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href=\"#%E5%87%BA%E5%8F%A3%E9%99%90%E5%88%B6%E5%B0%8D%E5%8F%B0%E7%81%A3%E7%94%A2%E6%A5%AD%E7%9A%84%E6%BD%9B%E5%9C%A8%E5%BD%B1%E9%9F%BF\">\u8f38\u51fa\u5236\u9650\u304c\u53f0\u6e7e\u306e\u7523\u696d\u306b\u53ca\u307c\u3059\u6f5c\u5728\u7684\u306a\u5f71\u97ff<\/a><\/li><li class=\"\"><a href=\"#%E7%B5%90%E8%AB%96\">\u7d50\u8ad6\u306f<\/a><\/li><li class=\"\"><a href=\"#%E9%96%B1%E8%AE%80%E6%9B%B4%E5%A4%9A%E7%9B%B8%E9%97%9C%E8%AD%B0%E9%A1%8C\">\u95a2\u9023\u30c8\u30d4\u30c3\u30af\u306e\u8a73\u7d30\u3092\u8aad\u3080<\/a><\/li><\/ul><\/nav><\/div>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-614d36be0594f5bb18e229f3db34d6d3\" id=\"&#x4E2D;&#x570B;&#x5C0D;&#x4EBA;&#x9020;&#x947D;&#x77F3;&#x8207;&#x77F3;&#x58A8;&#x5BE6;&#x65BD;&#x51FA;&#x53E3;&#x7BA1;&#x5236;\">\u4e2d\u56fd\u304c\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3068\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u8f38\u51fa\u898f\u5236\u3092\u8ab2\u3059<\/h2>\n\n<p 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class=\"has-medium-font-size\">\u767a\u8868\u306b\u3088\u308b\u3068\u3001\u898f\u5236\u5bfe\u8c61\u3068\u306a\u308b\u54c1\u76ee\u306f\u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3002<\/p>\n\n<h3 class=\"wp-block-heading\" id=\"&#x4E00;&#x3001;&#x4EBA;&#x9020;&#x947D;&#x77F3;&#x5FAE;&#x7C89;&#xFF08;&#x7DE8;&#x78BC;-2-c-902-a&#xFF09;\">1. \u4eba\u5de5\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c89\u672b\uff08\u30b3\u30fc\u30c92C902.a\uff09<\/h3>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\">\u898f\u5236\u5bfe\u8c61\u6210\u5206: \u5e73\u5747\u7c92\u5b50\u5f84\u304c50\u30df\u30af\u30ed\u30f3(\u03bcm)\u4ee5\u4e0b\u3001\u6982\u306d#400\u4ee5\u4e0a\u306e\u4eba\u5de5\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c89\u672b\u3002<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x4E8C;&#x3001;&#x4EBA;&#x9020;&#x947D;&#x77F3;&#x55AE;&#x6676;&#xFF08;&#x7DE8;&#x78BC;-2-c-902-b&#xFF09;\">2. 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id=\"&#x4E09;&#x3001;&#x4EBA;&#x9020;&#x947D;&#x77F3;&#x7DDA;&#x92F8;&#xFF08;&#x7DE8;&#x78BC;-2-c-902-c&#xFF09;\">3. \u4eba\u5de5\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc\uff08\u30b3\u30fc\u30c92C902.c\uff09<\/h3>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\">\u30ef\u30a4\u30e4\u5f84\u306f45\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\uff08\u03bcm\uff09\u4ee5\u4e0b\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\">\u542b\u307e\u308c\u308b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u5e73\u5747\u7c92\u5b50\u30b5\u30a4\u30ba\u306f 8 \u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb (\u03bcm) \u4ee5\u4e0b\u3067\u3059\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\">\u7834\u65ad\u529b\u306f16\u30cb\u30e5\u30fc\u30c8\u30f3\uff08N\uff09\u4ee5\u4e0b\u3067\u3059\u3002<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x56DB;&#x3001;&#x4EBA;&#x9020;&#x947D;&#x77F3;&#x7802;&#x8F2A;&#xFF08;&#x7DE8;&#x78BC;-2-c-902-d&#xFF09;\">4. 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id=\"&#x4E94;&#x3001;&#x76F4;&#x6D41;&#x96FB;&#x5F27;&#x7B49;&#x96E2;&#x5B50;&#x9AD4;&#x5674;&#x5C04;&#x5316;&#x5B78;&#x6C23;&#x76F8;&#x6C89;&#x7A4D;&#x8A2D;&#x5099;&#xFF08;dcpcvd&#xFF09;&#xFF08;&#x7DE8;&#x78BC;-2-b-005-b&#xFF09;\">5. DC\u30a2\u30fc\u30af\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u5316\u5b66\u84b8\u7740\u88c5\u7f6e\uff08DCPCVD\uff09\uff08\u30b3\u30fc\u30c92B005.b\uff09<\/h3>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\">\u898f\u5236\u5bfe\u8c61\u5185\u5bb9: \u4eba\u5de5\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3092\u5408\u6210\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b DCPCVD \u88c5\u7f6e\u3002<\/li>\n<\/ul>\n\n<h3 class=\"wp-block-heading\" id=\"&#x516D;&#x3001;dcpcvd-&#x88FD;&#x7A0B;&#x6280;&#x8853;&#xFF08;&#x7DE8;&#x78BC;-2-e-902-&#xFF09;\">6. DCPCVD\u30d7\u30ed\u30bb\u30b9\u6280\u8853\uff08\u30b3\u30fc\u30c92E902\uff09<\/h3>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\">\u898f\u5236\u5185\u5bb9: \u76f4\u6d41\u30a2\u30fc\u30af\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5 (DCPCVD) \u306b\u95a2\u9023\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9 \u30d1\u30e9\u30e1\u30fc\u30bf\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u4e0a\u8a18\u306e\u54c1\u76ee\u3092\u8f38\u51fa\u3059\u308b\u8005\u306f\u3001\u4e2d\u56fd\u5546\u52d9\u5f53\u5c40\u306b\u8f38\u51fa\u8a31\u53ef\u3092\u7533\u8acb\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u8a31\u53ef\u306e\u306a\u3044\u8f38\u51fa\u306f\u7981\u6b62\u3055\u308c\u3066\u304a\u308a\u3001\u7a0e\u95a2\u7533\u544a\u66f8\u306b\u306f\u8ecd\u6c11\u4e21\u7528\u54c1\u3067\u3042\u308b\u304b\u3069\u3046\u304b\u3092\u660e\u8a18\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-5adad11c9b7bbe8841e6bd7cdcd9392e\" id=\"&#x4E2D;&#x570B;&#x4EBA;&#x9020;&#x947D;&#x77F3;&#x7522;&#x696D;&#x6982;&#x6CC1;&#xFF1A;&#x5168;&#x7403;&#x4F9B;&#x61C9;&#x6838;&#x5FC3;\">\u4e2d\u56fd\u306e\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7523\u696d\u306e\u6982\u8981\uff1a\u4e16\u754c\u4f9b\u7d66\u306e\u4e2d\u6838<\/h2>\n\n<p class=\"has-medium-font-size\">\u300c\u4e2d\u56fd\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7523\u696d\u5730\u56f3\uff082023\u5e74\uff09\u300d\u306b\u3088\u308b\u3068\u3001\u4e2d\u56fd\u306e\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5358\u7d50\u6676\u751f\u7523\u91cf\u306f\u4e16\u754c\u7dcf\u91cf\u306e\u7d0495\uff05\u3092\u5360\u3081\u3001\u305d\u306e\u3046\u3061\u6cb3\u5357\u7701\u306f\u5168\u56fd\u7dcf\u91cf\u306e80\uff05\u3092\u5360\u3081\u3001\u4e16\u754c\u3067\u6700\u3082\u91cd\u8981\u306a\u4f9b\u7d66\u62e0\u70b9\u3068\u306a\u3063\u3066\u3044\u308b\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u4e2d\u56fd\u306f\u990a\u6b96\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5206\u91ce\u306b\u304a\u3051\u308b\u4e16\u754c\u306e\u751f\u7523\u80fd\u529b\u306e\u7d0450%\u3092\u5360\u3081\u3066\u304a\u308a\u3001\u6cb3\u5357\u7701\u304c\u4e3b\u8981\u751f\u7523\u5730\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u30de\u30a4\u30af\u30ed\u30d1\u30a6\u30c0\u30fc\u3001\u5358\u7d50\u6676\u3001\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc\u3001\u7814\u524a\u30db\u30a4\u30fc\u30eb\u306a\u3069\u306e\u8d85\u786c\u6750\u6599\u88fd\u54c1\u3082\u3001\u4e3b\u306b\u6b27\u5dde\u3001\u7c73\u56fd\u3001\u65e5\u672c\u3001\u53f0\u6e7e\u306e\u30cf\u30a4\u30a8\u30f3\u30c9\u52a0\u5de5\u5e02\u5834\u306b\u4f9b\u7d66\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n<p class=\"has-medium-font-size\">\u3057\u304b\u3057\u30012020\u5e74\u304b\u30892024\u5e74\u306b\u304b\u3051\u3066\u30e9\u30dc\u30b0\u30ed\u30a6\u30f3\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5e02\u5834\u304c\u6025\u901f\u306b\u62e1\u5927\u3059\u308b\u4e2d\u3067\u3001\u904e\u5270\u751f\u7523\u80fd\u529b\u306b\u3088\u308a\u30e9\u30dc\u30b0\u30ed\u30a6\u30f3\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c89\u672b\u304a\u3088\u3073\u5358\u7d50\u6676\u306e\u5e73\u5747\u8f38\u51fa\u4fa1\u683c\u306f30%\u4ee5\u4e0a\u4e0b\u843d\u3057\u3001\u4e00\u90e8\u306e\u4f01\u696d\u306f\u5728\u5eab\u3068\u5229\u76ca\u306e\u5727\u8feb\u306b\u76f4\u9762\u3057\u3066\u3044\u307e\u3059\u3002\u6700\u8fd1\u306e\u8f38\u51fa\u5236\u9650\u306b\u3088\u308a\u3001\u4e2d\u56fd\u306f\u4fa1\u683c\u6c7a\u5b9a\u6a29\u3068\u6226\u7565\u7684\u652f\u914d\u529b\u3092\u53d6\u308a\u623b\u3057\u3001\u30cf\u30a4\u30c6\u30af\u6750\u6599\u306b\u304a\u3051\u308b\u4ea4\u6e09\u529b\u3092\u5f37\u5316\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-bc2c00ca6daa2367792c3684b6fd6c8e\" id=\"&#x947D;&#x77F3;&#x7814;&#x78E8;&#x62CB;&#x5149;&#x5DE5;&#x5177;&#x7684;&#x61C9;&#x7528;&#x8207;&#x7279;&#x6027;\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7814\u524a\u30fb\u7814\u78e8\u5de5\u5177\u306e\u7528\u9014\u3068\u7279\u6027<\/h2>\n\n<p class=\"has-medium-font-size\">\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306f\u3001\u5b9d\u98fe\u54c1\u3084\u990a\u6b96\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7523\u696d\u3067\u5229\u7528\u3055\u308c\u3066\u3044\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u9ad8\u7cbe\u5ea6\u88fd\u9020\u3084\u534a\u5c0e\u4f53\u7523\u696d\u306b\u3082\u6b20\u304b\u305b\u306a\u3044\u6750\u6599\u3067\u3059\u3002\u4e3b\u306a\u7279\u5fb4\u306f\u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\" style=\"line-height:2\">\u8d85\u9ad8\u786c\u5ea6\uff08\u30e2\u30fc\u30b9\u786c\u5ea610\uff09\uff1a\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u92fc\u3001\u30bb\u30e9\u30df\u30c3\u30af\u3001\u30ac\u30e9\u30b9\u3001\u77f3\u6750\u306a\u3069\u306e\u9ad8\u786c\u5ea6\u6750\u6599\u3092\u52a0\u5de5\u3067\u304d\u307e\u3059\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\">\u512a\u308c\u305f\u8010\u6469\u8017\u6027\uff1a\u9577\u671f\u7814\u524a\u3067\u3082\u5b89\u5b9a\u3057\u305f\u5207\u524a\u529b\u3092\u7dad\u6301\u3067\u304d\u307e\u3059\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\">\u9ad8\u3044\u5316\u5b66\u7684\u5b89\u5b9a\u6027: \u5ba4\u6e29\u3067\u306f\u307b\u3068\u3093\u3069\u306e\u5316\u5b66\u7269\u8cea\u3068\u53cd\u5fdc\u3057\u306b\u304f\u3044\u3067\u3059\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\" style=\"line-height:2\">\u975e\u5e38\u306b\u9ad8\u3044\u71b1\u4f1d\u5c0e\u7387\uff1a\u71b1\u4f1d\u5c0e\u7387\u306f 2000 W\/m\u00b7K \u306b\u9054\u3057\u3001\u534a\u5c0e\u4f53\u653e\u71b1\u30e2\u30b8\u30e5\u30fc\u30eb\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u305f\u3060\u3057\u3001\u51e6\u7406\u4e0a\u306e\u5236\u9650\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n<ul class=\"wp-block-list\">\n<li class=\"has-medium-font-size\">\u9244\u542b\u6709\u91d1\u5c5e\uff08Fe\u3001Ni\u3001Co\uff09\u3092\u542b\u3080\u6750\u6599\u306f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u70ad\u5316\u53cd\u5fdc\u3092\u89e6\u5a92\u3057\u3001\u786c\u5ea6\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u305f\u3081\u9069\u3057\u3066\u3044\u307e\u305b\u3093\u3002<\/li>\n\n\n\n<li class=\"has-medium-font-size\">\u7814\u524a\u6e29\u5ea6\u304c600\u2103\u3092\u8d85\u3048\u308b\u3068\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306fTi\u3001Zr\u3001\u5e0c\u571f\u985e\u5143\u7d20\u306a\u3069\u3068\u70ad\u5316\u7269\u3092\u5f62\u6210\u3057\u3084\u3059\u304f\u306a\u308a\u3001\u640d\u5931\u304c\u52a0\u901f\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n\n<p class=\"has-medium-font-size\">\u305d\u306e\u305f\u3081\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7814\u524a\u30fb\u7814\u78e8\u5de5\u5177\u306f\u3001\u4e3b\u306b\u30bb\u30e9\u30df\u30c3\u30af\u57fa\u677f\u3001\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u3001\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\uff08Al\u2082O\u2083\uff09\u306a\u3069\u306e\u975e\u9244\u91d1\u5c5e\u306e\u9ad8\u7cbe\u5ea6\u52a0\u5de5\u306b\u7528\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306f\u3001\u5148\u7aef\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3084\u5316\u5408\u7269\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u6d88\u8017\u54c1\u3067\u3059\u3002<\/p>\n\n<h2 class=\"wp-block-heading has-ast-global-color-0-color has-text-color has-link-color wp-elements-2741bf5035c36c9a3ccc5a811a0e5215\" id=\"&#x51FA;&#x53E3;&#x9650;&#x5236;&#x5C0D;&#x53F0;&#x7063;&#x7522;&#x696D;&#x7684;&#x6F5B;&#x5728;&#x5F71;&#x97FF;\">\u8f38\u51fa\u5236\u9650\u304c\u53f0\u6e7e\u306e\u7523\u696d\u306b\u53ca\u307c\u3059\u6f5c\u5728\u7684\u306a\u5f71\u97ff<\/h2>\n\n<p class=\"has-medium-font-size\">\u53f0\u6e7e\u306f\u3001\u534a\u5c0e\u4f53\u3001\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u5206\u91ce\u306b\u304a\u3044\u3066\u8d85\u786c\u6750\u6599\u3078\u306e\u4f9d\u5b58\u5ea6\u304c\u9ad8\u3044\u3002\u4e2d\u56fd\u88fd\u306e\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c89\u672b\u3001\u7814\u524a\u7825\u77f3\u3001\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc\u306a\u3069\u306e\u88fd\u54c1\u306f\u3001\u9577\u5e74\u306b\u308f\u305f\u308a\u53f0\u6e7e\u306e\u7814\u524a\u30fb\u7814\u78e8\u6d88\u8017\u54c1\u5e02\u5834\u306e\u4e3b\u8981\u306a\u4f9b\u7d66\u6e90\u3068\u306a\u3063\u3066\u304d\u305f\u3002\u4eca\u56de\u306e\u8f38\u51fa\u5236\u9650\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/p>\n\n<ol class=\"wp-block-list\">\n<li 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style=\"flex-basis:100%\"><p>[wpb-random-posts]<\/p>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u4e2d\u56fd\u306f\u6700\u8fd1\u3001\u7279\u5b9a\u306e\u4eba\u5de5\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u88fd\u54c1\u304a\u3088\u3073\u95a2\u9023\u30d7\u30ed\u30bb\u30b9\u6a5f\u5668\u306b\u5bfe\u3059\u308b\u8f38\u51fa\u898f\u5236\u3092\u767a\u8868\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u306f\u3001\u30de\u30a4\u30af\u30ed\u30d1\u30a6\u30c0\u30fc\u3001\u5358\u7d50\u6676\u3001\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc\u3001\u7814\u524a\u30db\u30a4\u30fc\u30eb\u3001\u76f4\u6d41\u30a2\u30fc\u30af\u30d7\u30e9\u30ba\u30de\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08DCPCVD\uff09\u88c5\u7f6e\u304a\u3088\u3073\u6280\u8853\u304c\u542b\u307e\u308c\u307e\u3059\u3002<br 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