{"id":105039,"date":"2019-03-09T17:58:56","date_gmt":"2019-03-09T09:58:56","guid":{"rendered":"https:\/\/honwaygroup.com\/%ea%b8%b0%ec%83%81-%ed%95%a9%ec%84%b1%ec%9c%bc%eb%a1%9c-%ec%a0%9c%ec%a1%b0%eb%90%9c-%eb%8b%a8%ea%b2%b0%ec%a0%95-%eb%8b%a4%ec%9d%b4%ec%95%84%eb%aa%ac%eb%93%9c\/"},"modified":"2025-05-09T00:28:42","modified_gmt":"2025-05-08T16:28:42","slug":"%ea%b8%b0%ec%83%81-%ed%95%a9%ec%84%b1%ec%9c%bc%eb%a1%9c-%ec%a0%9c%ec%a1%b0%eb%90%9c-%eb%8b%a8%ea%b2%b0%ec%a0%95-%eb%8b%a4%ec%9d%b4%ec%95%84%eb%aa%ac%eb%93%9c","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/ko\/%ea%b8%b0%ec%83%81-%ed%95%a9%ec%84%b1%ec%9c%bc%eb%a1%9c-%ec%a0%9c%ec%a1%b0%eb%90%9c-%eb%8b%a8%ea%b2%b0%ec%a0%95-%eb%8b%a4%ec%9d%b4%ec%95%84%eb%aa%ac%eb%93%9c\/","title":{"rendered":"\uae30\uc0c1 \ud569\uc131\uc73c\ub85c \uc81c\uc870\ub41c \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc"},"content":{"rendered":"

1994\ub144 GE<\/a>\uc758 Thomas R. Anthony \ub4f1\uc740 \ubbf8\uad6d \ud2b9\ud5c8 5,437,891(1995\ub144 \ubc1c\ud589)\uc744 \ud68d\ub4dd\ud558\uc600\uc73c\uba70, \uae30\uc0c1 \uc99d\ucc29(CVD) \ubc29\uc2dd\uc73c\ub85c \ub2e4\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0ac \ub54c {100} \uacb0\uc815\uba74\uc744 \ud65c\uc6a9\ud558\uba74 \uc131\uc7a5 \uc18d\ub3c4\ub97c \ub192\uc77c \uc218 \uc788\ub2e4\uace0 \ubc1d\ud614\uc2b5\ub2c8\ub2e4. \ub354 \ub098\uc544\uac00, \ubc18\uc751 \uae30\uccb4 \ud750\ub984(\uc608: 98% \uc218\uc18c + 1% \uba54\ud0c4)\uc5d0 \uc18c\ub7c9(\uc57d 1%)\uc758 \uacf5\uae30(78% \uc9c8\uc18c, 21% \uc0b0\uc18c, 1% \uc544\ub974\uace4)\ub97c \ucca8\uac00\ud558\uba74, \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \uc131\uc7a5 \uc18d\ub3c4\uac00 \ub354\uc6b1 \ud5a5\uc0c1\ub41c\ub2e4\uace0 \uc124\uba85\ud558\uc600\uc2b5\ub2c8\ub2e4. <\/p>\n

1996\ub144 Anthony \ub4f1\uc740 \uace0\uc555(\uff1e3 Kb) \ubc0f \uace0\uc628(\uc608: 1300\u2103) \uc870\uac74\uc5d0\uc11c CVD\ub85c \uc131\uc7a5\ub41c \ub2e4\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc \ubc15\ub9c9\uc758 \uacb0\ud568\uc744 \uac10\uc18c\uc2dc\ud0a4\ub294 \ubc29\ubc95\uc744 \ubc1c\uba85\ud558\uc600\uc73c\uba70, \uc774\uc5d0 \ub300\ud55c \ub0b4\uc6a9\uc740 1997\ub144\uc5d0 \ubc1c\ud589\ub41c \ubbf8\uad6d \ud2b9\ud5c8 5,672,395\uc5d0 \ub4f1\uc7ac\ub418\uc5c8\uc2b5\ub2c8\ub2e4. 2004\ub144\uc5d0\ub294 Robert H. Frushour\uac00 \uc720\uc0ac\ud55c \uae30\uc220\ub85c \ubbf8\uad6d \ud2b9\ud5c8 6,811,610\uc744 \ucde8\ub4dd\ud558\uc600\ub294\ub370, \uc774 \ud2b9\ud5c8\ub294 \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc \ubc15\ub9c9\uc5d0 \ub300\ud55c \uc5f4\ucc98\ub9ac \uae30\uc220\uc744 \ub2e4\ub8e8\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uac19\uc740 \ud574 Suresh S. Vagarali \ub4f1\uc740 \ubbf8\uad6d \ud2b9\ud5c8 6,692,714\ub97c \ud68d\ub4dd\ud558\uc600\uc73c\uba70, \uc774 \ud2b9\ud5c8\ub294 \uace0\uc555 \ubc0f \uace0\uc628 \uc870\uac74\uc744 \uc774\uc6a9\ud574 \uc720\uc0c9 \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc5f0\ud55c \uc0c9 \ub610\ub294 \ubb34\uc0c9\uc73c\ub85c \ubcc0\ud654\uc2dc\ud0a4\ub294 \ubc29\ubc95\uc5d0 \uad00\ud55c \uac83\uc785\ub2c8\ub2e4. <\/p>\n

\ub300\ub9cc \uc911\uc559\uc5f0\uad6c\uc6d0 \uc6d0\uc0ac\uc774\uc790 \ubbf8\uad6d \ubc0f \uc911\uad6d \uacfc\ud559\uc6d0 \uc6d0\uc0ac\uc774\uae30\ub3c4 \ud55c \ub9c8\uc624 \ud5c8\uad11<\/a>\ubc15\uc0ac\uc640 Russell Hemley\ub294 \ubbf8\uad6d \uce74\ub124\uae30 \uacfc\ud559\uc5f0\uad6c\uc18c(Carnegie Institute of Washington, CIW) \uc0b0\ud558 \uc9c0\uad6c\ubb3c\ub9ac\uc5f0\uad6c\uc18c(Geophysical Lab)\uc758 \uacfc\ud559\uc790\uc785\ub2c8\ub2e4. 1998\ub144, \ub300\ub9cc\uc758 \uc60c\uc988\uc250<\/a>\ub294 \uc774\ub4e4\uc774 \uc9c0\uc6d0\ud55c \uc5f0\uad6c \ud504\ub85c\uc81d\ud2b8\ub97c \ud1b5\ud574 CVD \ubc29\uc2dd\uc73c\ub85c \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0a4\ub294 \uc5f0\uad6c\ub97c \uc218\ud589\ud558\uc600\uc2b5\ub2c8\ub2e4. \uae30\uc0c1 \uc99d\ucc29 \uc2dc\uc5d0\ub294 \ucc9c\uc5f0 \ub610\ub294 \uc778\uacf5 \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc528\uc557 \uacb0\uc815\uc73c\ub85c \uc0ac\uc6a9\ud558\uba70, \uadf8 \uc704\uc5d0 \ub3d9\uc885 \uacb0\uc815\uc73c\ub85c \uc5f0\uc18d \uc131\uc7a5\ud558\ub294 \uc790\uc131\uc7a5(homo-epitaxial) \ubc29\uc2dd\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc528\uc557 \uacb0\uc815\uc740 \uc77c\ubc18\uc801\uc73c\ub85c (100) \uba74\uc774 \uc99d\ucc29 \uba74\uc73c\ub85c \uc0ac\uc6a9\ub418\uba70, \uc131\uc7a5 \uc18d\ub3c4\ub97c \ub192\uc774\uae30 \uc704\ud574 \uc528\uc557 \uacb0\uc815\uc758 \uc628\ub3c4\ub97c \uc0c1\ub2f9\ud788 \ub192\uc774\uace0, \uba54\ud0c4\uc758 \ub18d\ub3c4\ub97c \uc801\uc808\ud788 \uc99d\uac00\uc2dc\ud0a4\uba70, \ubc18\uc751 \uae30\uccb4\uc5d0 \uc9c8\uc18c\uc640 \uc0b0\uc18c\ub97c \ucd94\uac00\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c\ub294 \uc2dc\uac04\ub2f9 15 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130(\u00b5m) \uc774\uc0c1\uc758 \uc18d\ub3c4\ub85c \uc9c8\uc18c\uac00 \ud3ec\ud568\ub41c \ud669\uc0c9 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. Hemley \ub4f1\uc774 2002\ub144\uc5d0 \ucd9c\uc6d0\ud558\uc5ec \ucde8\ub4dd\ud55c \ubbf8\uad6d \ud2b9\ud5c8 6,858,078\uc5d0 \ub530\ub974\uba74, \ub9c8\uc774\ud06c\ub85c\uc6e8\uc774\ube0c \ud50c\ub77c\uc988\ub9c8\ub97c \uc5f4\uc6d0\uc73c\ub85c \uc0ac\uc6a9\ud558\uba70, \ubc18\uc751 \uc555\ub825\uc740 160 torr, \uae30\uccb4 \uc870\uc131\uc740 3% N2\uff1a97% CH4\uff1a\ub610\ub294 12% CH4\uff1a88% H2\ub85c, \uae30\uccb4 \uc720\ub7c9\uc740 1.8 sccm N2, 60 sccm CH4, 500 sccm H2\uc785\ub2c8\ub2e4. \ub2e4\uc774\uc544\ubaac\ub4dc \uc528\uc557 \uacb0\uc815\uc758 \ucd08\uae30 \ud06c\uae30\ub294 3.5 \u00d7 3.5 \u00d7 1.6 mm3, \uc815\uba74\uc740 (100) \uba74\uc774\uba70, \uc131\uc7a5 \uc628\ub3c4\ub294 1220\u2103 \u00b1 10\u2103\uc774\uace0, 12\uc2dc\uac04 \ud6c4 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \ud06c\uae30\ub294 4.2 \u00d7 4.2 \u00d7 2.3 mm3\ub85c \uc99d\uac00\ud558\uc5ec, \uacc4\uc0b0\ub41c \uc131\uc7a5 \uc18d\ub3c4\ub294 \uc2dc\uac04\ub2f9 58 \u00b5m\uc5d0 \ub2ec\ud588\uc2b5\ub2c8\ub2e4. <\/p>\n

2005\ub144, \uc60c\uc988\uc250\ub294 CVD \ubc29\uc2dd\uc73c\ub85c 10\uce90\ub7ff \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0a4\ub294 \ub370 \uc131\uacf5\ud588\uc73c\uba70, \uc774\ub294 CVD \ud569\uc131 \ub2e4\uc774\uc544\ubaac\ub4dc \ubd84\uc57c\uc758 \ud558\ub098\uc758 \uc774\uc815\ud45c\ub85c \ud3c9\uac00\ub429\ub2c8\ub2e4. \uc804\ud574\uc9c4 \ubc14\uc5d0 \ub530\ub974\uba74, \uc774 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \uc131\uc7a5 \ube44\uc6a9\uc740 5,000\ub2ec\ub7ec\uc5d0 \ubd88\uacfc\ud588\uc73c\uba70, \uc774\ub294 \ub3d9\uc77c \uc911\ub7c9\uc758 \ucc9c\uc5f0 \ub2e4\uc774\uc544\ubaac\ub4dc \ubcf4\uc11d \uac00\uce58\uc758 5%\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4.
CVD \ubc29\uc2dd\uc73c\ub85c \uc131\uc7a5\ub41c \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc740 \ub0b4\ubd80\uac00 \uc644\uc804\ud788 \uce58\ubc00\ud558\uc9c0 \uc54a\uc740\ub370, CIW\ub294 \uc774\ub7ec\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c 6 GPa\uc758 \uace0\uc555\uacfc 2000\u2103\uc758 \uace0\uc628\uc5d0\uc11c 10\ubd84\uac04 \ucc98\ub9ac\ud568\uc73c\ub85c\uc368 \uacbd\ub3c4\ub97c \ud604\uc800\ud788 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc74c\uc744 \ubc1d\ud614\uc2b5\ub2c8\ub2e4. \uc774\ucc98\ub7fc \uc5f4\ucc98\ub9ac\ub85c \uac15\ud654\ub41c \ub2e4\uc774\uc544\ubaac\ub4dc\ub294 \ucc9c\uc5f0 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \uacbd\ub3c4\ub9c8\uc800 \ucd08\uacfc\ud560 \uc218 \uc788\ub294 \uac00\ub2a5\uc131\uc744 \uc9c0\ub2c8\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud558\uc9c0\ub9cc, CVD \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc758 \ud2b9\uc131(\uc608: \ud22c\uba85\ub3c4)\uc744 \uace0\uc555 \uc5f4\ucc98\ub9ac\ub85c \uac1c\uc120\ud558\ub294 \uae30\uc220\uc5d0 \uad00\ud55c \ubbf8\uad6d \ud2b9\ud5c8 U.S. Patent 6,811,610\uc758 \ubc1c\uba85\uc790\ub294 Robert H. Frushour\uc785\ub2c8\ub2e4. Frushour\ub294 1970\ub144\ub300 GE\uc758 Specialty Materials Department(\ud604 GE Superabrasives \uc804\uc2e0)\uc758 \ucc45\uc784\uc790\uc600\uc73c\uba70, \uc774\ud6c4 GTE \uc0b0\ud558\uc758 Valenite\uc5d0\uc11c Valdiamant\ub97c \ucc3d\ub9bd\ud558\uc5ec GE\uc640 PCD(\ub2e4\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc) \uace0\uac1d\uc744 \ub450\uace0 \uacbd\uc7c1\ud558\uc600\uc2b5\ub2c8\ub2e4. \ud6c4\uc5d0 GE\uac00 \uc774\ub97c \uc778\uc218\ud558\uc5ec \uc555\ub825 \uc7a5\ube44\ub97c \ucca0\uac70\ud558\uc790, \uadf8\ub294Phoenix Crystal\uc774\ub77c\ub294 \ud68c\uc0ac\ub97c \uc124\ub9bd\ud558\uc5ec \uace0\uc555 \uae30\uc220\uc744 \ud310\ub9e4\ud558\uae30 \uc2dc\uc791\ud588\uc2b5\ub2c8\ub2e4. GE Superabrasives\ub294 2003\ub144 Littlejohn\uc5d0 \ub9e4\uac01\ub418\uc5c8\uace0, \ub2f9\uc2dc GE\uc758 \u2018\uc6d0\ub85c\uae09 \uc778\uc0ac\ub4e4\u2019\uc740 \uc774\ubbf8 \ud68c\uc0ac\ub97c \ub5a0\ub09c \uc0c1\ud0dc\uc600\uc2b5\ub2c8\ub2e4. \uae30\uc220 \uc804\ud658 \uacfc\uc815\uc5d0\uc11c\uc758 \ub2e8\uc808\uc744 \ub9c9\uae30 \uc704\ud574, Diamond Innovations\ub294 \uacfc\uac70\uc758 \u2018\ubc18\uc5ed\uc790\u2019\uc600\ub358 Frushour\ub97c \uae30\uc220 \uc790\ubb38\uc73c\ub85c \ub2e4\uc2dc \uc601\uc785\ud558\uc600\uc2b5\ub2c8\ub2e4. \uadf8\ubfd0\ub9cc \uc544\ub2c8\ub77c, GE Superabrasives\ub294 \uacfc\uac70 \uc1a1\uac74\ubbfc\uc774 \ud55c\uad6d\uc758 \uc77c\uc9c4\ub2e4\uc774\uc544\ubaac\ub4dc(Iljin Diamond) \ubc0f \uc911\uad6d\uc758 \uc544\uc2dc\uc544\ub2e4\uc774\uc544\ubaac\ub4dc\uc5d0 \uae30\uc220\uc744 \uc9c0\uc6d0\ud55c \uac83\uacfc \uad00\ub828\ud558\uc5ec \ubc95\uc801 \uc18c\uc1a1\uc744 \uc81c\uae30\ud55c \ubc14 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 2004\ub144 \uc774\ud6c4, Diamond Innovations\ub294 \uc1a1\uac74\ubbfc\uc758 \uae30\uc220 \uc9c0\uc6d0\uc744 \ubc1b\uc544 \uc790\uc0ac\uc758 \uace0\uc555 \ud569\uc131 \uacf5\uc815\uc744 \uac1c\uc120\ud558\uae30 \uc2dc\uc791\ud558\uc600\uc2b5\ub2c8\ub2e4. <\/p>\n

\uc60c\uc988\uc250\ub294 \uc77c\ubcf8 Seki\uc5d0\uc11c \uc81c\uc870\ud55c ASTeX AX5250 \uc7a5\ube44\ub97c \uc0ac\uc6a9\ud558\uc5ec \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ucf30\uc2b5\ub2c8\ub2e4.
\uc774 \uc7a5\ube44\uc758 \ucd9c\ub825\uc740 5kW, \ub9c8\uc774\ud06c\ub85c\ud30c \uc8fc\ud30c\uc218\ub294 2.45GHz\uc785\ub2c8\ub2e4. \ub178\ub780\uc0c9 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc0dd\uc131\ud560 \uacbd\uc6b0, \uc131\uc7a5 \uc18d\ub3c4\ub294 \uc2dc\uac04\ub2f9 15 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130(\u00b5m), \uc989 1\uc2dc\uac04\uc5d0 \uc57d 1\/3\uce90\ub7ff \uc815\ub3c4\uc785\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \ubb34\uc0c9 \ud22c\uba85\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0ac \uacbd\uc6b0 \uc18d\ub3c4\ub294 5\u00b5m \uc774\ud558\ub85c \ub5a8\uc5b4\uc9c0\uac8c \ub429\ub2c8\ub2e4. \ub610\ud55c \uc131\uc7a5 \uacfc\uc815 \uc911 (100) \uba74 \uc704\uc5d0 (111) \uba74\uc758 \uc791\uc740 \ud53c\ub77c\ubbf8\ub4dc \ud615\ud0dc\uac00 \uc313\uc774\uac8c \ub418\ub294\ub370, \uc774\ub85c \uc778\ud574 \uc131\uc7a5 \uc18d\ub3c4\uac00 \uc800\ud558\ub418\ubbc0\ub85c, \uc885\uc885 \uc131\uc7a5 \uc911\ub2e8 \ud6c4 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uaebc\ub0b4\uc5b4 \uc5f0\ub9c8\ud558\uace0, \ub2e4\uc2dc \uc7a5\ube44\uc5d0 \ub123\uc5b4 \uc131\uc7a5 \ub9b4\ub808\uc774 \ubc29\uc2dd\uc73c\ub85c \ub450\uaed8\ub97c \uc99d\uac00\uc2dc\ucf1c\uc57c \ud569\ub2c8\ub2e4. <\/p>\n

5kW \ucd9c\ub825\uc73c\ub85c \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0ac \uacbd\uc6b0, \uc131\uc7a5 \uac00\ub2a5\ud55c \uba74\uc801\uc740 \ucd5c\ub300 100 \uc81c\uacf1\uc13c\ud2f0\ubbf8\ud130\uc5d0 \ub2ec\ud569\ub2c8\ub2e4. \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc99d\ucc29\ud560 \ub54c\uc758 \uc628\ub3c4\ub294 \uc57d 1200\u2103\ub85c, \uc774 \uc870\uac74\uc5d0\uc11c\ub294 100\ud0ac\ub85c\uc640\ud2b8\uc2dc(100 KwH) \ub2f9 \ucd5c\ub300 3cc\uc758 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0ac \uc218 \uc788\uc73c\uba70, \uc774\ub294 \uc804\ud1b5\uc801\uc778 900\u2103\uc5d0\uc11c \uc131\uc7a5\ud558\ub294 \ub2e4\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc6a9 CVD \ubc29\uc2dd\ubcf4\ub2e4 \uc57d 10\ubc30 \ub192\uc740 \ud6a8\uc728\uc744 \uac00\uc9d1\ub2c8\ub2e4. \uc774\ub97c \uae30\uc900\uc73c\ub85c \ud658\uc0b0\ud558\uba74, \uae30\uc0c1 \uc99d\ucc29 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \uc9c1\uc811 \uc0dd\uc0b0 \ube44\uc6a9\uc740 \uc2dc\uac04\ub2f9 \uc57d $10, \ub610\ub294 \uce90\ub7ff\ub2f9 \uc57d $100 \uc218\uc900\uc785\ub2c8\ub2e4. <\/p>\n

\uae30\uc0c1 \uc99d\ucc29(CVD)\uc740 \ud751\uc5f0\uc774 \uc548\uc815\ud55c \uc601\uc5ed\uc5d0\uc11c \uc900\uc548\uc815 \uc0c1\ud0dc\uc758 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0a4\ub294 \ubc29\uc2dd\uc774\uae30 \ub54c\ubb38\uc5d0, \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 sp3 \uacb0\ud569\uc744 \ubcf4\ud638\ud558\uae30 \uc704\ud574 \uc218\uc18c \ubd84\uc790\ub97c \ub300\ub7c9\uc73c\ub85c \ubd84\ud574\ud558\ub294 \uc5d0\ub108\uc9c0\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uadf8\ub7fc\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0, \uae30\uccb4 \ubd84\uc790\uc758 \ubc00\ub3c4\ub294 \uc561\uccb4\ubcf4\ub2e4 \uc57d \ucc9c \ubc30\ub098 \ub0ae\uae30 \ub54c\ubb38\uc5d0, \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \uc131\uc7a5 \uc18d\ub3c4\ub97c \ub192\uc774\uae30\uac00 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \ub610\ud55c CVD\ub294 \uc774\ucc28\uc6d0 \uc131\uc7a5 \uae30\uc220\uc774\uae30 \ub54c\ubb38\uc5d0, \ub113\uc740 \uba74\uc801\uc5d0 \uc99d\ucc29\ud574\uc57c\ub9cc \ubcf4\uc11d\uae09 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \ub300\ub7c9 \uc0dd\uc0b0\ud560 \uc218 \uc788\ub294 \uacbd\uc81c\uc801 \uac00\uce58\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud604\uc7ac\ub85c\uc11c\ub294 \uc5ec\uc804\ud788 \uace0\uc555\uc758 \uc561\uc0c1 \uc99d\ucc29\ubc95\uc774 \ubcf4\uc11d\uc6a9 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \ub300\ub7c9 \uc0dd\uc0b0\uc5d0 \ub354 \uc801\ud569\ud55c \ubc29\uc2dd\uc785\ub2c8\ub2e4. CVD \ubc29\uc2dd\uc758 \ub2e4\uc774\uc544\ubaac\ub4dc \uc5d0\ud53c\ud0dd\uc2dc \uae30\uc220\uc740 \ud5a5\ud6c4 \ubc18\ub3c4\uccb4\uc6a9 \ubc15\ub9c9 \uc81c\uc870\uc5d0 \uc788\uc5b4\uc11c \ub9e4\uc6b0 \uc720\ud6a8\ud55c \ubc29\ubc95\uc73c\ub85c \ud3c9\uac00\ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4. <\/p>\n

2006\ub144 7\uc6d4 7\uc77c, \ub9c8\uc624 \ud5c8\uad11\uacfc \uc60c\uc988\uc250\ub294 \ud0c0\uc774\ubca0\uc774 \uad6d\uc81c\ud68c\uc758\uc13c\ud130\uc5d0\uc11c \uac01\uac01 \u300c\uc2e0\ub2e4\uc774\uc544\ubaac\ub4dc \uc2dc\ub300\u300d\uc640 \u300c\uace0\uc18d \uc131\uc7a5 \ub300\uba74\uc801 \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\u300d\ub97c \uc8fc\uc81c\ub85c \uac15\uc5f0\uc744 \uc9c4\ud589\ud558\uba70, \ub300\ub9cc \uc778\uc870 \ub2e4\uc774\uc544\ubaac\ub4dc \uc0b0\uc5c5\uc758 \ucd09\uc9c4\uc744 \ubaa9\ud45c\ub85c \uc0bc\uc558\uc2b5\ub2c8\ub2e4. \ub9c8\uc624 \ud5c8\uad11\uc740 4\uc778\uce58 \ub2e4\uc774\uc544\ubaac\ub4dc \uc6e8\uc774\ud37c\uc758 \uc131\uc7a5 \ube44\uc804\uc744 \uc81c\uc2dc\ud588\uace0,
\uc60c\uc988\uc250\ub294 \uc2dc\uac04\ub2f9 0.1mm \uc131\uc7a5\uc758 \uac00\ub2a5\uc131\uc744 \uc5b8\uae09\ud588\uc2b5\ub2c8\ub2e4. \uad6d\ub9bd\uad50\ud1b5\ub300\ud559\uad50\uc758 \ub9ac\uc174\ub354 \uad50\uc218\ub294 \ub9c8\uc624 \ud5c8\uad11\uc758 \uc2e4\ud5d8\uc2e4\uc744 \ubc29\ubb38\ud558\uc5ec \uae30\uc220 \uc774\uc804\uc744 \ud0c0\uc9c4\ud588\uc9c0\ub9cc, \uc870\uac74\uc774 \ub9de\uc9c0 \uc54a\uc544 \uc131\uc0ac\ub418\uc9c0 \uc54a\uc558\uace0, \uc774\uc5d0 \ub9ac\uc174\ub354\ub294 2007\ub144\uc5d0\u300c\ucc3d\uc138 \uc7ac\ub8cc \uacfc\ud559 \uc8fc\uc2dd\ud68c\uc0ac\u300d\ub97c \uc124\ub9bd\ud558\uc5ec \uad00\ub828 \uae30\uc220 \uac1c\ubc1c\uc5d0 \ucc29\uc218\ud558\uc600\uc2b5\ub2c8\ub2e4. <\/p>\n\n

<\/p>\n","protected":false},"excerpt":{"rendered":"

1994\ub144 GE\uc758 Thomas R. Anthony \ub4f1\uc740 \ubbf8\uad6d \ud2b9\ud5c8 5,437,891(1995\ub144 \ubc1c\ud589)\uc744 \ud68d\ub4dd\ud558\uc600\uc73c\uba70, \uae30\uc0c1 \uc99d\ucc29(CVD) \ubc29\uc2dd\uc73c\ub85c \ub2e4\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc\ub97c \uc131\uc7a5\uc2dc\ud0ac \ub54c {100} \uacb0\uc815\uba74\uc744 […]<\/p>\n","protected":false},"author":1,"featured_media":94815,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"default","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[5343],"tags":[5349,7415,7550,7560,7057],"class_list":["post-105039","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-5343","tag-cvd-ko","tag-7415","tag-7550","tag-7560","tag-7057"],"_links":{"self":[{"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/posts\/105039","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/comments?post=105039"}],"version-history":[{"count":0,"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/posts\/105039\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/media\/94815"}],"wp:attachment":[{"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/media?parent=105039"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/categories?post=105039"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/honwaygroup.com\/ko\/wp-json\/wp\/v2\/tags?post=105039"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}