u4ea7\u56e2\u961f\u8fdb\u884c\u5e94\u529b\u7ba1\u7406\u548c\u5236\u7a0b\u4f18\u5316\u57f9\u8bad\u3002\u540c\u65f6\uff0c\u6839\u636e\u5b9e\u9645\u751f\u4ea7\u6570\u636e\u6301\u7eed\u8bc4\u4f30\u548c\u4f18\u5316\u7814\u78e8\u629b\u5149\u8fc7\u7a0b\uff0c\u4ee5\u5e94\u5bf9\u534a\u5bfc\u4f53\u6280\u672f\u4e0d\u65ad\u53d1\u5c55\u5e26\u6765\u7684\u6311\u6218\u3002<\/li>\n<\/ul>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-23749d171d16da76fedd05524695739f\" id=\"cmp&#x7684;&#x95DC;&#x9375;&#x7814;&#x78E8;&#x5DE5;&#x5177;\">CMP\u7684\u5173\u952e\u7814\u78e8\u5de5\u5177<\/h2>\n\n<p class=\"has-medium-font-size\">\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316 (CMP) \u662f\u786e\u4fdd\u6676\u5706\u8868\u9762\u6781\u81f4\u5e73\u5766\u7684\u5173\u952e\u3002\u5b8f\u5d34\u51ed\u501f\u5728\u7cbe\u5bc6\u7814\u78e8\u629b\u5149\u9886\u57df\u7684\u4e30\u5bcc\u7ecf\u9a8c\uff0c\u63d0\u4f9b<strong>\u5168\u7cfb\u5217\u9ad8\u6548\u80fd\u7684 CMP \u6838\u5fc3\u8017\u6750<\/strong>\uff0c\u80fd\u6ee1\u8db3\u4ece\u4f20\u7edf\u77fd\u6676\u5706\u5230\u65b0\u5174\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7684\u591a\u5143\u9700\u6c42\u3002\u6211\u4eec\u7684\u89e3\u51b3\u65b9\u6848\u6db5\u76d6<strong>\u7cbe\u5bc6\u7802\u8f6e\u3001\u591a\u6837\u5316\u629b\u5149\u6db2\uff0c\u5982:\u91d1\u521a\u77f3\u3001\u6c27\u5316\u94dd\u3001\u6c27\u5316\u94c8\u3001\u4e8c\u6c27\u5316\u7845\u3001\u629b\u5149\u57ab\u53ca\u91d1\u521a\u77f3\u789f<\/strong>\uff0c\u81f4\u529b\u4e8e\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u5546\u63d0\u4f9b\u5168\u9762\u4e14\u4f18\u5316\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u52a9\u60a8\u63d0\u5347\u6676\u5706\u54c1\u8d28\uff0c\u7a81\u7834\u5236\u7a0b\u9650\u5236\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u4ea7\u54c1\u5217\u8868\uff1a<\/p>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u5b8f\u5d34\u7cbe\u5bc6\u7802\u8f6e\u7cfb\u5217\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u7845\u6676\u5706\u7528\u5012\u89d2\u78e8\u524a\u7802\u8f6e\uff1a<\/strong> \u786e\u4fdd\u7845\u6676\u5706\u8fb9\u7f18\u5149\u6ed1\u65e0\u635f\uff0c\u6709\u6548\u9884\u9632\u5d29\u88c2\u3002<\/li>\n\n\n\n<li><strong>\u6676\u5706\u5e73\u9762\u78e8\u524a\u7528\u7802\u8f6e\uff1a<\/strong> \u5b9e\u73b0\u7845\u6676\u5706\u8868\u9762\u6781\u81f4\u5e73\u5766\uff0c\u662f\u9ad8\u6548\u5236\u7a0b\u7684\u57fa\u7840\u3002<\/li>\n\n\n\n<li><strong>\u5316\u5408\u7269\u534a\u5bfc\u4f53\u4e13\u7528\u7802\u8f6e\uff1a<\/strong> \u9488\u5bf9 SiC\/GaN \u7b49\u8d85\u786c\u6750\u6599\uff0c\u63d0\u4f9b\u9ad8\u6548\u4e14\u4f4e\u635f\u4f24\u7684\u7c97\u78e8\u89e3\u51b3\u65b9\u6848\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u9ad8\u6027\u80fd\u629b\u5149\u6db2\u7cfb\u5217\uff1a<\/strong> \n<ul class=\"wp-block-list\">\n<li><strong>\u5b8f\u5d34\u91d1\u521a\u77f3\u629b\u5149\u6db2\uff1a<\/strong> \u63d0\u4f9b\u591a\u79cd\u5948\u7c73\u7c92\u5f84\u9009\u62e9\uff0c\u7279\u522b\u9002\u7528\u4e8e\u8d85\u786c\u6750\u6599\uff0c\u5982 SiC, GaN\u7684\u955c\u9762\u7ea7\u629b\u5149 (Ra\u22640.01 um) \u6548\u679c\uff0c\u5927\u5e45\u63d0\u5347\u5143\u4ef6\u6027\u80fd\u4e0e\u826f\u7387\u3002<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u6c27\u5316\u94dd\u629b\u5149\u6db2\uff1a<\/strong> \u9002\u7528\u4e8e\u591a\u79cd\u91d1\u5c5e\u5c42\uff0c\u5982\u94dc\u3001\u94a8\u548c\u4ecb\u7535\u5c42\u7684 CMP\uff0c\u63d0\u4f9b\u4f18\u5f02\u7684\u6750\u6599\u53bb\u9664\u7387\u4e0e\u8868\u9762\u54c1\u8d28\u3002<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u6c27\u5316\u94c8\u629b\u5149\u6db2\uff1a <\/strong>\u4e3b\u8981\u7528\u4e8e\u6d45\u6c9f\u69fd\u9694\u79bb (STI) \u548c\u4ecb\u7535\u5c42\u7684\u5e73\u5766\u5316\uff0c\u63d0\u4f9b\u9ad8\u9009\u62e9\u6bd4\u548c\u4f4e\u7f3a\u9677\u7684\u629b\u5149\u6548\u679c\u3002<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u4e8c\u6c27\u5316\u7845\u629b\u5149\u6db2\uff1a<\/strong> \u5e7f\u6cdb\u5e94\u7528\u4e8e\u4ecb\u7535\u5c42\u3001\u7845\u6676\u5706\u7684\u7cbe\u629b\uff0c\u63d0\u4f9b\u6781\u4f73\u7684\u8868\u9762\u5e73\u5766\u5ea6\u4e0e\u4f4e\u7f3a\u9677\u7387\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u7cbe\u5bc6\u6676\u5706\u7814\u78e8\u629b\u5149\u57ab (Polishing Pad)\uff1a<\/strong> \u914d\u5408\u4e0d\u540c\u7c7b\u578b\u7684\u629b\u5149\u6db2\uff08Slurry\uff09\u4e0e\u4e0b\u538b\u538b\u529b\uff0c\u79fb\u9664\u6676\u5706\u8868\u9762\u591a\u4f59\u7684\u6750\u6599\uff0c\u5982\u6c27\u5316\u5c42\u3001\u4ecb\u7535\u5c42\uff08ILD\uff09\u3001\u91d1\u5c5e\u5c42\uff0c\u5982 Cu\u3001W\u7b49\uff0c\u786e\u4fdd\u5236\u7a0b\u7a33\u5b9a\u3002<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u6676\u5706\u5212\u7247\u5200\u7cfb\u5217\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u6676\u5706\u7535\u94f8\u5212\u7247\u5200<\/strong>\uff1a \u5207\u7f1d\u6781\u5c0f\u3001\u7cbe\u5ea6\u9ad8\uff0c\u9002\u7528\u4e8e\u77fd\u6676\u5706\u53ca\u5404\u7c7b\u5316\u5408\u7269\u534a\u5bfc\u4f53\u6750\u6599\u3002<\/li>\n\n\n\n<li><strong>\u6676\u5706\u5c01\u88c5\u5212\u7247\u5200-\u786c\u5200<\/strong>\uff1a \u5200\u5203\u7a33\u5b9a\u3001\u8010\u78e8\u6027\u4f73\uff0c\u6709\u6548\u63a7\u5236\u6676\u7c92\u5c3a\u5bf8\uff0c\u5bf9\u5e94LED\u4e0e\u5c01\u88c5\u57fa\u677f\u5207\u5272\u3002<\/li>\n\n\n\n<li><strong>\u6676\u5706\u5c01\u88c5\u5212\u7247\u5200-\u8f6f\u5200<\/strong>\uff1a \u5207\u5272\u901f\u5ea6\u9ad8\u3001\u5bff\u547d\u957f\uff0c\u9002\u5408PCB\u3001EMC\u7b49\u57fa\u677f\u53ca\u5404\u7c7b\u786c\u8106\u6750\u6599\u91cf\u4ea7\u5e94\u7528\u3002<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u5b8f\u5d34\u63d0\u4f9b\u91d1\u521a\u77f3\u789f\u54a8\u8be2\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u4ecb\u7ecd\uff1a<\/strong> 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wp-elements-5858c30452e8b8e3dbffb3e4d9d6a731\" id=\"&#x7ACB;&#x5373;&#x884C;&#x52D5;&#xFF0C;&#x8207;&#x6211;&#x5011;&#x5171;&#x540C;&#x958B;&#x555F;&#x534A;&#x5C0E;&#x9AD4;&#x7CBE;&#x5BC6;&#x88FD;&#x7A0B;&#x7684;&#x65B0;&#x7BC7;&#x7AE0;&#xFF01;\">\u7acb\u5373\u884c\u52d5\uff0c\u8207\u6211\u5011\u5171\u540c\u958b\u555f\u534a\u5c0e\u9ad4\u7cbe\u5bc6\u88fd\u7a0b\u7684\u65b0\u7bc7\u7ae0\uff01<\/h2>\n\n<ol class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>\u514d\u8d39\u54a8\u8be2\u4e0e\u4e13\u6848\u8bc4\u4f30\uff1a<\/strong> \u6211\u4eec\u7684<strong>\u5b8f\u5d34\u91d1\u521a\u77f3\u5de5\u4e1a\u8017\u6750\u4e13\u5bb6<\/strong>\u4e3a\u60a8\u63d0\u4f9b\u4ea7\u54c1\u54a8\u8be2\uff0c\u5e76\u9488\u5bf9\u60a8\u7684\u5177\u4f53\u5236\u7a0b\u9700\u6c42\u8fdb\u884c\u4e13\u4e1a\u8bc4\u4f30\uff0c\u4e00\u540c\u627e\u51fa\u6700\u4f73\u7684\u7814\u78e8\u629b\u5149\u89e3\u51b3\u65b9\u6848\u3002<\/li>\n\n\n\n<li 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