{"id":19578,"date":"2019-03-09T17:58:56","date_gmt":"2019-03-09T09:58:56","guid":{"rendered":"https:\/\/honwaygroup.com\/%e6%b0%97%e7%9b%b8%e5%90%88%e6%88%90%e3%81%ab%e3%82%88%e3%82%8b%e3%83%80%e3%82%a4%e3%83%a4%e3%83%a2%e3%83%b3%e3%83%89%e5%8d%98%e7%b5%90%e6%99%b6\/"},"modified":"2025-02-12T10:37:46","modified_gmt":"2025-02-12T02:37:46","slug":"%e6%b0%97%e7%9b%b8%e5%90%88%e6%88%90%e3%81%ab%e3%82%88%e3%82%8b%e3%83%80%e3%82%a4%e3%83%a4%e3%83%a2%e3%83%b3%e3%83%89%e5%8d%98%e7%b5%90%e6%99%b6","status":"publish","type":"post","link":"https:\/\/honwaygroup.com\/ja\/%e6%b0%97%e7%9b%b8%e5%90%88%e6%88%90%e3%81%ab%e3%82%88%e3%82%8b%e3%83%80%e3%82%a4%e3%83%a4%e3%83%a2%e3%83%b3%e3%83%89%e5%8d%98%e7%b5%90%e6%99%b6\/","title":{"rendered":"\u6c17\u76f8\u5408\u6210\u306b\u3088\u308b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5358\u7d50\u6676"},"content":{"rendered":"<p>1994\u5e74\u3001<a href=\"https:\/\/www.ge.com\/\" rel=\"nofollow noopener\" target=\"_blank\">GE<\/a>\u306eThomas R. Anthony\u3089\u306f\u3001\u6c17\u76f8\u5806\u7a4d\u6cd5\uff08CVD\uff09\u3067\u6210\u9577\u3055\u305b\u305f\u591a\u7d50\u6676\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u5782\u76f4\u30a2\u30b9\u30da\u30af\u30c8\uff08100\uff09\u3092\u3001\u3088\u308a\u9ad8\u3044\u901f\u5ea6\u3067\u6210\u9577\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3068\u3057\u3066\u3001\u7c73\u56fd\u7279\u8a315,437,891\u3092\u51fa\u9858\u3057\u305f\uff081995\u5e74\u767a\u884c\uff09\u3002 \u7279\u306b\u3001\u53cd\u5fdc\u30ac\u30b9\u6d41\uff08\u4f8b\u3048\u307098\uff05\u6c34\u7d20\uff0b1\uff05\u30e1\u30bf\u30f3\uff09\u306b\u5c11\u91cf\uff08\u4f8b\u3048\u30701\uff05\uff09\u306e\u7a7a\u6c17\uff0878\uff05\u7a92\u7d20\u300121\uff05\u9178\u7d20\u30011\uff05\u30a2\u30eb\u30b4\u30f3\uff09\u3092\u6dfb\u52a0\u3059\u308b\u3068\u3001\u6210\u9577\u901f\u5ea6\u304c\u5411\u4e0a\u3059\u308b\u3002<\/p>\n<p>1996\u5e74\u3001Anthony\u3089\u306f\u3001CVD\u3067\u6210\u9577\u3055\u305b\u305f\u591a\u7d50\u6676\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u819c\u3092\u9ad8\u5727\uff083Kb\u4ee5\u4e0a\uff09\u30fb\u9ad8\u6e29\uff081300\u2103\u306a\u3069\uff09\u3067\u51e6\u7406\u3057\u3001\u6b20\u9665\u3092\u6e1b\u3089\u3059\u65b9\u6cd5\u3092\u767a\u660e\u3057\u305f\uff08\u7c73\u56fd\u7279\u8a315,672,395\u30011997\u5e74\u767a\u884c\uff09\u3002 2004\u5e74\u3001\u30ed\u30d0\u30fc\u30c8\u30fbH\u30fb\u30d5\u30eb\u30b7\u30e7\u30a2\u306f\u540c\u69d8\u306e\u7c73\u56fd\u7279\u8a316,811,610\u3092\u51fa\u9858\u3057\u305f\u304c\u3001\u3053\u308c\u306f\u71b1\u51e6\u7406\u7528\u306e\u5358\u7d50\u6676\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u819c\u306b\u95a2\u3059\u308b\u3082\u306e\u3067\u3042\u3063\u305f\u3002 2004\u5e74\u3001Suresh S. Vagarali\u3089\u306f\u3001\u9ad8\u5727\u30fb\u9ad8\u6e29\u306b\u3088\u308b\u30ab\u30e9\u30fc\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5358\u7d50\u6676\u306e\u7121\u8272\u5316\u306b\u95a2\u3059\u308b\u7c73\u56fd\u7279\u8a316,692,714\u3092\u53d6\u5f97\u3057\u305f\u3002<\/p>\n<p>\u53f0\u6e7e\u306e\u4e2d\u592e\u7814\u7a76\u9662\u306e\u30a2\u30ab\u30c7\u30df\u30b7\u30e3\u30f3\uff08\u7c73\u56fd\u3068\u4e2d\u56fd\u306e\u79d1\u5b66\u30a2\u30ab\u30c7\u30df\u30fc\u306e\u30e1\u30f3\u30d0\u30fc\u3067\u3082\u3042\u308b\uff09\u3001<a href=\"https:\/\/zh.m.wikipedia.org\/zh-tw\/%E6%AF%9B%E6%B2%B3%E5%85%89\" rel=\"nofollow noopener\" target=\"_blank\">\u6bdb\u548c\u5149<\/a>\u3068\u30e9\u30c3\u30bb\u30eb\u30fb\u30d8\u30e0\u30ea\u30fc\u306f\u3001\u7c73\u56fd\u306e\u30ab\u30fc\u30cd\u30ae\u30fc\u30fb\u30a4\u30f3\u30b9\u30c6\u30a3\u30c6\u30e5\u30fc\u30c8\u30fb\u30aa\u30d6\u30fb\u30ef\u30b7\u30f3\u30c8\u30f3\uff08CIW\uff09\u306e\u5730\u7403\u7269\u7406\u5b66\u7814\u7a76\u6240\u306e\u79d1\u5b66\u8005\u3067\u3042\u308a\u30011998\u5e74\u3001\u53f0\u6e7e\u306e<a href=\"http:\/\/www.alishandiamond.com\/zh\/about-alishandiamond\/who-we-are.html\" rel=\"nofollow noopener\" target=\"_blank\">\u9854\u5fd7\u5b78<\/a>\u306f\u3001\u5f7c\u3089\u306e\u8cc7\u91d1\u63d0\u4f9b\u306b\u3088\u308b\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3067CVD\u306b\u3088\u308b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5358\u7d50\u6676\u306e\u7814\u7a76\u3092\u884c\u3063\u305f\u3002 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\u6210\u9577\u901f\u5ea6\u3092\u901f\u3081\u308b\u305f\u3081\u306b\u3001\u7d50\u6676\u306e\u6e29\u5ea6\u3092\u304b\u306a\u308a\u4e0a\u3052\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u30e1\u30bf\u30f3\u306e\u542b\u6709\u91cf\u3092\u9069\u5ea6\u306b\u5897\u3084\u3057\u3001\u7a92\u7d20\u3068\u9178\u7d20\u3092\u30ac\u30b9\u306b\u52a0\u3048\u308b\u3053\u3068\u3067\u3001\u7a92\u7d20\u3092\u542b\u3080\u30a4\u30a8\u30ed\u30fc\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30921\u6642\u9593\u5f53\u305f\u308a15\u30df\u30af\u30ed\u30f3\uff08\u03bcm\uff09\u4ee5\u4e0a\u306e\u901f\u5ea6\u3067\u6210\u9577\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002 2002\u5e74\u306bHemley\u3089\u306b\u3088\u3063\u3066\u51fa\u9858\u3055\u308c\u305f\u7c73\u56fd\u7279\u8a316,858,078\u306e\u5b9f\u65bd\u4f8b1\u306b\u3088\u308b\u3068\u3001CVD\u306f\u3001\u5727\u529b160torr\u3001\u30ac\u30b9\u7d44\u62103\uff05N2\uff1a97\uff05CH4\uff1a12\uff05CH4\uff1a88\uff05H2\u3067\u3001\u71b1\u6e90\u3068\u3057\u3066\u30de\u30a4\u30af\u30ed\u6ce2\u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u7528\u3059\u308b\u3002 \u30ac\u30b9\u6d41\u91cf\u306f1.8 sccm N2\u300160 sccm CH4\u3001500 sccm H2\u3002 \u6210\u9577\u4e2d\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7d50\u6676\u306e\u5927\u304d\u3055\u306f3.5\u00d73.5\u00d71.6mm3\u3067\u3001\u305d\u306e\u88cf\u9762\u306f(100)\u3067\u3042\u308b\u3002 \u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u304c\u6210\u9577\u3059\u308b\u6e29\u5ea6\u306f1220\u2103\u00b110\u2103\u3067\u3042\u308b\u3002 \u6210\u957712\u6642\u9593\u5f8c\u306e\u30b5\u30a4\u30ba\u306f4.2\u00d74.2\u00d72.3mm3\u3067\u3001\u8a08\u7b97\u4e0a\u306e\u6210\u9577\u901f\u5ea6\u306f\u6bce\u664258\u03bcm\u3067\u3042\u308b\u3002<\/p>\n<p>\u984f\u5fd7\u5b78\u306f2005\u5e74\u306b10\u30ab\u30e9\u30c3\u30c8\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3092\u6210\u9577\u3055\u305b\u3001CVD\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u91d1\u5b57\u5854\u3092\u6253\u3061\u7acb\u3066\u305f\u3002 \u3053\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3092\u80b2\u3066\u308b\u306e\u306b\u304b\u304b\u3063\u305f\u8cbb\u7528\u306f\u308f\u305a\u304b5,000\u7c73\u30c9\u30eb\u3068\u8a00\u308f\u308c\u3066\u304a\u308a\u3001\u540c\u3058\u91cd\u3055\u306e\u5929\u7136\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e5\uff05\u306e\u4fa1\u5024\u3057\u304b\u306a\u3044\u3002 CVD\u3067\u6210\u9577\u3055\u305b\u305f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306f\u3001\u5185\u90e8\u306f\u7dfb\u5bc6\u3067\u306f\u306a\u3044\u304c\u3001CIW 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