{"id":121078,"date":"2025-07-17T09:00:00","date_gmt":"2025-07-17T01:00:00","guid":{"rendered":"https:\/\/honwaygroup.com\/mai-va-danh-bong-trong-san-xuat-chat-ban-dan-tu-lua-chon-vat-lieu-den-cung-cap-vat-tu-tieu-hao-cho-quy-trinh-xuat-sac\/"},"modified":"2025-09-02T10:16:29","modified_gmt":"2025-09-02T02:16:29","slug":"mai-va-danh-bong-trong-san-xuat-chat-ban-dan-tu-lua-chon-vat-lieu-den-cung-cap-vat-tu-tieu-hao-cho-quy-trinh-xuat-sac","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/vi\/mai-va-danh-bong-trong-san-xuat-chat-ban-dan-tu-lua-chon-vat-lieu-den-cung-cap-vat-tu-tieu-hao-cho-quy-trinh-xuat-sac\/","title":{"rendered":"M\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn: T\u1eeb l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u \u0111\u1ebfn cung c\u1ea5p v\u1eadt t\u01b0 ti\u00eau hao cho quy tr\u00ecnh xu\u1ea5t s\u1eafc"},"content":{"rendered":"\n<p class=\"has-medium-font-size\">Trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, \u0111\u1ed9 ph\u1eb3ng c\u1ee7a wafer r\u1ea5t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi vi\u1ec7c x\u1ebfp ch\u1ed3ng c\u00e1c m\u1ea1ch ch\u00ednh x\u00e1c. <strong>C\u00f4ng ngh\u1ec7 san ph\u1eb3ng h\u00f3a h\u1ecdc c\u01a1 h\u1ecdc (CMP)<\/strong> ho\u1ea1t \u0111\u1ed9ng nh\u01b0 m\u1ed9t &#8220;k\u1ef9 thu\u1eadt vi\u00ean t\u00e1i t\u1ea1o b\u1ec1 m\u1eb7t wafer&#8221;, k\u1ebft h\u1ee3p t\u00e1c \u0111\u1ed9ng h\u00f3a h\u1ecdc v\u00e0 c\u01a1 h\u1ecdc \u0111\u1ec3 lo\u1ea1i b\u1ecf ch\u00ednh x\u00e1c v\u1eadt li\u1ec7u th\u1eeba kh\u1ecfi b\u1ec1 m\u1eb7t wafer, t\u1ea1o n\u1ec1n t\u1ea3ng ho\u00e0n h\u1ea3o cho c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t ti\u1ebfp theo.<\/p>\n\n<p class=\"has-medium-font-size\">Honway \u0111\u00e3 c\u00f3 nhi\u1ec1u kinh nghi\u1ec7m s\u00e2u r\u1ed9ng trong l\u0129nh v\u1ef1c m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng b\u00e1n d\u1eabn, v\u00e0 hi\u1ec3u r\u00f5 r\u1eb1ng \u0111\u1ed9 ph\u1eb3ng tuy\u1ec7t \u0111\u1ed1i c\u1ee7a wafer l\u00e0 n\u1ec1n t\u1ea3ng c\u1ee7a chip hi\u1ec7u su\u1ea5t cao. Tr\u01b0\u1edbc nh\u1eefng th\u00e1ch th\u1ee9c ng\u00e0y c\u00e0ng nghi\u00eam tr\u1ecdng c\u1ee7a quy tr\u00ecnh, ch\u00fang t\u00f4i cung c\u1ea5p <strong>c\u00e1c gi\u1ea3i ph\u00e1p v\u1eadt t\u01b0 ti\u00eau hao l\u00f5i CMP to\u00e0n di\u1ec7n v\u00e0 hi\u1ec7u qu\u1ea3<\/strong>, bao g\u1ed3m <strong>kim c\u01b0\u01a1ng, nh\u00f4m oxit, xeri oxit, silicon dioxide<\/strong> v\u00e0 c\u00e1c v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng hi\u1ec7u su\u1ea5t cao kh\u00e1c, c\u00f3 th\u1ec3 h\u1ed7 tr\u1ee3 to\u00e0n di\u1ec7n wafer t\u1eeb m\u00e0i th\u00f4 \u0111\u1ebfn \u0111\u00e1nh b\u00f3ng g\u01b0\u01a1ng, t\u1ea1o n\u1ec1n t\u1ea3ng ho\u00e0n h\u1ea3o cho quy tr\u00ecnh ch\u00ednh x\u00e1c c\u1ee7a b\u1ea1n.<\/p>\n\n<div class=\"wp-block-rank-math-toc-block\" id=\"rank-math-toc\"><h2>M\u1ee5c l\u1ee5c<\/h2><nav><ul><li class=\"\"><a href=\"#%E4%BB%80%E9%BA%BC%E6%98%AFcmp\">CMP l\u00e0 g\u00ec?<\/a><\/li><li class=\"\"><a href=\"#%E7%82%BA%E4%BD%95%E5%8D%8A%E5%B0%8E%E9%AB%94%E9%9C%80%E8%A6%81%E9%80%B2%E8%A1%8C%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89\">T\u1ea1i sao ch\u1ea5t b\u00e1n d\u1eabn c\u1ea7n ph\u1ea3i m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng?<\/a><ul><li class=\"\"><a href=\"#cmp-%E8%A3%BD%E7%A8%8B%E4%B8%8D%E5%8F%AF%E6%88%96%E7%BC%BA%E7%9A%84%E5%8E%9F%E5%9B%A0\">T\u1ea1i sao quy tr\u00ecnh CMP l\u1ea1i c\u1ea7n thi\u1ebft<\/a><\/li><li class=\"\"><a href=\"#%E6%99%B6%E5%9C%93%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E5%BE%8C%E7%9A%84%E8%A6%8F%E6%A0%BC%E8%A6%81%E6%B1%82\">Y\u00eau c\u1ea7u v\u1ec1 th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt sau khi m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng wafer<\/a><ul><li class=\"\"><a href=\"#1-%E5%8E%9A%E5%BA%A6%E6%8E%A7%E5%88%B6\">1. Ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y<\/a><\/li><li class=\"\"><a href=\"#2-%E8%A1%A8%E9%9D%A2%E5%B9%B3%E5%9D%A6%E5%BA%A6%E8%88%87%E7%B2%97%E7%B3%99%E5%BA%A6%EF%BC%88-ra-%E5%80%BC%EF%BC%89\">2. \u0110\u1ed9 ph\u1eb3ng v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (gi\u00e1 tr\u1ecb Ra)<\/a><\/li><li class=\"\"><a href=\"#3-%E7%BC%BA%E9%99%B7%E6%8E%A7%E5%88%B6\">3. Ki\u1ec3m so\u00e1t l\u1ed7i<\/a><\/li><\/ul><\/li><\/ul><\/li><li class=\"\"><a href=\"#%E5%8D%8A%E5%B0%8E%E9%AB%94%E6%9D%90%E6%96%99%E5%9C%A8%E7%A0%94%E7%A3%A8%E6%99%82%E6%89%80%E9%81%87%E5%88%B0%E7%9A%84%E6%8C%91%E6%88%B0\">B\u1ea1n g\u1eb7p ph\u1ea3i nh\u1eefng th\u00e1ch th\u1ee9c n\u00e0o khi \u0111\u00e1nh b\u00f3ng v\u1eadt li\u1ec7u b\u00e1n d\u1eabn?<\/a><ul><li class=\"\"><a href=\"#%E5%A6%82%E4%BD%95%E6%8F%90%E5%8D%87%E6%99%B6%E5%9C%93%E5%B9%B3%E5%9D%A6%E5%BA%A6\">L\u00e0m th\u1ebf n\u00e0o \u0111\u1ec3 c\u1ea3i thi\u1ec7n \u0111\u1ed9 ph\u1eb3ng c\u1ee7a wafer<\/a><\/li><\/ul><\/li><li class=\"\"><a href=\"#cmp%E7%9A%84%E9%97%9C%E9%8D%B5%E7%A0%94%E7%A3%A8%E5%B7%A5%E5%85%B7\">D\u1ee5ng c\u1ee5 m\u00e0i ch\u00ednh cho CMP<\/a><\/li><li class=\"\"><a href=\"#%E7%AB%8B%E5%8D%B3%E8%A1%8C%E5%8B%95%EF%BC%8C%E8%88%87%E6%88%91%E5%80%91%E5%85%B1%E5%90%8C%E9%96%8B%E5%95%9F%E5%8D%8A%E5%B0%8E%E9%AB%94%E7%B2%BE%E5%AF%86%E8%A3%BD%E7%A8%8B%E7%9A%84%E6%96%B0%E7%AF%87%E7%AB%A0%EF%BC%81\">H\u00e3y h\u00e0nh \u0111\u1ed9ng ngay v\u00e0 m\u1edf ra m\u1ed9t ch\u01b0\u01a1ng m\u1edbi v\u1ec1 s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ch\u00ednh x\u00e1c c\u00f9ng ch\u00fang t\u00f4i!<\/a><\/li><li class=\"\"><a href=\"#%E6%9B%B4%E5%A4%9A%E5%AE%8F%E5%B4%B4%E9%91%BD%E7%9F%B3%E7%A0%94%E7%A3%A8%E6%8B%8B%E5%85%89%E8%80%97%E6%9D%90%E8%B3%87%E8%A8%8A\">Th\u00f4ng tin th\u00eam v\u1ec1 v\u1eadt t\u01b0 ti\u00eau hao m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng Honway<\/a><\/li><li class=\"\"><a href=\"#%E9%96%B1%E8%AE%80%E6%9B%B4%E5%A4%9A%E7%9B%B8%E9%97%9C%E8%AD%B0%E9%A1%8C\">\u0110\u1ecdc th\u00eam v\u1ec1 c\u00e1c ch\u1ee7 \u0111\u1ec1 li\u00ean quan<\/a><\/li><\/ul><\/nav><\/div>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-d635ba86e3b3c03e0c68e89ae0b56d19\" id=\"&#x4EC0;&#x9EBC;&#x662F;cmp\">CMP l\u00e0 g\u00ec?<\/h2>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3.avif\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-3-1024x630.jpg\" alt=\"\" class=\"wp-image-113607\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">CMP, t\u00ean \u0111\u1ea7y \u0111\u1ee7 l\u00e0 <strong>Chemical Mechanical Planarization<\/strong>, c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0<strong> Chemical Mechanical Polishing<\/strong>, l\u00e0 m\u1ed9t qu\u00e1 tr\u00ecnh c\u1ef1c k\u1ef3 quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n<p class=\"has-medium-font-size\">N\u00f3i m\u1ed9t c\u00e1ch \u0111\u01a1n gi\u1ea3n, CMP gi\u1ed1ng nh\u01b0 m\u1ed9t c\u00f4ng ngh\u1ec7 &#8220;m\u00e0i da&#8221; cho wafer b\u00e1n d\u1eabn. N\u00f3 k\u1ebft h\u1ee3p s\u1ee9c m\u1ea1nh c\u1ee7a \u0103n m\u00f2n h\u00f3a h\u1ecdc v\u00e0 m\u00e0i c\u01a1 h\u1ecdc \u0111\u1ec3 m\u00e0i ph\u1eb3ng v\u00e0 m\u1ecbn b\u1ec1 m\u1eb7t wafer. C\u00f4ng ngh\u1ec7 n\u00e0y s\u1eed d\u1ee5ng dung d\u1ecbch \u0111\u00e1nh b\u00f3ng (Slurry) ch\u1ee9a h\u1ea1t m\u00e0i m\u00f2n nano v\u00e0 m\u1ed9t mi\u1ebfng \u0111\u00e1nh b\u00f3ng \u0111\u1ec3 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u th\u1eeba tr\u00ean wafer th\u00f4ng qua ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c, \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ph\u1eb3ng \u1edf m\u1ee9c micron ho\u1eb7c th\u1eadm ch\u00ed nano, cu\u1ed1i c\u00f9ng l\u00e0m cho b\u1ec1 m\u1eb7t wafer tr\u00f4ng &#8220;nh\u01b0 g\u01b0\u01a1ng&#8221; v\u00e0 s\u00e1ng b\u00f3ng.<\/p>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-a5774d21c7db16ba10fac464a084fec2\" id=\"&#x70BA;&#x4F55;&#x534A;&#x5C0E;&#x9AD4;&#x9700;&#x8981;&#x9032;&#x884C;&#x7814;&#x78E8;&#x62CB;&#x5149;\">T\u1ea1i sao ch\u1ea5t b\u00e1n d\u1eabn c\u1ea7n ph\u1ea3i m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng?<\/h2>\n\n<figure class=\"wp-block-image size-large\"><a href=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5.jpg\"><img decoding=\"async\" src=\"https:\/\/honwaygroup.com\/wp-content\/uploads\/2025\/07\/&#x534A;&#x5C0E;&#x9AD4;&#x88FD;&#x7A0B;&#x4E2D;&#x7684;&#x7814;&#x78E8;&#x62CB;&#x5149;&#xFF1A;&#x5F9E;&#x6750;&#x6599;&#x9078;&#x64C7;&#x5230;&#x8017;&#x6750;&#x8CE6;&#x80FD;&#x7684;&#x5353;&#x8D8A;&#x88FD;&#x7A0B;_&#x5DE5;&#x4F5C;&#x5340;&#x57DF;-1-&#x8907;&#x672C;-5-1024x630.jpg\" alt=\"\" class=\"wp-image-113618\" \/><\/a><\/figure>\n\n<p class=\"has-medium-font-size\">Trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, c\u00e1c m\u1ea1ch ph\u1ee9c t\u1ea1p \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh b\u1eb1ng c\u00e1ch x\u1ebfp ch\u1ed3ng nhi\u1ec1u l\u1edbp v\u1eadt li\u1ec7u l\u00ean m\u1ed9t t\u1ea5m wafer. H\u00e3y t\u01b0\u1edfng t\u01b0\u1ee3ng vi\u1ec7c x\u00e2y d\u1ef1ng m\u1ed9t t\u00f2a nh\u00e0 ch\u1ecdc tr\u1eddi: m\u1ed7i t\u1ea7ng ph\u1ea3i b\u1eb1ng ph\u1eb3ng \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a t\u1ea7ng ti\u1ebfp theo. T\u01b0\u01a1ng t\u1ef1, n\u1ebfu m\u1ed9t t\u1ea5m wafer b\u00e1n d\u1eabn c\u00f3 b\u1ec1 m\u1eb7t ph\u1eb3ng ho\u1eb7c kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u trong m\u1ed7i quy tr\u00ecnh s\u1ea3n xu\u1ea5t, \u0111i\u1ec1u n\u00e0y s\u1ebd \u1ea3nh h\u01b0\u1edfng nghi\u00eam tr\u1ecdng \u0111\u1ebfn n\u0103ng su\u1ea5t v\u00e0 hi\u1ec7u su\u1ea5t c\u1ee7a chip cu\u1ed1i c\u00f9ng.<\/p>\n\n<h3 class=\"wp-block-heading\" id=\"cmp-&#x88FD;&#x7A0B;&#x4E0D;&#x53EF;&#x6216;&#x7F3A;&#x7684;&#x539F;&#x56E0;\"><strong>T\u1ea1i sao quy tr\u00ecnh CMP l\u1ea1i c\u1ea7n thi\u1ebft<\/strong><\/h3>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>\u0110\u1ea3m b\u1ea3o x\u1ebfp m\u1ea1ch ch\u00ednh x\u00e1c:<\/strong> Ch\u1ee9c n\u0103ng ch\u00ednh c\u1ee7a CMP l\u00e0 <strong>l\u00e0m ph\u1eb3ng<\/strong>, c\u00f3 th\u1ec3 gi\u1ea3m ho\u1eb7c lo\u1ea1i b\u1ecf l\u1ed7i chi\u1ec1u cao do qu\u00e1 tr\u00ecnh x\u1ebfp m\u1ea1ch l\u1eb7p \u0111i l\u1eb7p l\u1ea1i, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 d\u00e0y c\u1ee7a m\u1ed7i l\u1edbp m\u1ea1ch \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 b\u1ec1 m\u1eb7t ph\u1eb3ng, \u0111\u1ed3ng th\u1eddi cung c\u1ea5p n\u1ec1n t\u1ea3ng l\u00fd t\u01b0\u1edfng cho c\u00e1c qu\u00e1 tr\u00ecnh kh\u1eafc v\u00e0 in th\u1ea1ch b\u1ea3n ti\u1ebfp theo.<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>C\u1ea3i thi\u1ec7n n\u0103ng su\u1ea5t v\u00e0 hi\u1ec7u su\u1ea5t chip<\/strong>: B\u1eb1ng c\u00e1ch ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c l\u01b0\u1ee3ng v\u1eadt li\u1ec7u b\u1ecb lo\u1ea1i b\u1ecf, CMP c\u00f3 th\u1ec3 tr\u00e1nh \u0111\u00e1nh b\u00f3ng qu\u00e1 m\u1ee9c ho\u1eb7c ch\u01b0a \u0111\u1ee7, \u0111\u1ea3m b\u1ea3o c\u00e1c m\u1ea1ch trong chip \u0111\u01b0\u1ee3c \u0111\u1ecbnh h\u00ecnh ch\u00ednh x\u00e1c, do \u0111\u00f3 c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t chip v\u00e0 n\u0103ng su\u1ea5t s\u1ea3n xu\u1ea5t.<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>Ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y wafer:<\/strong> Ngo\u00e0i vi\u1ec7c l\u00e0m ph\u1eb3ng b\u1ec1 m\u1eb7t, qu\u00e1 tr\u00ecnh m\u00e0i c\u0169ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 l\u00e0m m\u1ecfng wafer. V\u00ed d\u1ee5, m\u00e0i ng\u01b0\u1ee3c s\u1ebd gi\u1ea3m \u0111\u1ed9 d\u00e0y wafer t\u1eeb 800-700 micron ban \u0111\u1ea7u xu\u1ed1ng c\u00f2n 80-70 micron, v\u00e0 th\u1eadm ch\u00ed xu\u1ed1ng c\u00f2n kho\u1ea3ng 20 micron th\u00f4ng qua c\u00f4ng ngh\u1ec7 x\u1ebfp ch\u1ed3ng nhi\u1ec1u l\u1edbp. \u0110i\u1ec1u n\u00e0y r\u1ea5t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng nh\u01b0 \u0111\u00f3ng g\u00f3i \u0111a chip (MCP) v\u00ec n\u00f3 c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c nhi\u1ec1u l\u1edbp m\u1ea1ch x\u1ebfp ch\u1ed3ng h\u01a1n trong m\u1ed9t chi\u1ec1u cao h\u1ea1n ch\u1ebf, \u0111\u00e1p \u1ee9ng nhu c\u1ea7u thu nh\u1ecf v\u00e0 t\u00edch h\u1ee3p cao c\u1ee7a c\u00e1c s\u1ea3n ph\u1ea9m \u0111i\u1ec7n t\u1eed.<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\"><strong>Lo\u1ea1i b\u1ecf khuy\u1ebft t\u1eadt v\u00e0 c\u1eb7n b\u1ea9n b\u1ec1 m\u1eb7t<\/strong>: M\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng c\u0169ng c\u00f3 th\u1ec3 c\u1ea3i thi\u1ec7n c\u00e1c khuy\u1ebft t\u1eadt nh\u1ecf c\u00f2n s\u00f3t l\u1ea1i t\u1eeb c\u00e1c quy tr\u00ecnh tr\u01b0\u1edbc, lo\u1ea1i b\u1ecf c\u1eb7n b\u1ea9n tr\u00ean b\u1ec1 m\u1eb7t wafer v\u00e0 l\u00e0m cho b\u1ec1 m\u1eb7t s\u00e1ng h\u01a1n cho quy tr\u00ecnh ti\u1ebfp theo. B\u01b0\u1edbc n\u00e0y r\u1ea5t quan tr\u1ecdng \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a wafer.<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x6676;&#x5713;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x5F8C;&#x7684;&#x898F;&#x683C;&#x8981;&#x6C42;\"><strong>Y\u00eau c\u1ea7u v\u1ec1 th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt sau khi m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng wafer<\/strong><\/h3>\n\n<p class=\"has-medium-font-size\">Trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, wafer ph\u1ea3i \u0111\u00e1p \u1ee9ng c\u00e1c th\u00f4ng s\u1ed1 v\u1eadt l\u00fd v\u00e0 b\u1ec1 m\u1eb7t c\u1ef1c k\u1ef3 nghi\u00eam ng\u1eb7t sau khi m\u00e0i l\u1ea1i v\u00e0 \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 tin c\u1eady c\u1ee7a c\u00e1c quy tr\u00ecnh ti\u1ebfp theo v\u00e0 hi\u1ec7u su\u1ea5t chip. C\u00e1c y\u00eau c\u1ea7u ch\u00ednh c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh ba kh\u00eda c\u1ea1nh:<\/p>\n\n<h4 class=\"wp-block-heading\" id=\"1-&#x539A;&#x5EA6;&#x63A7;&#x5236;\"><strong>1. Ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y<\/strong><\/h4>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>Thay \u0111\u1ed5i ti\u00eau chu\u1ea9n<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 d\u00e0y ban \u0111\u1ea7u c\u1ee7a wafer: kho\u1ea3ng 700\u2013800 micromet (\u00b5m).<\/li>\n\n\n\n<li>\u0110\u1ed9 d\u00e0y \u0111i\u1ec3n h\u00ecnh sau khi nghi\u1ec1n: gi\u1ea3m xu\u1ed1ng c\u00f2n 70\u201380 micron.<\/li>\n\n\n\n<li>Y\u00eau c\u1ea7u MCP (\u0111\u00f3ng g\u00f3i nhi\u1ec1u chip) n\u00e2ng cao: c\u00f3 th\u1ec3 l\u00e0m m\u1ecfng h\u01a1n n\u1eefa xu\u1ed1ng <strong>kho\u1ea3ng 20 micron<\/strong>.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>Th\u00e1ch th\u1ee9c<\/strong>: Qu\u00e1 d\u00e0y s\u1ebd d\u1eabn \u0111\u1ebfn t\u1ea3n nhi\u1ec7t k\u00e9m; qu\u00e1 m\u1ecfng s\u1ebd d\u1ec5 v\u1ee1, \u0111\u1eb7c bi\u1ec7t l\u00e0 khi s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i wafer 12 inch. Kh\u00f3 kh\u0103n trong vi\u1ec7c ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y t\u0103ng l\u00ean theo xu h\u01b0\u1edbng \u0111\u00f3ng g\u00f3i.<\/li>\n<\/ul>\n\n<h4 class=\"wp-block-heading\" id=\"2-&#x8868;&#x9762;&#x5E73;&#x5766;&#x5EA6;&#x8207;&#x7C97;&#x7CD9;&#x5EA6;&#xFF08;-ra-&#x503C;&#xFF09;\"><strong>2. \u0110\u1ed9 ph\u1eb3ng v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (gi\u00e1 tr\u1ecb Ra)<\/strong><\/h4>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li class=\"has-medium-font-size\"><strong>Ch\u1ec9 s\u1ed1 \u0111\u1ed9 nh\u00e1m<\/strong>:\n<ul class=\"wp-block-list\">\n<li>S\u1eed d\u1ee5ng gi\u00e1 tr\u1ecb Ra (\u0110\u1ed9 nh\u00e1m trung b\u00ecnh) \u0111\u1ec3 \u0111o.<\/li>\n\n\n\n<li>Ra c\u00e0ng nh\u1ecf th\u00ec b\u1ec1 m\u1eb7t c\u00e0ng m\u1ecbn v\u00e0 l\u00fd t\u01b0\u1edfng nh\u1ea5t l\u00e0 b\u1ec1 m\u1eb7t ph\u1ea3i g\u1ea7n b\u1eb1ng \u0111\u1ed9<strong> ph\u1eb3ng \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed.<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>R\u1ee7i ro ti\u1ec1m \u1ea9n<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 kh\u00f4ng b\u1eb1ng ph\u1eb3ng c\u1ee7a b\u1ec1 m\u1eb7t s\u1ebd \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn vi\u1ec7c truy\u1ec1n c\u00e1c m\u1eabu m\u1ea1ch, g\u00e2y ra sai l\u1ec7ch ho\u1eb7c h\u1ecfng h\u00f3c hi\u1ec7u su\u1ea5t c\u1ee7a linh ki\u1ec7n.<\/li>\n\n\n\n<li>\u1ee8ng su\u1ea5t b\u00ean trong g\u00e2y ra bi\u1ebfn d\u1ea1ng b\u1ec1 m\u1eb7t, c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn s\u1ef1 tr\u00f4i th\u00f4ng s\u1ed1 ho\u1eb7c gi\u1ea3m \u0111\u1ed9 tin c\u1eady.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n<h4 class=\"wp-block-heading has-medium-font-size\" id=\"3-&#x7F3A;&#x9677;&#x63A7;&#x5236;\"><strong>3. Ki\u1ec3m so\u00e1t l\u1ed7i<\/strong><\/h4>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>Ph\u1ea1m vi ki\u1ec3m so\u00e1t<\/strong>\uff1a\n<ul class=\"wp-block-list\">\n<li>H\u01b0 h\u1ecfng b\u1ec1 m\u1eb7t.<\/li>\n\n\n\n<li>Xu\u1ea5t hi\u1ec7n c\u00e1c v\u1ebft n\u1ee9t nh\u1ecf.<\/li>\n\n\n\n<li>\u00d4 nhi\u1ec5m h\u1ea1t v\u00e0 v\u1eadt ch\u1ea5t l\u1ea1.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>T\u1ea7m quan tr\u1ecdng<\/strong>: Ngay c\u1ea3 nh\u1eefng t\u1ea1p ch\u1ea5t nh\u1ecf c\u0169ng c\u00f3 th\u1ec3 ph\u00e1t tri\u1ec3n th\u00e0nh l\u1ed7i nghi\u00eam tr\u1ecdng trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t ti\u1ebfp theo, khi\u1ebfn chip b\u1ecb lo\u1ea1i b\u1ecf.<\/li>\n\n\n\n<li><strong>R\u1ee7i ro c\u1ee7a wafer m\u1ecfng: <\/strong>wafer c\u00e0ng m\u1ecfng th\u00ec \u0111\u1ed9 gi\u00f2n c\u01a1 h\u1ecdc c\u00e0ng cao v\u00e0 c\u1ea7n ph\u1ea3i \u0111\u1eb7c bi\u1ec7t c\u1ea9n th\u1eadn \u0111\u1ec3 tr\u00e1nh va ch\u1ea1m c\u1ee7a c\u00e1c h\u1ea1t ho\u1eb7c s\u1ef1 can thi\u1ec7p c\u01a1 h\u1ecdc t\u1eeb ch\u1ea5t mang trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t <strong>dung sai th\u1ea5p h\u01a1n<\/strong>.<\/li>\n<\/ul>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-6b15de0d8ec2b415d3419da7fa0bcbe9\" id=\"&#x534A;&#x5C0E;&#x9AD4;&#x6750;&#x6599;&#x5728;&#x7814;&#x78E8;&#x6642;&#x6240;&#x9047;&#x5230;&#x7684;&#x6311;&#x6230;\">B\u1ea1n g\u1eb7p ph\u1ea3i nh\u1eefng th\u00e1ch th\u1ee9c n\u00e0o khi \u0111\u00e1nh b\u00f3ng v\u1eadt li\u1ec7u b\u00e1n d\u1eabn?<\/h2>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>\u0110\u1ed9 ch\u00ednh x\u00e1c trong vi\u1ec7c lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u v\u00e0 t\u00ednh \u0111\u1ed3ng nh\u1ea5t b\u1ec1 m\u1eb7t<\/strong>: C\u1ea5u tr\u00fac tinh t\u1ebf c\u1ee7a c\u00e1c linh ki\u1ec7n b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi quy tr\u00ecnh m\u00e0i ph\u1ea3i c\u00f3 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c l\u01b0\u1ee3ng v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf trong khi v\u1eabn duy tr\u00ec \u0111\u1ed9 ph\u1eb3ng v\u00e0 t\u00ednh \u0111\u1ed3ng nh\u1ea5t cao. \u0110i\u1ec1u n\u00e0y \u0111\u00f2i h\u1ecfi ph\u1ea3i l\u1ef1a ch\u1ecdn ch\u00ednh x\u00e1c lo\u1ea1i v\u1eadt li\u1ec7u m\u00e0i m\u00f2n <strong>nh\u01b0 nh\u00f4m oxit, silicon dioxide ho\u1eb7c kim c\u01b0\u01a1ng<\/strong> v\u00e0 ph\u00e2n b\u1ed1 k\u00edch th\u01b0\u1edbc h\u1ea1t \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o k\u1ebft qu\u1ea3 t\u1ed1i \u01b0u.<\/li>\n\n\n\n<li><strong>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u b\u1ec1 m\u1eb7t:<\/strong> B\u1ec1 m\u1eb7t sau khi m\u00e0i ph\u1ea3i c\u00f3 <strong>\u0111\u1ed9 ph\u1eb3ng v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u cao<\/strong>. B\u1ea5t k\u1ef3 qu\u00e1 tr\u00ecnh m\u00e0i kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u c\u1ee5c b\u1ed9 n\u00e0o c\u0169ng s\u1ebd d\u1eabn \u0111\u1ebfn h\u1ecfng c\u00e1c qu\u00e1 tr\u00ecnh kh\u1eafc v\u00e0 in th\u1ea1ch b\u1ea3n ti\u1ebfp theo, do \u0111\u00f3 \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn hi\u1ec7u su\u1ea5t chung c\u1ee7a chip.<\/li>\n\n\n\n<li><strong>Ki\u1ec3m so\u00e1t khuy\u1ebft t\u1eadt:<\/strong> Qu\u00e1 tr\u00ecnh m\u00e0i d\u1ec5 ph\u00e1t sinh c\u00e1c khuy\u1ebft t\u1eadt nh\u01b0 <strong> h\u01b0 h\u1ecfng b\u1ec1 m\u1eb7t, v\u1ebft n\u1ee9t nh\u1ecf v\u00e0 nhi\u1ec5m b\u1ea9n h\u1ea1t<\/strong>. Nh\u1eefng khuy\u1ebft t\u1eadt n\u00e0y, d\u00f9 nh\u1ecf, c\u0169ng c\u00f3 th\u1ec3 g\u00e2y ra h\u1ecfng h\u00f3c linh ki\u1ec7n, do \u0111\u00f3 c\u1ea7n \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t v\u00e0 gi\u1ea3m thi\u1ec3u hi\u1ec7u qu\u1ea3. \u0110\u1eb7c bi\u1ec7t, khi wafer m\u1ecfng \u0111i, kh\u1ea3 n\u0103ng x\u1ea3y ra khuy\u1ebft t\u1eadt t\u0103ng l\u00ean, v\u00e0 \u0111\u1ed9 kh\u00f3 c\u1ee7a c\u00e1c quy tr\u00ecnh ti\u1ebfp theo c\u0169ng t\u0103ng theo.<\/li>\n\n\n\n<li><strong>T\u1ea1o \u1ee9ng su\u1ea5t v\u00e0 t\u00e1c \u0111\u1ed9ng:<\/strong> Trong qu\u00e1 tr\u00ecnh nghi\u1ec1n, ti\u1ebfp x\u00fac gi\u1eefa \u0111\u1ea7u nghi\u1ec1n v\u00e0 b\u1ec1 m\u1eb7t wafer s\u1ebd t\u1ea1o ra <strong>\u1ee9ng su\u1ea5t c\u1eaft v\u00e0 \u00e1p su\u1ea5t<\/strong>, \u0111\u1ed3ng th\u1eddi d\u00f2ng dung d\u1ecbch h\u00f3a h\u1ecdc v\u00e0 ch\u1ea5t m\u00e0i m\u00f2n c\u0169ng s\u1ebd t\u1ea1o ra \u1ee9ng su\u1ea5t. Nh\u1eefng \u1ee9ng su\u1ea5t n\u00e0y c\u00f3 th\u1ec3 g\u00e2y ra bi\u1ebfn d\u1ea1ng d\u1ebbo v\u00e0 \u1ee9ng su\u1ea5t d\u01b0 tr\u00ean b\u1ec1 m\u1eb7t wafer, \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 ph\u1eb3ng v\u00e0 \u0111\u1ed9 nh\u00e1m cu\u1ed1i c\u00f9ng, th\u1eadm ch\u00ed \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn hi\u1ec7u su\u1ea5t \u0111i\u1ec7n, d\u1eabn \u0111\u1ebfn s\u1ef1 tr\u00f4i th\u00f4ng s\u1ed1 linh ki\u1ec7n v\u00e0 gi\u1ea3m t\u1ef7 l\u1ec7 ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m.<\/li>\n\n\n\n<li><strong>Kh\u00f3 kh\u0103n trong vi\u1ec7c x\u1eed l\u00fd c\u00e1c v\u1eadt li\u1ec7u \u0111\u1eb7c bi\u1ec7t si\u00eau c\u1ee9ng:<\/strong> \u0110\u1ed9 c\u1ee9ng c\u1ef1c cao c\u1ee7a c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn th\u1ebf h\u1ec7 th\u1ee9 ba nh\u01b0 silicon carbide (SiC) v\u00e0 gali nitride (GaN) \u0111\u1eb7t ra nh\u1eefng th\u00e1ch th\u1ee9c ch\u01b0a t\u1eebng c\u00f3 \u0111\u1ed1i v\u1edbi quy tr\u00ecnh nghi\u1ec1n truy\u1ec1n th\u1ed1ng. Nh\u1eefng v\u1eadt li\u1ec7u n\u00e0y \u0111\u1eb7c bi\u1ec7t c\u1ea7n ch\u1ea5t m\u00e0i m\u00f2n si\u00eau c\u1ee9ng nh\u01b0 <strong>kim c\u01b0\u01a1ng<\/strong> \u0111\u1ec3 lo\u1ea1i b\u1ecf hi\u1ec7u qu\u1ea3 v\u00e0 \u00edt g\u00e2y h\u01b0 h\u1ea1i.<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x5982;&#x4F55;&#x63D0;&#x5347;&#x6676;&#x5713;&#x5E73;&#x5766;&#x5EA6;\"><strong>L\u00e0m th\u1ebf n\u00e0o \u0111\u1ec3 c\u1ea3i thi\u1ec7n \u0111\u1ed9 ph\u1eb3ng c\u1ee7a wafer<\/strong><\/h3>\n\n<p>\u0110\u1ec3 kh\u1eafc ph\u1ee5c nh\u1eefng th\u00e1ch th\u1ee9c tr\u00ean v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u1ed9 ph\u1eb3ng c\u1ee7a wafer, ng\u00e0nh c\u00f4ng nghi\u1ec7p \u0111\u00e3 \u00e1p d\u1ee5ng nhi\u1ec1u chi\u1ebfn l\u01b0\u1ee3c kh\u00e1c nhau:<\/p>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>T\u1ed1i \u01b0u h\u00f3a c\u00e1c th\u00f4ng s\u1ed1 x\u1eed l\u00fd<\/strong>:\n<ul class=\"wp-block-list\">\n<li><strong>L\u1ef1a ch\u1ecdn b\u00f9n v\u00e0 ch\u1ea5t m\u00e0i m\u00f2n: <\/strong>Ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c l\u01b0u l\u01b0\u1ee3ng v\u00e0 n\u1ed3ng \u0111\u1ed9 c\u1ee7a b\u00f9n, \u0111\u1ed3ng th\u1eddi l\u1ef1a ch\u1ecdn ch\u00ednh x\u00e1c lo\u1ea1i ch\u1ea5t m\u00e0i m\u00f2n ph\u00f9 h\u1ee3p nh\u1ea5t (nh\u01b0 nh\u00f4m oxit, xeri oxit, silicon dioxide ho\u1eb7c kim c\u01b0\u01a1ng) v\u00e0 ph\u00e2n b\u1ed1 k\u00edch th\u01b0\u1edbc h\u1ea1t c\u1ee7a n\u00f3 (v\u00ed d\u1ee5: 50-250 nanomet v\u00e0 ki\u1ec3m so\u00e1t hi\u1ec7u qu\u1ea3 c\u00e1c h\u1ea1t c\u00f3 k\u00edch th\u01b0\u1edbc 1-10 micron) theo c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn v\u00e0 m\u1ee5c ti\u00eau m\u00e0i kh\u00e1c nhau. T\u00ednh ch\u1ea5t h\u00f3a h\u1ecdc c\u1ee7a b\u00f9n v\u00e0 \u0111\u1eb7c t\u00ednh c\u1ee7a ch\u1ea5t m\u00e0i m\u00f2n ph\u1ea3i ho\u00e0n to\u00e0n ph\u00f9 h\u1ee3p \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c hi\u1ec7u qu\u1ea3 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u v\u00e0 b\u1ec1 m\u1eb7t \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 hi\u1ec7u qu\u1ea3.<\/li>\n\n\n\n<li><strong>Ki\u1ec3m so\u00e1t l\u1ef1c nghi\u1ec1n<\/strong>: Ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c c\u00e1c th\u00f4ng s\u1ed1 nh\u01b0 \u00e1p su\u1ea5t nghi\u1ec1n, t\u1ed1c \u0111\u1ed9 v\u00e0 th\u1eddi gian \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c hi\u1ec7u qu\u1ea3 nghi\u1ec1n t\u1ed1t nh\u1ea5t v\u00e0 tr\u00e1nh h\u01b0 h\u1ecfng do \u00e1p su\u1ea5t qu\u00e1 cao ho\u1eb7c hi\u1ec7u qu\u1ea3 b\u1ecb \u1ea3nh h\u01b0\u1edfng do \u00e1p su\u1ea5t qu\u00e1 th\u1ea5p.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u203b Ng\u00e0nh c\u00f4ng nghi\u1ec7p c\u00f3 m\u1ed9t nguy\u00ean t\u1eafc khi th\u1ef1c hi\u1ec7n m\u00e0i &#8211; <strong>nguy\u00ean t\u1eafc l\u00e0m l\u1ea1i CMP [\u0111\u1ec3 d\u00e0y, kh\u00f4ng \u0111\u1ec3 m\u1ecfng]<\/strong>: Khi b\u1ea1n \u0111i\u1ec1u ch\u1ec9nh c\u00e1c th\u00f4ng s\u1ed1, khuy\u1ebfn ngh\u1ecb r\u1eb1ng s\u1ed1 gi\u00e2y th\u1ef1c t\u1ebf n\u00ean ng\u1eafn h\u01a1n s\u1ed1 gi\u00e2y d\u1ef1 ki\u1ebfn. T\u1ed1t h\u01a1n l\u00e0 n\u00ean \u0111\u1ec3 l\u1ea1i m\u1ed9t ch\u00fat \u0111\u1ed9 d\u00e0y h\u01a1n l\u00e0 qu\u00e1 m\u1ecfng, \u0111\u1ec3 c\u00f3 c\u01a1 h\u1ed9i ch\u1ec9nh s\u1eeda l\u1ea1i.<\/p>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>Quy tr\u00ecnh m\u00e0i nhi\u1ec1u b\u01b0\u1edbc:<\/strong> S\u1eed d\u1ee5ng quy tr\u00ecnh m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng nhi\u1ec1u b\u01b0\u1edbc, ch\u1eb3ng h\u1ea1n nh\u01b0 m\u00e0i th\u00f4, m\u00e0i m\u1ecbn v\u00e0 th\u1eadm ch\u00ed s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p c\u1eaft h\u1ea1t tr\u01b0\u1edbc khi t\u1ea1o h\u1ea1t (DBG) khi \u0111\u1ed9 d\u00e0y c\u1ee7a t\u1ea5m wafer nh\u1ecf h\u01a1n 50 micron. Ngh\u0129a l\u00e0, qu\u00e1 tr\u00ecnh c\u1eaft h\u1ea1t l\u1ef1u \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n tr\u01b0\u1edbc khi m\u00e0i l\u1ea7n \u0111\u1ea7u, sau \u0111\u00f3 l\u00e0 m\u00e0i v\u00e0 c\u1eaft h\u1ea1t l\u1ef1u l\u1ea7n th\u1ee9 hai \u0111\u1ec3 t\u00e1ch c\u00e1c t\u1ea5m wafer m\u1ed9t c\u00e1ch an to\u00e0n v\u00e0 gi\u1ea3m c\u00e1c khuy\u1ebft t\u1eadt b\u00ean ngo\u00e0i trong qu\u00e1 tr\u00ecnh m\u00e0i. Ph\u01b0\u01a1ng ph\u00e1p t\u1eebng b\u01b0\u1edbc n\u00e0y c\u00f3 th\u1ec3 gi\u1ea3m \u1ee9ng su\u1ea5t hi\u1ec7u qu\u1ea3 v\u00e0 c\u00f3 \u0111\u01b0\u1ee3c b\u1ec1 m\u1eb7t m\u1ecbn h\u01a1n.<\/li>\n\n\n\n<li><strong>Gia nhi\u1ec7t c\u1ee5c b\u1ed9 v\u00e0 kh\u1eafc h\u00f3a h\u1ecdc:<\/strong> Vi\u1ec7c gia nhi\u1ec7t c\u1ee5c b\u1ed9 trong qu\u00e1 tr\u00ecnh m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng c\u00f3 th\u1ec3 l\u00e0m thay \u0111\u1ed5i c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd c\u1ee7a t\u1ea5m wafer, do \u0111\u00f3 l\u00e0m gi\u1ea3m t\u00e1c \u0111\u1ed9ng c\u1ee7a \u1ee9ng su\u1ea5t. Ngo\u00e0i ra, v\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00f4ng ngh\u1ec7, vi\u1ec7c \u0111\u01b0a c\u00f4ng ngh\u1ec7 kh\u1eafc h\u00f3a h\u1ecdc v\u00e0o quy tr\u00ecnh \u0111\u1ea7u cu\u1ed1i b\u00e1n d\u1eabn, k\u1ebft h\u1ee3p v\u1edbi m\u00e0i c\u01a1 h\u1ecdc v\u00e0 ph\u00e1t tri\u1ec3n to\u00e0n di\u1ec7n c\u00e1c ph\u01b0\u01a1ng ph\u00e1p x\u1eed l\u00fd m\u1edbi c\u0169ng l\u00e0 h\u01b0\u1edbng \u0111i \u0111\u1ec3 gi\u1ea3i quy\u1ebft t\u00ecnh tr\u1ea1ng t\u1eafc ngh\u1ebdn trong qu\u00e1 tr\u00ecnh m\u00e0i.<\/li>\n\n\n\n<li><strong>L\u1ef1a ch\u1ecdn v\u00e0 b\u1ea3o d\u01b0\u1ee1ng ph\u1edbt \u0111\u00e1nh b\u00f3ng:<\/strong> Ch\u1ea5t li\u1ec7u v\u00e0 t\u00ednh ch\u1ea5t c\u1ee7a ph\u1edbt \u0111\u00e1nh b\u00f3ng \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn hi\u1ec7u qu\u1ea3 \u0111\u00e1nh b\u00f3ng v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh. Vi\u1ec7c theo d\u00f5i th\u01b0\u1eddng xuy\u00ean t\u00ecnh tr\u1ea1ng hao m\u00f2n, nhi\u1ec5m b\u1ea9n v\u00e0 b\u1ea3o tr\u00ec l\u00e0 nh\u1eefng b\u01b0\u1edbc quan tr\u1ecdng \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng quy tr\u00ecnh.<\/li>\n\n\n\n<li><strong>Chu\u1ed7i cung \u1ee9ng v\u00e0 chi\u1ebfn l\u01b0\u1ee3c mua s\u1eafm:<\/strong> L\u1ef1a ch\u1ecdn nh\u00e0 cung c\u1ea5p v\u1eadt li\u1ec7u v\u00e0 thi\u1ebft b\u1ecb nghi\u1ec1n ch\u1ea5t l\u01b0\u1ee3ng cao, \u0111\u1ed3ng th\u1eddi t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh mua s\u1eafm \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u00e1p \u1ee9ng nhu c\u1ea7u s\u1ea3n xu\u1ea5t v\u00e0 y\u00eau c\u1ea7u quy tr\u00ecnh.<\/li>\n\n\n\n<li><strong>C\u1ea3i ti\u1ebfn v\u00e0 chu\u1ea9n h\u00f3a li\u00ean t\u1ee5c: <\/strong>Thi\u1ebft l\u1eadp c\u00e1c quy tr\u00ecnh v\u1eadn h\u00e0nh ti\u00eau chu\u1ea9n (SOP) \u0111\u1ec3 gi\u1ea3m thi\u1ec3u s\u1ef1 thay \u0111\u1ed5i v\u00e0 th\u01b0\u1eddng xuy\u00ean \u0111\u00e0o t\u1ea1o c\u00e1c nh\u00f3m s\u1ea3n xu\u1ea5t v\u1ec1 qu\u1ea3n l\u00fd c\u0103ng th\u1eb3ng v\u00e0 t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh. \u0110\u1ed3ng th\u1eddi, qu\u00e1 tr\u00ecnh m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng \u0111\u01b0\u1ee3c li\u00ean t\u1ee5c \u0111\u00e1nh gi\u00e1 v\u00e0 t\u1ed1i \u01b0u h\u00f3a d\u1ef1a tr\u00ean d\u1eef li\u1ec7u s\u1ea3n xu\u1ea5t th\u1ef1c t\u1ebf \u0111\u1ec3 \u0111\u00e1p \u1ee9ng nh\u1eefng th\u00e1ch th\u1ee9c do s\u1ef1 ph\u00e1t tri\u1ec3n li\u00ean t\u1ee5c c\u1ee7a c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn mang l\u1ea1i.<\/li>\n<\/ul>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-0962cf20cfcef5f69308600aefafdde0\" id=\"cmp&#x7684;&#x95DC;&#x9375;&#x7814;&#x78E8;&#x5DE5;&#x5177;\">D\u1ee5ng c\u1ee5 m\u00e0i ch\u00ednh cho CMP<\/h2>\n\n<p class=\"has-medium-font-size\">Ph\u01b0\u01a1ng ph\u00e1p san ph\u1eb3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP) l\u00e0 ch\u00eca kh\u00f3a \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o b\u1ec1 m\u1eb7t wafer c\u1ef1c k\u1ef3 ph\u1eb3ng. Hongwei cung c\u1ea5p <strong>\u0110\u1ea7y \u0111\u1ee7 c\u00e1c v\u1eadt t\u01b0 ti\u00eau hao l\u00f5i CMP hi\u1ec7u su\u1ea5t cao,<\/strong> c\u00f3 th\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c nhu c\u1ea7u \u0111a d\u1ea1ng t\u1eeb c\u00e1c t\u1ea5m silicon truy\u1ec1n th\u1ed1ng \u0111\u1ebfn c\u00e1c ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t m\u1edbi n\u1ed5i. C\u00e1c gi\u1ea3i ph\u00e1p c\u1ee7a ch\u00fang t\u00f4i bao g\u1ed3m <strong>b\u00e1nh m\u00e0i ch\u00ednh x\u00e1c, nhi\u1ec1u lo\u1ea1i ch\u1ea5t l\u1ecfng \u0111\u00e1nh b\u00f3ng, ch\u1eb3ng h\u1ea1n nh\u01b0 kim c\u01b0\u01a1ng, nh\u00f4m oxit, xeri oxit, silicon dioxide, mi\u1ebfng \u0111\u00e1nh b\u00f3ng v\u00e0 \u0111\u0129a kim c\u01b0\u01a1ng<\/strong> v\u00e0 ch\u00fang t\u00f4i cam k\u1ebft cung c\u1ea5p cho c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn c\u00e1c gi\u1ea3i ph\u00e1p to\u00e0n di\u1ec7n v\u00e0 t\u1ed1i \u01b0u \u0111\u1ec3 gi\u00fap b\u1ea1n c\u1ea3i thi\u1ec7n ch\u1ea5t l\u01b0\u1ee3ng wafer v\u00e0 v\u01b0\u1ee3t qua nh\u1eefng h\u1ea1n ch\u1ebf c\u1ee7a quy tr\u00ecnh.<\/p>\n\n<p class=\"has-medium-font-size\">Danh s\u00e1ch s\u1ea3n ph\u1ea9m:<\/p>\n\n<ul style=\"line-height:2\" class=\"wp-block-list has-medium-font-size\">\n<li><strong>D\u00f2ng s\u1ea3n ph\u1ea9m \u0111\u00e1 m\u00e0i ch\u00ednh x\u00e1c Hongwei:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u0110\u00e1 m\u00e0i v\u00e1t cho t\u1ea5m wafer silicon:<\/strong> \u0110\u1ea3m b\u1ea3o c\u00e1c c\u1ea1nh c\u1ee7a t\u1ea5m wafer silicon nh\u1eb5n v\u00e0 nguy\u00ean v\u1eb9n, ng\u0103n ng\u1eeba n\u1ee9t hi\u1ec7u qu\u1ea3.<\/li>\n\n\n\n<li><strong>B\u00e1nh m\u00e0i \u0111\u1ec3 m\u00e0i b\u1ec1 m\u1eb7t wafer:<\/strong> \u0110\u1ea1t \u0111\u01b0\u1ee3c b\u1ec1 m\u1eb7t c\u1ef1c k\u1ef3 ph\u1eb3ng tr\u00ean wafer silicon l\u00e0 c\u01a1 s\u1edf cho c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t hi\u1ec7u qu\u1ea3.<\/li>\n\n\n\n<li><strong>\u0110\u00e1 m\u00e0i b\u00e1n d\u1eabn h\u1ed7n h\u1ee3p<\/strong>: Cung c\u1ea5p c\u00e1c gi\u1ea3i ph\u00e1p m\u00e0i th\u00f4 hi\u1ec7u qu\u1ea3 v\u00e0 \u00edt h\u01b0 h\u1ea1i cho c\u00e1c v\u1eadt li\u1ec7u si\u00eau c\u1ee9ng nh\u01b0 SiC\/GaN.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>D\u00f2ng s\u1ea3n ph\u1ea9m ch\u1ea5t l\u1ecfng \u0111\u00e1nh b\u00f3ng hi\u1ec7u su\u1ea5t cao Honway:<\/strong> \n<ul class=\"wp-block-list\">\n<li><strong>Dung d\u1ecbch \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng Honway<\/strong>: Cung c\u1ea5p nhi\u1ec1u l\u1ef1a ch\u1ecdn k\u00edch th\u01b0\u1edbc h\u1ea1t nano, \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c v\u1eadt li\u1ec7u si\u00eau c\u1ee9ng nh\u01b0 \u0111\u00e1nh b\u00f3ng g\u01b0\u01a1ng SiC, GaN (Ra\u22640,01 um), c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t v\u00e0 n\u0103ng su\u1ea5t c\u1ee7a linh ki\u1ec7n.<\/li>\n\n\n\n<li><strong>B\u00f9n \u0111\u00e1nh b\u00f3ng nh\u00f4m Honway<\/strong>: Th\u00edch h\u1ee3p cho CMP c\u1ee7a nhi\u1ec1u l\u1edbp kim lo\u1ea1i kh\u00e1c nhau nh\u01b0 l\u1edbp \u0111\u1ed3ng, vonfram v\u00e0 l\u1edbp \u0111i\u1ec7n m\u00f4i, mang l\u1ea1i t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi.<\/li>\n\n\n\n<li><strong>B\u00f9n \u0111\u00e1nh b\u00f3ng oxit xeri Honway<\/strong>: Ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 c\u00f4 l\u1eadp r\u00e3nh n\u00f4ng (STI) v\u00e0 san ph\u1eb3ng l\u1edbp \u0111i\u1ec7n m\u00f4i, mang l\u1ea1i kh\u1ea3 n\u0103ng ch\u1ecdn l\u1ecdc cao v\u00e0 hi\u1ec7u qu\u1ea3 \u0111\u00e1nh b\u00f3ng khuy\u1ebft t\u1eadt th\u1ea5p.<\/li>\n\n\n\n<li><strong>Dung d\u1ecbch \u0111\u00e1nh b\u00f3ng silicon dioxide Honway:<\/strong> \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong vi\u1ec7c \u0111\u00e1nh b\u00f3ng m\u1ecbn c\u00e1c l\u1edbp \u0111i\u1ec7n m\u00f4i v\u00e0 t\u1ea5m silicon, mang l\u1ea1i \u0111\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi v\u00e0 t\u1ef7 l\u1ec7 khuy\u1ebft t\u1eadt th\u1ea5p.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>T\u1ea5m m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng wafer ch\u00ednh x\u00e1c Honway:<\/strong> K\u1ebft h\u1ee3p v\u1edbi c\u00e1c lo\u1ea1i b\u00f9n kh\u00e1c nhau v\u00e0 \u00e1p su\u1ea5t h\u01b0\u1edbng xu\u1ed1ng, ch\u00fang lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u d\u01b0 th\u1eeba kh\u1ecfi b\u1ec1 m\u1eb7t wafer, ch\u1eb3ng h\u1ea1n nh\u01b0 l\u1edbp oxit, l\u1edbp \u0111i\u1ec7n m\u00f4i (ILD) v\u00e0 l\u1edbp kim lo\u1ea1i nh\u01b0 Cu v\u00e0 W, \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh.<\/li>\n\n\n\n<li><strong>D\u00f2ng dao c\u1eaft b\u00e1nh qu\u1ebf Honway:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>Dao c\u1eaft \u0111i\u1ec7n \u0111\u1ecbnh h\u00ecnh wafer<\/strong>: \u0111\u01b0\u1eddng c\u1eaft c\u1ef1c nh\u1ecf v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, ph\u00f9 h\u1ee3p v\u1edbi wafer silicon v\u00e0 nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t kh\u00e1c nhau.<\/li>\n\n\n\n<li><strong>Dao c\u1eaft bao b\u00ec wafer &#8211; dao c\u1ee9ng<\/strong>: L\u01b0\u1ee1i dao \u1ed5n \u0111\u1ecbnh v\u00e0 ch\u1ed1ng m\u00e0i m\u00f2n, ki\u1ec3m so\u00e1t hi\u1ec7u qu\u1ea3 k\u00edch th\u01b0\u1edbc h\u1ea1t, th\u00edch h\u1ee3p \u0111\u1ec3 c\u1eaft \u0111\u00e8n LED v\u00e0 ch\u1ea5t n\u1ec1n \u0111\u00f3ng g\u00f3i.<\/li>\n\n\n\n<li><strong>Dao c\u1eaft bao b\u00ec wafer &#8211; dao m\u1ec1m<\/strong>: t\u1ed1c \u0111\u1ed9 c\u1eaft cao v\u00e0 tu\u1ed5i th\u1ecd cao, ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t PCB, EMC v\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n kh\u00e1c c\u0169ng nh\u01b0 nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u c\u1ee9ng v\u00e0 gi\u00f2n.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>Honway cung c\u1ea5p d\u1ecbch v\u1ee5 t\u01b0 v\u1ea5n \u0111\u0129a kim c\u01b0\u01a1ng:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>Gi\u1edbi thi\u1ec7u:<\/strong> L\u00e0 &#8220;b\u1ed9 ph\u1eadn m\u00e0i&#8221; c\u1ee7a mi\u1ebfng m\u00e0i\/mi\u1ebfng \u0111\u00e1nh b\u00f3ng, \u0111\u0129a kim c\u01b0\u01a1ng s\u1eed d\u1ee5ng \u0111\u1ed9 c\u1ee9ng cao c\u1ee7a n\u00f3 \u0111\u1ec3 m\u00e0i ch\u00ednh x\u00e1c b\u1ec1 m\u1eb7t c\u1ee7a mi\u1ebfng m\u00e0i\/mi\u1ebfng \u0111\u00e1nh b\u00f3ng nh\u1eb1m \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ph\u1eb3ng v\u00e0 hi\u1ec7u su\u1ea5t c\u1eaft, duy tr\u00ec hi\u1ec7u su\u1ea5t c\u1eaft t\u1ed1i \u01b0u, duy tr\u00ec \u0111\u1ed9 ph\u1eb3ng v\u00e0 t\u1ed1c \u0111\u1ed9 trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng wafer v\u00e0 c\u1ea3i thi\u1ec7n n\u0103ng su\u1ea5t.<\/li>\n\n\n\n<li><strong>D\u1ecbch v\u1ee5 cung c\u1ea5p:<\/strong> N\u1ebfu b\u1ea1n mu\u1ed1n bi\u1ebft th\u00eam chi ti\u1ebft, vui l\u00f2ng li\u00ean h\u1ec7 v\u1edbi Hongwei. Hongwei cung c\u1ea5p d\u1ecbch v\u1ee5 chuy\u00ean nghi\u1ec7p v\u00e0 t\u1ea1o ra m\u1ed9t d\u1ef1 \u00e1n c\u00e1 nh\u00e2n h\u00f3a d\u00e0nh ri\u00eang cho b\u1ea1n.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-7e83c25eb39d96ee7e81a165b6de7b09\" id=\"&#x7ACB;&#x5373;&#x884C;&#x52D5;&#xFF0C;&#x8207;&#x6211;&#x5011;&#x5171;&#x540C;&#x958B;&#x555F;&#x534A;&#x5C0E;&#x9AD4;&#x7CBE;&#x5BC6;&#x88FD;&#x7A0B;&#x7684;&#x65B0;&#x7BC7;&#x7AE0;&#xFF01;\">H\u00e3y h\u00e0nh \u0111\u1ed9ng ngay v\u00e0 m\u1edf ra m\u1ed9t ch\u01b0\u01a1ng m\u1edbi v\u1ec1 s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ch\u00ednh x\u00e1c c\u00f9ng ch\u00fang t\u00f4i!<\/h2>\n\n<ol class=\"wp-block-list\">\n<li class=\"has-medium-font-size\"><strong>T\u01b0 v\u1ea5n mi\u1ec5n ph\u00ed v\u00e0 \u0111\u00e1nh gi\u00e1 d\u1ef1 \u00e1n:<\/strong> <strong>Chuy\u00ean gia v\u1eadt t\u01b0 ti\u00eau hao c\u00f4ng nghi\u1ec7p kim c\u01b0\u01a1ng Honway<\/strong> c\u1ee7a ch\u00fang t\u00f4i cung c\u1ea5p cho b\u1ea1n d\u1ecbch v\u1ee5 t\u01b0 v\u1ea5n s\u1ea3n ph\u1ea9m v\u00e0 \u0111\u00e1nh gi\u00e1 chuy\u00ean nghi\u1ec7p d\u1ef1a tr\u00ean nhu c\u1ea7u quy tr\u00ecnh c\u1ee5 th\u1ec3 c\u1ee7a b\u1ea1n \u0111\u1ec3 c\u00f9ng nhau t\u00ecm ra gi\u1ea3i ph\u00e1p m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng t\u1ed1t nh\u1ea5t.<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>Thi\u1ebft k\u1ebf gi\u1ea3i ph\u00e1p t\u00f9y ch\u1ec9nh:<\/strong> Cho d\u00f9 b\u1ea1n \u0111ang g\u1eb7p ph\u1ea3i th\u00e1ch th\u1ee9c v\u1edbi t\u1ea5m <strong>wafer silicon<\/strong> hay<strong> ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t (SiC, GaN, GaAs)<\/strong>, ch\u00fang t\u00f4i c\u00f3 th\u1ec3 thi\u1ebft k\u1ebf gi\u1ea3i <strong>ph\u00e1p m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng ch\u1ea5t b\u00e1n d\u1eabn<\/strong> \u0111\u00e1p \u1ee9ng t\u1ed1t nh\u1ea5t nhu c\u1ea7u c\u1ee7a b\u1ea1n.<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>V\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn v\u00e0 ki\u1ec3m tra hi\u1ec7u su\u1ea5t: <\/strong>Ch\u00fang t\u00f4i cung c\u1ea5p <strong>dung d\u1ecbch \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng Honway<\/strong>, \u0111\u0129a kim c\u01b0\u01a1ng, \u0111\u00e1 m\u00e0i ch\u00ednh x\u00e1c v\u00e0 c\u00e1c v\u1eadt t\u01b0 ti\u00eau hao kh\u00e1c h\u00e0ng \u0111\u1ea7u trong ng\u00e0nh. Ch\u00fang t\u00f4i c\u0169ng c\u00f3 th\u1ec3 h\u1ed7 tr\u1ee3 b\u1ea1n tri\u1ec3n khai quy tr\u00ecnh v\u00e0 ki\u1ec3m tra hi\u1ec7u su\u1ea5t \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o s\u1ea3n ph\u1ea9m c\u1ee7a b\u1ea1n \u0111\u1ea1t \u0111\u01b0\u1ee3c n\u0103ng su\u1ea5t cao v\u00e0 hi\u1ec7u su\u1ea5t tuy\u1ec7t v\u1eddi nh\u01b0 mong \u0111\u1ee3i.<\/li>\n\n\n\n<li class=\"has-medium-font-size\"><strong>Honway c\u00f3 n\u0103ng l\u1ef1c cung \u1ee9ng \u1ed5n \u0111\u1ecbnh<\/strong>, <strong>\u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng<\/strong>, <strong>d\u1ecbch v\u1ee5 sau b\u00e1n h\u00e0ng<\/strong> v\u00e0 <strong>h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh<\/strong>, c\u00f3 th\u1ec3 cung c\u1ea5p cho b\u1ea1n ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m \u0111\u1ed3ng \u0111\u1ec1u nh\u1ea5t.<\/li>\n<\/ol>\n\n<p class=\"has-medium-font-size\"><strong>\u0110\u1eebng \u0111\u1ec3 nh\u1eefng th\u00e1ch th\u1ee9c trong qu\u00e1 tr\u00ecnh gia c\u00f4ng h\u1ea1n ch\u1ebf s\u1ef1 s\u00e1ng t\u1ea1o c\u1ee7a b\u1ea1n! H\u00e3y li\u00ean h\u1ec7 v\u1edbi ch\u00fang t\u00f4i ngay v\u00e0 \u0111\u1ec3 v\u1eadt t\u01b0 ti\u00eau hao c\u00f4ng nghi\u1ec7p kim c\u01b0\u01a1ng c\u1ee7a Hongwei tr\u1edf th\u00e0nh ch\u00eca kh\u00f3a th\u00e0nh c\u00f4ng c\u1ee7a b\u1ea1n!<\/strong><\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-fd472ddd2bf2d6722703c2cd44f935b5\" id=\"&#x66F4;&#x591A;&#x5B8F;&#x5D34;&#x947D;&#x77F3;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x8017;&#x6750;&#x8CC7;&#x8A0A;\">Th\u00f4ng tin th\u00eam v\u1ec1 v\u1eadt t\u01b0 ti\u00eau hao m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng Honway<\/h2>\n\n<p class=\"has-medium-font-size\"><strong>\u0110\u1ec3 t\u00ecm hi\u1ec3u th\u00eam v\u1ec1 c\u00e1ch Acer c\u00f3 th\u1ec3 mang l\u1ea1i nh\u1eefng l\u1ee3i \u00edch \u0111\u1ed9t ph\u00e1 cho quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn c\u1ee7a b\u1ea1n, vui l\u00f2ng nh\u1ea5p v\u00e0o li\u00ean k\u1ebft sau \u0111\u1ec3 kh\u00e1m ph\u00e1 to\u00e0n b\u1ed9 c\u00e1c v\u1eadt t\u01b0 ti\u00eau hao m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng c\u0169ng nh\u01b0 th\u00f4ng tin chi ti\u1ebft v\u1ec1 c\u00f4ng ngh\u1ec7 c\u1ee7a ch\u00fang t\u00f4i:<\/strong><\/p>\n\n<ul class=\"wp-block-list has-medium-font-size\">\n<li><strong><a href=\"\/?product_cat=&#x7814;&#x78E8;&#x6DB2;\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product-category\/%e7%a0%94%e7%a3%a8%e6%b6%b2\/\">D\u00f2ng s\u1ea3n ph\u1ea9m dung d\u1ecbch \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng nano Hongwei<\/a><\/strong><\/li>\n\n\n\n<li><strong><a href=\"\/?product_cat=&#x91D1;&#x76F8;&#x62CB;&#x5149;&#x588A;\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product-category\/%e9%87%91%e7%9b%b8%e8%80%97%e6%9d%90\/%e9%87%91%e7%9b%b8%e6%8b%8b%e5%85%89%e5%a2%8a\/\">T\u1ea5m m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng wafer ch\u00ednh x\u00e1c Honway<\/a><\/strong><\/li>\n\n\n\n<li><strong><a href=\"https:\/\/honwaygroup.com\/vi\/product\/da-mai-de-mai-be-mat-wafer\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product\/%e6%99%b6%e5%9c%93%e5%b9%b3%e9%9d%a2%e7%a3%a8%e5%89%8a%e7%94%a8%e7%a0%82%e8%bc%aa\/\">B\u00e1nh m\u00e0i b\u1ec1 m\u1eb7t wafer Honway<\/a><\/strong><\/li>\n\n\n\n<li><strong><a href=\"https:\/\/honwaygroup.com\/vi\/product\/da-mai-vat-canh-cho-tam-wafer-silicon\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product\/%e7%9f%bd%e6%99%b6%e5%9c%93%e7%94%a8%e5%80%92%e8%a7%92%e7%a3%a8%e5%89%8a%e7%a0%82%e8%bc%aa\/\">B\u00e1nh m\u00e0i v\u00e1t wafer silicon Honway<\/a><\/strong><\/li>\n\n\n\n<li><strong><a href=\"https:\/\/honwaygroup.com\/vi\/product\/hwd25-dao-cat-dien-dinh-hinh-wafer\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product\/hwd25-%e6%99%b6%e5%9c%93%e9%9b%bb%e9%91%84%e5%88%92%e7%89%87%e5%88%80\/\">Dao c\u1eaft m\u1ea1 \u0111i\u1ec7n Honway Wafer<\/a><\/strong><\/li>\n\n\n\n<li><a href=\"https:\/\/honwaygroup.com\/product\/hwe25-%e6%99%b6%e5%9c%93%e5%b0%81%e8%a3%9d%e5%88%92%e7%89%87%e5%88%80-%e8%bb%9f%e5%88%80\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product\/hwe25-%e6%99%b6%e5%9c%93%e5%b0%81%e8%a3%9d%e5%88%92%e7%89%87%e5%88%80-%e8%bb%9f%e5%88%80\/\"><strong>Dao c\u1eaft bao b\u00ec b\u00e1nh x\u1ed1p Honway &#8211; dao m\u1ec1m<\/strong><\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/honwaygroup.com\/vi\/product\/dao-cat-bao-bi-banh-wafer-hws25-dao-cung\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/product\/hws25-%e6%99%b6%e5%9c%93%e5%b0%81%e8%a3%9d%e5%88%92%e7%89%87%e5%88%80-%e7%a1%ac%e5%88%80\/\"><strong>Dao c\u1eaft bao b\u00ec b\u00e1nh wafer Honway &#8211; dao c\u1ee9ng<\/strong><\/a><\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\"><strong>B\u1ea1n c\u0169ng c\u00f3 th\u1ec3 li\u00ean h\u1ec7 tr\u1ef1c ti\u1ebfp v\u1edbi \u0111\u1ed9i ng\u0169 chuy\u00ean gia Hongwei c\u1ee7a ch\u00fang t\u00f4i v\u00e0 ch\u00fang t\u00f4i s\u1ebd cung c\u1ea5p gi\u1ea3i ph\u00e1p v\u00e0 t\u01b0 v\u1ea5n chuy\u00ean nghi\u1ec7p nh\u1ea5t.<\/strong><\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-2cd12922818029d95f0077d3319e3d2b\" id=\"&#x95B1;&#x8B80;&#x66F4;&#x591A;&#x76F8;&#x95DC;&#x8B70;&#x984C;\">\u0110\u1ecdc th\u00eam v\u1ec1 c\u00e1c ch\u1ee7 \u0111\u1ec1 li\u00ean quan<\/h2>\n\n<ol class=\"wp-block-list\">\n<li class=\"has-medium-font-size\">Ch\u1ea5t n\u1ec1n kim c\u01b0\u01a1ng&gt;&gt;&gt;<a href=\"https:\/\/honwaygroup.com\/vi\/tu-do-trang-suc-den-chat-ban-dan-kim-cuong-dong-vai-tro-quan-trong-trong-the-he-vat-lieu-dan-nhiet-tiep-theo\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/%e5%be%9e%e7%8f%a0%e5%af%b6%e5%88%b0%e5%8d%8a%e5%b0%8e%e9%ab%94%ef%bc%9a%e9%91%bd%e7%9f%b3%e6%88%90%e7%82%ba%e6%96%b0%e4%b8%96%e4%bb%a3%e5%b0%8e%e7%86%b1%e6%9d%90%e6%96%99%e7%9a%84%e9%97%9c%e9%8d%b5\/\">T\u1eeb \u0111\u1ed3 trang s\u1ee9c \u0111\u1ebfn ch\u1ea5t b\u00e1n d\u1eabn: Kim c\u01b0\u01a1ng \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong th\u1ebf h\u1ec7 v\u1eadt li\u1ec7u d\u1eabn nhi\u1ec7t ti\u1ebfp theo<\/a><\/li>\n\n\n\n<li class=\"has-medium-font-size\">Ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t&gt;&gt;&gt;<a href=\"https:\/\/honwaygroup.com\/vi\/vu-khi-bi-mat-cua-san-xuat-ban-dan-chinh-xac-vat-tu-tieu-hao-mai-va-danh-bong-kim-cuong-cai-thien-hieu-suat-va-nang-suat-wafer-mot-cach-hieu-qua\/\" data-type=\"link\" data-id=\"https:\/\/honwaygroup.com\/%e5%8d%8a%e5%b0%8e%e9%ab%94%e7%b2%be%e5%af%86%e8%a3%bd%e7%a8%8b%e7%9a%84%e7%a7%98%e5%af%86%e6%ad%a6%e5%99%a8\/\">V\u0169 kh\u00ed b\u00ed m\u1eadt c\u1ee7a s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ch\u00ednh x\u00e1c: v\u1eadt t\u01b0 ti\u00eau hao m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng kim c\u01b0\u01a1ng, c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t v\u00e0 n\u0103ng su\u1ea5t wafer m\u1ed9t c\u00e1ch hi\u1ec7u qu\u1ea3!<\/a><\/li>\n<\/ol>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-wide\" \/>\n\n<p>V\u1ec1 m\u00e0i m\u00f2n: Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c \u0111i\u1ec1u ch\u1ec9nh t\u00f9y ch\u1ec9nh \u0111\u1ec3 \u0111i\u1ec1u ch\u1ec9nh t\u1ef7 l\u1ec7 theo nhu c\u1ea7u gia c\u00f4ng, nh\u1eb1m \u0111\u1ea1t hi\u1ec7u qu\u1ea3 t\u1ed1i \u0111a.<\/p>\n\n<p>N\u1ebfu b\u1ea1n v\u1eabn ch\u01b0a bi\u1ebft c\u00e1ch ch\u1ecdn s\u1ea3n ph\u1ea9m ph\u00f9 h\u1ee3p sau khi \u0111\u1ecdc n\u1ed9i dung, h\u00e3y li\u00ean h\u1ec7 v\u1edbi ch\u00fang t\u00f4i, s\u1ebd c\u00f3 chuy\u00ean gia h\u1ed7 tr\u1ee3 gi\u1ea3i \u0111\u00e1p cho b\u1ea1n.<\/p>\n\n<p style=\"line-height:0.8\">H\u00e3y li\u00ean h\u1ec7 v\u1edbi ch\u00fang t\u00f4i, s\u1ebd c\u00f3 chuy\u00ean gia h\u1ed7 tr\u1ee3 gi\u1ea3i \u0111\u00e1p cho b\u1ea1n.<\/p>\n\n<p style=\"line-height:0.8\">N\u1ebfu c\u1ea7n b\u00e1o gi\u00e1 t\u00f9y ch\u1ec9nh, h\u00e3y li\u00ean h\u1ec7 v\u1edbi ch\u00fang t\u00f4i.<\/p>\n\n<p style=\"line-height:0.8\">Th\u1eddi gian h\u1ed7 tr\u1ee3 kh\u00e1ch h\u00e0ng: Th\u1ee9 Hai \u0111\u1ebfn Th\u1ee9 S\u00e1u, t\u1eeb 09:00 \u0111\u1ebfn 18:00.<\/p>\n\n<p style=\"line-height:0.8\">phone\uff1a<a href=\"https:\/\/www.google.com\/search?q=%E5%AE%8F%E5%B4%B4&amp;oq=%E5%AE%8F%E5%B4%B4&amp;gs_lcrp=EgZjaHJvbWUqBggAEEUYOzIGCAAQRRg7MhAIARAuGK8BGMcBGIAEGI4FMgYIAhBFGDsyBwgDEAAYgAQyBggEEEUYPTIGCAUQRRg9MgYIBhBFGD0yBggHEEUYQdIBCDE5MDhqMGo3qAIIsAIB&amp;sourceid=chrome&amp;ie=UTF-8\" target=\"_blank\" rel=\"noreferrer noopener nofollow\">07 223 1058<\/a><\/p>\n\n<p style=\"line-height:0.8\">N\u1ebfu c\u00f3 ch\u1ee7 \u0111\u1ec1 mu\u1ed1n t\u00ecm hi\u1ec3u ho\u1eb7c kh\u00f4ng th\u1ec3 n\u00f3i r\u00f5 qua \u0111i\u1ec7n tho\u1ea1i, h\u00e3y nh\u1eafn tin tr\u1ef1c ti\u1ebfp qua Facebook nh\u00e9~~<\/p>\n\n<p style=\"line-height:0.8\">honway fb\uff1a<a href=\"https:\/\/lihi.cc\/LhR8c\" target=\"_blank\" rel=\"noreferrer noopener nofollow\">https:\/\/www.facebook.com\/honwaygroup<\/a><\/p>\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\" \/>\n\n<div class=\"wp-block-buttons is-layout-flex wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button\"><a class=\"wp-block-button__link has-ast-global-color-0-background-color has-background wp-element-button\" href=\"https:\/\/honwaygroup.com\/%e5%8e%9f%e7%89%a9%e6%96%99-2\/\" target=\"_blank\" rel=\"noreferrer noopener\">Ch\u00fang t\u00f4i l\u00e0 Honway, ki\u1ec3m so\u00e1t nguy\u00ean li\u1ec7u c\u1ee7a m\u00ecnh t\u1eeb ngu\u1ed3n g\u1ed1c, \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m v\u00e0 cung c\u1ea5p c\u00e1c l\u1ef1a ch\u1ecdn t\u00f9y ch\u1ec9nh cho b\u1ea1n.<\/a><\/div>\n<\/div>\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n<p>C\u00e1c b\u00e0i vi\u1ebft m\u00e0 b\u1ea1n c\u00f3 th\u1ec3 quan t\u00e2m&#8230;<\/p>\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-28f84493 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:100%\"><p>[wpb-random-posts]<\/p>\n<\/div>\n<\/div>\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, \u0111\u1ed9 ph\u1eb3ng c\u1ee7a wafer r\u1ea5t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi vi\u1ec7c x\u1ebfp ch\u1ed3ng m\u1ea1ch ch\u00ednh x\u00e1c. C\u00f4ng ngh\u1ec7 ph\u1eb3ng h\u00f3a c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP) ho\u1ea1t \u0111\u1ed9ng nh\u01b0 m\u1ed9t &#8220;k\u1ef9 thu\u1eadt vi\u00ean t\u00e1i t\u1ea1o b\u1ec1 m\u1eb7t wafer&#8221;, k\u1ebft h\u1ee3p t\u00e1c \u0111\u1ed9ng h\u00f3a h\u1ecdc v\u00e0 c\u01a1 h\u1ecdc \u0111\u1ec3 lo\u1ea1i b\u1ecf ch\u00ednh x\u00e1c v\u1eadt li\u1ec7u th\u1eeba kh\u1ecfi b\u1ec1 m\u1eb7t wafer, t\u1ea1o n\u1ec1n t\u1ea3ng ho\u00e0n h\u1ea3o cho c\u00e1c quy tr\u00ecnh ti\u1ebfp theo.<\/p>\n<p>Hongwei, chuy\u00ean gia trong l\u0129nh v\u1ef1c m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng b\u00e1n d\u1eabn, hi\u1ec3u r\u1eb1ng \u0111\u1ed9 ph\u1eb3ng c\u1ef1c \u0111\u1ea1i c\u1ee7a wafer l\u00e0 n\u1ec1n t\u1ea3ng c\u1ee7a chip hi\u1ec7u su\u1ea5t cao. \u0110\u1ec3 \u0111\u00e1p \u1ee9ng nh\u1eefng th\u00e1ch th\u1ee9c ng\u00e0y c\u00e0ng t\u0103ng c\u1ee7a quy tr\u00ecnh, ch\u00fang t\u00f4i cung c\u1ea5p gi\u1ea3i ph\u00e1p v\u1eadt t\u01b0 ti\u00eau hao l\u00f5i CMP to\u00e0n di\u1ec7n v\u00e0 hi\u1ec7u qu\u1ea3, bao g\u1ed3m nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng hi\u1ec7u su\u1ea5t cao nh\u01b0 kim c\u01b0\u01a1ng, nh\u00f4m oxit, ceria v\u00e0 silicon dioxide. Nh\u1eefng v\u1eadt li\u1ec7u n\u00e0y c\u00f3 th\u1ec3 h\u1ed7 tr\u1ee3 to\u00e0n di\u1ec7n wafer t\u1eeb qu\u00e1 tr\u00ecnh m\u00e0i th\u00f4 \u0111\u1ebfn \u0111\u00e1nh b\u00f3ng ho\u00e0n thi\u1ec7n, t\u1ea1o n\u1ec1n t\u1ea3ng ho\u00e0n h\u1ea3o cho quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u00ednh x\u00e1c c\u1ee7a b\u1ea1n.<\/p>\n","protected":false},"author":1,"featured_media":113639,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[4290,9132,4294],"tags":[10263,4601,10162],"class_list":["post-121078","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-chuyen-muc-kien-thuc","category-cong-nghe-mai-va-danh-bong-ban-dan","category-lop-hoc-khoa-hoc-pho-thong","tag-cmp-vi","tag-danh-bong-mai","tag-nganh-cong-nghiep-ban-dan"],"_links":{"self":[{"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/posts\/121078","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/comments?post=121078"}],"version-history":[{"count":0,"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/posts\/121078\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/media\/113639"}],"wp:attachment":[{"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/media?parent=121078"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/categories?post=121078"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/honwaygroup.com\/vi\/wp-json\/wp\/v2\/tags?post=121078"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}